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Active Compensation of Position Dependent Flexible Dynamics in High-Precision Mechatronics
Authors:
Yorick Broens,
Hans Butler,
Ramidin Kamidi,
Koen Verkerk,
Siep Weiland
Abstract:
Growing demands in the semiconductor industry necessitate increasingly stringent requirements on throughput and positioning accuracy of lithographic equipment. Meeting these demands involves employing highly aggressive motion profiles, which introduce position-dependent flexible dynamics, thus compromising achievable position tracking performance. This paper introduces a control approach enabling…
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Growing demands in the semiconductor industry necessitate increasingly stringent requirements on throughput and positioning accuracy of lithographic equipment. Meeting these demands involves employing highly aggressive motion profiles, which introduce position-dependent flexible dynamics, thus compromising achievable position tracking performance. This paper introduces a control approach enabling active compensation of position-dependent flexible dynamics by extending the conventional rigid-body control structure to include active control of flexible dynamics. To facilitate real-time implementation of the control algorithm, appropriate position-dependent weighting functions are introduced, ensuring computationally efficient execution of the proposed approach. The efficacy of the proposed control design approach is demonstrated through experiments conducted on a state-of-the-art extreme ultraviolet (EUV) wafer stage.
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Submitted 7 August, 2024;
originally announced August 2024.
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Structured physics-guided neural networks for electromagnetic commutation applied to industrial linear motors
Authors:
Max Bolderman,
Mircea Lazar,
Hans Butler
Abstract:
Mechatronic systems are described by an interconnection of the electromagnetic part, i.e., a static position-dependent nonlinear relation between currents and forces, and the mechanical part, i.e., a dynamic relation from forces to position. Commutation inverts a model of the electromagnetic part of the system, and thereby removes the electromagnetic part from the position control problem. Typical…
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Mechatronic systems are described by an interconnection of the electromagnetic part, i.e., a static position-dependent nonlinear relation between currents and forces, and the mechanical part, i.e., a dynamic relation from forces to position. Commutation inverts a model of the electromagnetic part of the system, and thereby removes the electromagnetic part from the position control problem. Typical commutation algorithms rely on simplified models derived from physics-based knowledge, which do not take into account position dependent parasitic effects. In turn, these commutation related model errors translate into position tracking errors, which limit the system performance. Therefore, in this work, we develop a data-driven approach to commutation using physics-guided neural networks (PGNNs). A novel PGNN model is proposed which structures neural networks (NNs) to learn specific motor dependent parasitic effects. The PGNN is used to identify a model of the electromagnetic part using force measurements, after which it is analytically inverted to obtain a PGNN-based commutation algorithm. Motivated by industrial applications, we develop an input transformation to deal with systems with fixed commutation, i.e., when the currents cannot be controlled. Real-life experiments on an industrial coreless linear motor (CLM) demonstrate a factor 10 improvement in the commutation error in driving direction and a factor 4 improvement in the position error with respect to classical commutation in terms of the mean--squared error (MSE).
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Submitted 7 June, 2024;
originally announced June 2024.
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Frequency Domain Auto-tuning of Structured LPV Controllers for High-Precision Motion Control
Authors:
Yorick Broens,
Hans Butler,
Roland Tóth
Abstract:
Motion systems are a vital part of many industrial processes. However, meeting the increasingly stringent demands of these systems, especially concerning precision and throughput, requires novel control design methods that can go beyond the capabilities of traditional solutions. Traditional control methods often struggle with the complexity and position-dependent effects inherent in modern motion…
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Motion systems are a vital part of many industrial processes. However, meeting the increasingly stringent demands of these systems, especially concerning precision and throughput, requires novel control design methods that can go beyond the capabilities of traditional solutions. Traditional control methods often struggle with the complexity and position-dependent effects inherent in modern motion systems, leading to compromises in performance and a laborious task of controller design. This paper addresses these challenges by introducing a novel structured feedback control auto-tuning approach for multiple-input multiple-output (MIMO) motion systems. By leveraging frequency response function (FRF) estimates and the linear-parameter-varying (LPV) control framework, the proposed approach automates the controller design, while providing local stability and performance guarantees. Key innovations include norm-based magnitude optimization of the sensitivity functions, an automated stability check through a novel extended factorized Nyquist criterion, a modular structured MIMO LPV controller parameterization, and a controller discretization approach which preserves the continuous-time (CT) controller parameterization. The proposed approach is validated through experiments using a state-of-the-art moving-magnet planar actuator prototype.
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Submitted 16 September, 2024; v1 submitted 9 March, 2024;
originally announced March 2024.
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Physics-guided neural networks for inversion-based feedforward control applied to hybrid stepper motors
Authors:
Daiwei Fan,
Max Bolderman,
Sjirk Koekebakker,
Hans Butler,
Mircea Lazar
Abstract:
Rotary motors, such as hybrid stepper motors (HSMs), are widely used in industries varying from printing applications to robotics. The increasing need for productivity and efficiency without increasing the manufacturing costs calls for innovative control design. Feedforward control is typically used in tracking control problems, where the desired reference is known in advance. In most applications…
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Rotary motors, such as hybrid stepper motors (HSMs), are widely used in industries varying from printing applications to robotics. The increasing need for productivity and efficiency without increasing the manufacturing costs calls for innovative control design. Feedforward control is typically used in tracking control problems, where the desired reference is known in advance. In most applications, this is the case for HSMs, which need to track a periodic angular velocity and angular position reference. Performance achieved by feedforward control is limited by the accuracy of the available model describing the inverse system dynamics. In this work, we develop a physics-guided neural network (PGNN) feedforward controller for HSMs, which can learn the effect of parasitic forces from data and compensate for it, resulting in improved accuracy. Indeed, experimental results on an HSM used in printing industry show that the PGNN outperforms conventional benchmarks in terms of the mean-absolute tracking error.
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Submitted 22 June, 2023;
originally announced June 2023.
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Exploring the use of deep learning in task-flexible ILC
Authors:
Anantha Sai Hariharan Vinjarapu,
Yorick Broens,
Hans Butler,
Roland Tóth
Abstract:
Growing demands in today's industry results in increasingly stringent performance and throughput specifications. For accurate positioning of high-precision motion systems, feedforward control plays a crucial role. Nonetheless, conventional model-based feedforward approaches are no longer sufficient to satisfy the challenging performance requirements. An attractive method for systems with repetitiv…
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Growing demands in today's industry results in increasingly stringent performance and throughput specifications. For accurate positioning of high-precision motion systems, feedforward control plays a crucial role. Nonetheless, conventional model-based feedforward approaches are no longer sufficient to satisfy the challenging performance requirements. An attractive method for systems with repetitive motion tasks is iterative learning control (ILC) due to its superior performance. However, for systems with non-repetitive motion tasks, ILC is {generally} not applicable, {despite of some recent promising advances}. In this paper, we aim to explore the use of deep learning to address the task flexibility constraint of ILC. For this purpose, a novel Task Analogy based Imitation Learning (TAIL)-ILC approach is developed. To benchmark the performance of the proposed approach, a simulation study is presented which compares the TAIL-ILC to classical model-based feedforward strategies and existing learning-based approaches, such as neural network based feedforward learning.
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Submitted 25 March, 2023;
originally announced March 2023.
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On Improved Commutation for Moving-Magnet Planar Actuators
Authors:
Yorick Broens,
Hans Butler,
Roland Tóth
Abstract:
The demand for high-precision and high-throughput motion control systems has increased significantly in recent years. The use of moving-magnet planar actuators (MMPAs) is gaining popularity due to their advantageous characteristics, such as complete environmental decoupling and reduction of stage mass. Nonetheless, model-based commutation techniques for MMPAs are compromised by misalignment betwee…
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The demand for high-precision and high-throughput motion control systems has increased significantly in recent years. The use of moving-magnet planar actuators (MMPAs) is gaining popularity due to their advantageous characteristics, such as complete environmental decoupling and reduction of stage mass. Nonetheless, model-based commutation techniques for MMPAs are compromised by misalignment between the mover and coil array and mismatch between the ideal electromagnetic model and the physical system, often leading to decreased system performance. To address this issue, a novel improved commutation approach is proposed in this paper\YB{, which is applicable for general planar motor applications,} by means of dynamic regulation of the position dependence of the ideal model-based commutation algorithm, which allows for attenuation of magnetic misalignment, manufacturing inaccuracies and other unmodelled phenomena. The effectiveness of the proposed approach is validated through experiments using a state-of-the-art moving-magnet planar actuator prototype.
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Submitted 23 May, 2023; v1 submitted 25 March, 2023;
originally announced March 2023.
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Data-driven feedforward control design for nonlinear systems: A control-oriented system identification approach
Authors:
Max Bolderman,
Mircea Lazar,
Hans Butler
Abstract:
Feedforward controllers typically rely on accurately identified inverse models of the system dynamics to achieve high reference tracking performance. However, the impact of the (inverse) model identification error on the resulting tracking error is only analyzed a posteriori in experiments. Therefore, in this work, we develop an approach to feedforward control design that aims at minimizing the tr…
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Feedforward controllers typically rely on accurately identified inverse models of the system dynamics to achieve high reference tracking performance. However, the impact of the (inverse) model identification error on the resulting tracking error is only analyzed a posteriori in experiments. Therefore, in this work, we develop an approach to feedforward control design that aims at minimizing the tracking error a priori. To achieve this, we present a model of the system in a lifted space of trajectories, based on which we derive an upperbound on the reference tracking performance. Minimization of this bound yields a feedforward control-oriented system identification cost function, and a finite-horizon optimization to compute the feedforward control signal. The nonlinear feedforward control design method is validated using physics-guided neural networks on a nonlinear, nonminimum phase mechatronic example, where it outperforms linear ILC.
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Submitted 12 June, 2023; v1 submitted 20 March, 2023;
originally announced March 2023.
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Physics-guided neural networks for feedforward control with input-to-state stability guarantees
Authors:
Max Bolderman,
Hans Butler,
Sjirk Koekebakker,
Eelco van Horssen,
Ramidin Kamidi,
Theresa Spaan-Burke,
Nard Strijbosch,
Mircea Lazar
Abstract:
The increasing demand on precision and throughput within high-precision mechatronics industries requires a new generation of feedforward controllers with higher accuracy than existing, physics-based feedforward controllers. As neural networks are universal approximators, they can in principle yield feedforward controllers with a higher accuracy, but suffer from bad extrapolation outside the traini…
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The increasing demand on precision and throughput within high-precision mechatronics industries requires a new generation of feedforward controllers with higher accuracy than existing, physics-based feedforward controllers. As neural networks are universal approximators, they can in principle yield feedforward controllers with a higher accuracy, but suffer from bad extrapolation outside the training data set, which makes them unsafe for implementation in industry. Motivated by this, we develop a novel physics-guided neural network (PGNN) architecture that structurally merges a physics-based layer and a black-box neural layer in a single model. The parameters of the two layers are simultaneously identified, while a novel regularization cost function is used to prevent competition among layers and to preserve consistency of the physics-based parameters. Moreover, in order to ensure stability of PGNN feedforward controllers, we develop sufficient conditions for analyzing or imposing (during training) input-to-state stability of PGNNs, based on novel, less conservative Lipschitz bounds for neural networks. The developed PGNN feedforward control framework is validated on a real-life, high-precision industrial linear motor used in lithography machines, where it reaches a factor 2 improvement with respect to physics-based mass-friction feedforward and it significantly outperforms alternative neural network based feedforward controllers.
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Submitted 11 September, 2023; v1 submitted 20 January, 2023;
originally announced January 2023.
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On modal observers for beyond rigid body $H_\infty$ control in high-precision mechatronics
Authors:
Yorick Broens,
Hans Butler,
Roland Tóth
Abstract:
The ever increasing need for performance results in increasingly rigorous demands on throughput and positioning accuracy of high-precision motion systems, which often suffer from position dependent effects that originate from relative actuation and sensing of the moving-body. Due to the highly stiff mechanical design, such systems are typically controlled using rigid body control design approaches…
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The ever increasing need for performance results in increasingly rigorous demands on throughput and positioning accuracy of high-precision motion systems, which often suffer from position dependent effects that originate from relative actuation and sensing of the moving-body. Due to the highly stiff mechanical design, such systems are typically controlled using rigid body control design approaches. Nonetheless, the presence of position dependent flexible dynamics severely limits attainable position tracking performance. This paper presents two extensions of the conventional rigid body control framework towards active control of position dependent flexible dynamics. Additionally, a novel control design approach is presented, which allows for shaping of the full closed-loop system by means of structured $H_\infty$ co-design. The effectiveness of the approach is validated through simulation using a high-fidelity model of a state-of-the-art moving-magnet planar actuator.
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Submitted 14 September, 2022;
originally announced September 2022.
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Physics-guided neural networks for feedforward control: From consistent identification to feedforward controller design
Authors:
Max Bolderman,
Mircea Lazar,
Hans Butler
Abstract:
Model-based feedforward control improves tracking performance of motion systems, provided that the model describing the inverse dynamics is of sufficient accuracy. Model sets, such as neural networks (NNs) and physics-guided neural networks (PGNNs) are typically used as flexible parametrizations that enable accurate identification of the inverse system dynamics. Currently, these (PG)NNs are used t…
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Model-based feedforward control improves tracking performance of motion systems, provided that the model describing the inverse dynamics is of sufficient accuracy. Model sets, such as neural networks (NNs) and physics-guided neural networks (PGNNs) are typically used as flexible parametrizations that enable accurate identification of the inverse system dynamics. Currently, these (PG)NNs are used to identify the inverse dynamics directly. However, direct identification of the inverse dynamics is sensitive to noise that is present in the training data, and thereby results in biased parameter estimates which limit the achievable tracking performance. In order to push performance further, it is therefore crucial to account for noise when performing the identification. To address this problem, this paper proposes the use of a forward system identification using (PG)NNs from noisy data. Afterwards, two methods are proposed for inverting PGNNs to design a feedforward controller for high-precision motion control. The developed methodology is validated on a real-life industrial linear motor, where it showed significant improvements in tracking performance with respect to the direct inverse identification.
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Submitted 1 April, 2022;
originally announced April 2022.
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LPV sequential loop closing for high-precision motion systems
Authors:
Yorick Broens,
Hans Butler,
Roland Tóth
Abstract:
Increasingly stringent throughput requirements in the industry necessitate the need for lightweight design of high-precision motion systems to allow for high accelerations, while still achieving accurate positioning of the moving-body. The presence of position dependent dynamics in such motion systems severely limits achievable position tracking performance using conventional sequential loop closi…
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Increasingly stringent throughput requirements in the industry necessitate the need for lightweight design of high-precision motion systems to allow for high accelerations, while still achieving accurate positioning of the moving-body. The presence of position dependent dynamics in such motion systems severely limits achievable position tracking performance using conventional sequential loop closing (SLC) control design strategies. This paper presents a novel extension of the conventional SLC design framework towards linear-parameter-varying systems, which allows to circumvent limitations that are introduced by position dependent effects in high-precision motion systems. Advantages of the proposed control design approach are demonstrated in simulation using a high-fidelity model of a moving-magnet planar actuator system, which exhibits position dependency in both actuation and sensing.
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Submitted 15 March, 2022;
originally announced March 2022.
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On discretization of continuous-time LPV control solutions
Authors:
Yorick Broens,
Hans Butler,
Roland Tóth
Abstract:
In recent years, the Linear Parameter-Varying (LPV) framework has become increasingly useful for analysis and control of time-varying systems. Generally, LPV control synthesis is performed in the continuous-time (CT) domain due to significantly more intuitive performance shaping methods in CT. However, the main complication of CT synthesis approaches is the successive implementation of the resulti…
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In recent years, the Linear Parameter-Varying (LPV) framework has become increasingly useful for analysis and control of time-varying systems. Generally, LPV control synthesis is performed in the continuous-time (CT) domain due to significantly more intuitive performance shaping methods in CT. However, the main complication of CT synthesis approaches is the successive implementation of the resulting CT control solutions on physical hardware. In the literature, several discretization methods have been developed for LPV systems. However, most of these approaches necessitate heavy nonlinear operations introduced by the discretization of these time-varying matrices or can introduce significant approximation error, thereby severely limiting implementation capabilities of CT LPV control solutions. Alternatively, the $w'$ discretization approach has been introduced in the LTI case to allow for preservation of the CT control. Based on these observations, this paper aims at extending the $w'$ discretization approach to LPV systems, such that implementation of CT LPV control solutions on physical hardware is simplified.
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Submitted 22 February, 2022; v1 submitted 4 February, 2022;
originally announced February 2022.
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On feedforward control using physics-guided neural networks: Training cost regularization and optimized initialization
Authors:
Max Bolderman,
Mircea Lazar,
Hans Butler
Abstract:
Performance of model-based feedforward controllers is typically limited by the accuracy of the inverse system dynamics model. Physics-guided neural networks (PGNN), where a known physical model cooperates in parallel with a neural network, were recently proposed as a method to achieve high accuracy of the identified inverse dynamics. However, the flexible nature of neural networks can create overp…
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Performance of model-based feedforward controllers is typically limited by the accuracy of the inverse system dynamics model. Physics-guided neural networks (PGNN), where a known physical model cooperates in parallel with a neural network, were recently proposed as a method to achieve high accuracy of the identified inverse dynamics. However, the flexible nature of neural networks can create overparameterization when employed in parallel with a physical model, which results in a parameter drift during training. This drift may result in parameters of the physical model not corresponding to their physical values, which increases vulnerability of the PGNN to operating conditions not present in the training data. To address this problem, this paper proposes a regularization method via identified physical parameters, in combination with an optimized training initialization that improves training convergence. The regularized PGNN framework is validated on a real-life industrial linear motor, where it delivers better tracking accuracy and extrapolation.
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Submitted 28 January, 2022;
originally announced January 2022.
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On the Use of the Smith-McMillan Form in Decoupling System Dynamics
Authors:
Clarisse Pétua Bosman Barros,
Hans Butler,
Roland Tóth
Abstract:
In this paper, the use of the Smith-McMillan form in decoupling multiple-input multiple-output system dynamics is analyzed. In short, from a transfer matrix plant model one can obtain a decoupling compensator which leads to a decoupled plant that contains the same transmission poles and zeros of the transfer matrix of the original system. As a result, full decoupling of the plant transfer matrix i…
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In this paper, the use of the Smith-McMillan form in decoupling multiple-input multiple-output system dynamics is analyzed. In short, from a transfer matrix plant model one can obtain a decoupling compensator which leads to a decoupled plant that contains the same transmission poles and zeros of the transfer matrix of the original system. As a result, full decoupling of the plant transfer matrix is obtained for all frequencies, which can be individually addressed by single-input single-output control. The aim of this paper is to present conditions for the decoupled system that guarantee internal stability and performance requirements for the overall control system. Performance specifications are defined in terms of magnitude limits for the maximum singular value of the closed-loop transfer matrices. The potential of the decoupling procedure is shown in a simulation study of a mechanical system.
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Submitted 25 May, 2021;
originally announced May 2021.
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Learning-based feedforward augmentation for steady state rejection of residual dynamics on a nanometer-accurate planar actuator system
Authors:
Ioannis Proimadis,
Yorick Broens,
Roland Tóth,
Hans Butler
Abstract:
Growing demands in the semiconductor industry result in the need for enhanced performance of lithographic equipment. However, position tracking accuracy of high precision mechatronics is often limited by the presence of disturbance sources, which originate from unmodelled or unforeseen deterministic environmental effects. To negate the effects of these disturbances, a learning based feedforward co…
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Growing demands in the semiconductor industry result in the need for enhanced performance of lithographic equipment. However, position tracking accuracy of high precision mechatronics is often limited by the presence of disturbance sources, which originate from unmodelled or unforeseen deterministic environmental effects. To negate the effects of these disturbances, a learning based feedforward controller is employed, where the underlying control policy is estimated from experimental data based on Gaussian Process regression. The proposed approach exploits the property of including prior knowledge on the expected steady state behaviour of residual dynamics in terms of kernel selection. Corresponding hyper-parameters are optimized using the maximization of the marginalized likelihood. Consequently, the learned function is employed as augmentation of the currently employed rigid body feedforward controller. The effectiveness of the augmentation is experimentally validated on a magnetically levitated planar motor stage. The results of this paper demonstrate the benefits and possibilities of machine-learning based approaches for compensation of static effects, which originate from residual dynamics, such that position tracking performance for moving-magnet planar motor actuators is improved.
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Submitted 4 May, 2021;
originally announced May 2021.
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Physics-Guided Neural Networks for Inversion-based Feedforward Control applied to Linear Motors
Authors:
Max Bolderman,
Mircea Lazar,
Hans Butler
Abstract:
Ever-increasing throughput specifications in semiconductor manufacturing require operating high-precision mechatronics, such as linear motors, at higher accelerations. In turn this creates higher nonlinear parasitic forces that cannot be handled by industrial feedforward controllers. Motivated by this problem, in this paper we develop a general framework for inversion-based feedforward controller…
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Ever-increasing throughput specifications in semiconductor manufacturing require operating high-precision mechatronics, such as linear motors, at higher accelerations. In turn this creates higher nonlinear parasitic forces that cannot be handled by industrial feedforward controllers. Motivated by this problem, in this paper we develop a general framework for inversion-based feedforward controller design using physics-guided neural networks (PGNNs). In contrast with black-box neural networks, the developed PGNNs embed prior physical knowledge in the input and hidden layers, which results in improved training convergence and learning of underlying physical laws. The PGNN inversion-based feedforward control framework is validated in simulation on an industrial linear motor, for which it achieves a mean average tracking error twenty times smaller than mass-acceleration feedforward in simulation.
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Submitted 10 March, 2021;
originally announced March 2021.
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Deep Learning based Spectral CT Imaging
Authors:
Weiwen Wu,
Dianlin Hu,
Chuang Niu,
Lieza Vanden Broeke,
Anthony P. H. Butler,
Peng Cao,
James Atlas,
Alexander Chernoglazov,
Varut Vardhanabhuti,
Ge Wang
Abstract:
Spectral computed tomography (CT) has attracted much attention in radiation dose reduction, metal artifacts removal, tissue quantification and material discrimination. The x-ray energy spectrum is divided into several bins, each energy-bin-specific projection has a low signal-noise-ratio (SNR) than the current-integrating counterpart, which makes image reconstruction a unique challenge. Traditiona…
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Spectral computed tomography (CT) has attracted much attention in radiation dose reduction, metal artifacts removal, tissue quantification and material discrimination. The x-ray energy spectrum is divided into several bins, each energy-bin-specific projection has a low signal-noise-ratio (SNR) than the current-integrating counterpart, which makes image reconstruction a unique challenge. Traditional wisdom is to use prior knowledge based iterative methods. However, this kind of methods demands a great computational cost. Inspired by deep learning, here we first develop a deep learning based reconstruction method; i.e., U-net with L_p^p-norm, Total variation, Residual learning, and Anisotropic adaption (ULTRA). Specifically, we emphasize the Various Multi-scale Feature Fusion and Multichannel Filtering Enhancement with a denser connection encoding architecture for residual learning and feature fusion. To address the image deblurring problem associated with the $L_2^2$-loss, we propose a general $L_p^p$-loss, $p>0$ Furthermore, the images from different energy bins share similar structures of the same object, the regularization characterizing correlations of different energy bins is incorporated into the $L_p^p$-loss function, which helps unify the deep learning based methods with traditional compressed sensing based methods. Finally, the anisotropically weighted total variation is employed to characterize the sparsity in the spatial-spectral domain to regularize the proposed network. In particular, we validate our ULTRA networks on three large-scale spectral CT datasets, and obtain excellent results relative to the competing algorithms. In conclusion, our quantitative and qualitative results in numerical simulation and preclinical experiments demonstrate that our proposed approach is accurate, efficient and robust for high-quality spectral CT image reconstruction.
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Submitted 25 August, 2021; v1 submitted 27 August, 2020;
originally announced August 2020.
