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Active Compensation of Position Dependent Flexible Dynamics in High-Precision Mechatronics
Authors:
Yorick Broens,
Hans Butler,
Ramidin Kamidi,
Koen Verkerk,
Siep Weiland
Abstract:
Growing demands in the semiconductor industry necessitate increasingly stringent requirements on throughput and positioning accuracy of lithographic equipment. Meeting these demands involves employing highly aggressive motion profiles, which introduce position-dependent flexible dynamics, thus compromising achievable position tracking performance. This paper introduces a control approach enabling…
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Growing demands in the semiconductor industry necessitate increasingly stringent requirements on throughput and positioning accuracy of lithographic equipment. Meeting these demands involves employing highly aggressive motion profiles, which introduce position-dependent flexible dynamics, thus compromising achievable position tracking performance. This paper introduces a control approach enabling active compensation of position-dependent flexible dynamics by extending the conventional rigid-body control structure to include active control of flexible dynamics. To facilitate real-time implementation of the control algorithm, appropriate position-dependent weighting functions are introduced, ensuring computationally efficient execution of the proposed approach. The efficacy of the proposed control design approach is demonstrated through experiments conducted on a state-of-the-art extreme ultraviolet (EUV) wafer stage.
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Submitted 7 August, 2024;
originally announced August 2024.
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Frequency Domain Auto-tuning of Structured LPV Controllers for High-Precision Motion Control
Authors:
Yorick Broens,
Hans Butler,
Roland Tóth
Abstract:
Motion systems are a vital part of many industrial processes. However, meeting the increasingly stringent demands of these systems, especially concerning precision and throughput, requires novel control design methods that can go beyond the capabilities of traditional solutions. Traditional control methods often struggle with the complexity and position-dependent effects inherent in modern motion…
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Motion systems are a vital part of many industrial processes. However, meeting the increasingly stringent demands of these systems, especially concerning precision and throughput, requires novel control design methods that can go beyond the capabilities of traditional solutions. Traditional control methods often struggle with the complexity and position-dependent effects inherent in modern motion systems, leading to compromises in performance and a laborious task of controller design. This paper addresses these challenges by introducing a novel structured feedback control auto-tuning approach for multiple-input multiple-output (MIMO) motion systems. By leveraging frequency response function (FRF) estimates and the linear-parameter-varying (LPV) control framework, the proposed approach automates the controller design, while providing local stability and performance guarantees. Key innovations include norm-based magnitude optimization of the sensitivity functions, an automated stability check through a novel extended factorized Nyquist criterion, a modular structured MIMO LPV controller parameterization, and a controller discretization approach which preserves the continuous-time (CT) controller parameterization. The proposed approach is validated through experiments using a state-of-the-art moving-magnet planar actuator prototype.
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Submitted 16 September, 2024; v1 submitted 9 March, 2024;
originally announced March 2024.
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Exploring the use of deep learning in task-flexible ILC
Authors:
Anantha Sai Hariharan Vinjarapu,
Yorick Broens,
Hans Butler,
Roland Tóth
Abstract:
Growing demands in today's industry results in increasingly stringent performance and throughput specifications. For accurate positioning of high-precision motion systems, feedforward control plays a crucial role. Nonetheless, conventional model-based feedforward approaches are no longer sufficient to satisfy the challenging performance requirements. An attractive method for systems with repetitiv…
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Growing demands in today's industry results in increasingly stringent performance and throughput specifications. For accurate positioning of high-precision motion systems, feedforward control plays a crucial role. Nonetheless, conventional model-based feedforward approaches are no longer sufficient to satisfy the challenging performance requirements. An attractive method for systems with repetitive motion tasks is iterative learning control (ILC) due to its superior performance. However, for systems with non-repetitive motion tasks, ILC is {generally} not applicable, {despite of some recent promising advances}. In this paper, we aim to explore the use of deep learning to address the task flexibility constraint of ILC. For this purpose, a novel Task Analogy based Imitation Learning (TAIL)-ILC approach is developed. To benchmark the performance of the proposed approach, a simulation study is presented which compares the TAIL-ILC to classical model-based feedforward strategies and existing learning-based approaches, such as neural network based feedforward learning.
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Submitted 25 March, 2023;
originally announced March 2023.
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On Improved Commutation for Moving-Magnet Planar Actuators
Authors:
Yorick Broens,
Hans Butler,
Roland Tóth
Abstract:
The demand for high-precision and high-throughput motion control systems has increased significantly in recent years. The use of moving-magnet planar actuators (MMPAs) is gaining popularity due to their advantageous characteristics, such as complete environmental decoupling and reduction of stage mass. Nonetheless, model-based commutation techniques for MMPAs are compromised by misalignment betwee…
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The demand for high-precision and high-throughput motion control systems has increased significantly in recent years. The use of moving-magnet planar actuators (MMPAs) is gaining popularity due to their advantageous characteristics, such as complete environmental decoupling and reduction of stage mass. Nonetheless, model-based commutation techniques for MMPAs are compromised by misalignment between the mover and coil array and mismatch between the ideal electromagnetic model and the physical system, often leading to decreased system performance. To address this issue, a novel improved commutation approach is proposed in this paper\YB{, which is applicable for general planar motor applications,} by means of dynamic regulation of the position dependence of the ideal model-based commutation algorithm, which allows for attenuation of magnetic misalignment, manufacturing inaccuracies and other unmodelled phenomena. The effectiveness of the proposed approach is validated through experiments using a state-of-the-art moving-magnet planar actuator prototype.
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Submitted 23 May, 2023; v1 submitted 25 March, 2023;
originally announced March 2023.
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On modal observers for beyond rigid body $H_\infty$ control in high-precision mechatronics
Authors:
Yorick Broens,
Hans Butler,
Roland Tóth
Abstract:
The ever increasing need for performance results in increasingly rigorous demands on throughput and positioning accuracy of high-precision motion systems, which often suffer from position dependent effects that originate from relative actuation and sensing of the moving-body. Due to the highly stiff mechanical design, such systems are typically controlled using rigid body control design approaches…
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The ever increasing need for performance results in increasingly rigorous demands on throughput and positioning accuracy of high-precision motion systems, which often suffer from position dependent effects that originate from relative actuation and sensing of the moving-body. Due to the highly stiff mechanical design, such systems are typically controlled using rigid body control design approaches. Nonetheless, the presence of position dependent flexible dynamics severely limits attainable position tracking performance. This paper presents two extensions of the conventional rigid body control framework towards active control of position dependent flexible dynamics. Additionally, a novel control design approach is presented, which allows for shaping of the full closed-loop system by means of structured $H_\infty$ co-design. The effectiveness of the approach is validated through simulation using a high-fidelity model of a state-of-the-art moving-magnet planar actuator.
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Submitted 14 September, 2022;
originally announced September 2022.
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LPV sequential loop closing for high-precision motion systems
Authors:
Yorick Broens,
Hans Butler,
Roland Tóth
Abstract:
Increasingly stringent throughput requirements in the industry necessitate the need for lightweight design of high-precision motion systems to allow for high accelerations, while still achieving accurate positioning of the moving-body. The presence of position dependent dynamics in such motion systems severely limits achievable position tracking performance using conventional sequential loop closi…
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Increasingly stringent throughput requirements in the industry necessitate the need for lightweight design of high-precision motion systems to allow for high accelerations, while still achieving accurate positioning of the moving-body. The presence of position dependent dynamics in such motion systems severely limits achievable position tracking performance using conventional sequential loop closing (SLC) control design strategies. This paper presents a novel extension of the conventional SLC design framework towards linear-parameter-varying systems, which allows to circumvent limitations that are introduced by position dependent effects in high-precision motion systems. Advantages of the proposed control design approach are demonstrated in simulation using a high-fidelity model of a moving-magnet planar actuator system, which exhibits position dependency in both actuation and sensing.
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Submitted 15 March, 2022;
originally announced March 2022.
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On discretization of continuous-time LPV control solutions
Authors:
Yorick Broens,
Hans Butler,
Roland Tóth
Abstract:
In recent years, the Linear Parameter-Varying (LPV) framework has become increasingly useful for analysis and control of time-varying systems. Generally, LPV control synthesis is performed in the continuous-time (CT) domain due to significantly more intuitive performance shaping methods in CT. However, the main complication of CT synthesis approaches is the successive implementation of the resulti…
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In recent years, the Linear Parameter-Varying (LPV) framework has become increasingly useful for analysis and control of time-varying systems. Generally, LPV control synthesis is performed in the continuous-time (CT) domain due to significantly more intuitive performance shaping methods in CT. However, the main complication of CT synthesis approaches is the successive implementation of the resulting CT control solutions on physical hardware. In the literature, several discretization methods have been developed for LPV systems. However, most of these approaches necessitate heavy nonlinear operations introduced by the discretization of these time-varying matrices or can introduce significant approximation error, thereby severely limiting implementation capabilities of CT LPV control solutions. Alternatively, the $w'$ discretization approach has been introduced in the LTI case to allow for preservation of the CT control. Based on these observations, this paper aims at extending the $w'$ discretization approach to LPV systems, such that implementation of CT LPV control solutions on physical hardware is simplified.
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Submitted 22 February, 2022; v1 submitted 4 February, 2022;
originally announced February 2022.
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Learning-based feedforward augmentation for steady state rejection of residual dynamics on a nanometer-accurate planar actuator system
Authors:
Ioannis Proimadis,
Yorick Broens,
Roland Tóth,
Hans Butler
Abstract:
Growing demands in the semiconductor industry result in the need for enhanced performance of lithographic equipment. However, position tracking accuracy of high precision mechatronics is often limited by the presence of disturbance sources, which originate from unmodelled or unforeseen deterministic environmental effects. To negate the effects of these disturbances, a learning based feedforward co…
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Growing demands in the semiconductor industry result in the need for enhanced performance of lithographic equipment. However, position tracking accuracy of high precision mechatronics is often limited by the presence of disturbance sources, which originate from unmodelled or unforeseen deterministic environmental effects. To negate the effects of these disturbances, a learning based feedforward controller is employed, where the underlying control policy is estimated from experimental data based on Gaussian Process regression. The proposed approach exploits the property of including prior knowledge on the expected steady state behaviour of residual dynamics in terms of kernel selection. Corresponding hyper-parameters are optimized using the maximization of the marginalized likelihood. Consequently, the learned function is employed as augmentation of the currently employed rigid body feedforward controller. The effectiveness of the augmentation is experimentally validated on a magnetically levitated planar motor stage. The results of this paper demonstrate the benefits and possibilities of machine-learning based approaches for compensation of static effects, which originate from residual dynamics, such that position tracking performance for moving-magnet planar motor actuators is improved.
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Submitted 4 May, 2021;
originally announced May 2021.
