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Showing 1–1 of 1 results for author: Tait, A M

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  1. arXiv:2103.01152  [pdf, other

    cond-mat.supr-con cs.GR

    PHIDL: Python CAD layout and geometry creation for nanolithography

    Authors: A. N. McCaughan, A. M. Tait, S. M. Buckley, D. M. Oh, J. T. Chiles, J. M. Shainline, S. W. Nam

    Abstract: Computer-aided design (CAD) has become a critical element in the creation of nanopatterned structures and devices. In particular, with the increased adoption of easy-to-learn programming languages like Python there has been a significant rise in the amount of lithographic geometries generated through scripting and programming. However, there are currently unaddressed gaps in usability for open-sou… ▽ More

    Submitted 1 March, 2021; originally announced March 2021.

    Journal ref: J. Vac. Sci. Technol. B 39, 062601 (2021)