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Design optimization of semiconductor manufacturing equipment using a novel multi-fidelity surrogate modeling approach
Authors:
Bingran Wang,
Min Sung Kim,
Taewoong Yoon,
Dasom Lee,
Byeong-Sang Kim,
Dougyong Sung,
John T. Hwang
Abstract:
Careful design of semiconductor manufacturing equipment is crucial for ensuring the performance, yield, and reliability of semiconductor devices. Despite this, numerical optimization methods are seldom applied to optimize the design of such equipment due to the difficulty of obtaining accurate simulation models. In this paper, we address a practical and industrially relevant electrostatic chuck (E…
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Careful design of semiconductor manufacturing equipment is crucial for ensuring the performance, yield, and reliability of semiconductor devices. Despite this, numerical optimization methods are seldom applied to optimize the design of such equipment due to the difficulty of obtaining accurate simulation models. In this paper, we address a practical and industrially relevant electrostatic chuck (ESC) design optimization problem by proposing a novel multi-fidelity surrogate modeling approach. The optimization aims to improve the temperature uniformity of the wafer during the etching process by adjusting seven parameters associated with the coolant path and embossing. Our approach combines low-fidelity (LF) and high-fidelity (HF) simulation data to efficiently predict spatial-field quantities, even with a limited number of data points. We use proper orthogonal decomposition (POD) to project the spatially interpolated HF and LF field data onto a shared latent space, followed by the construction of a multi-fidelity kriging model to predict the latent variables of the HF output field. In the ESC design problem, with hundreds or fewer data, our approach achieves a more than 10% reduction in prediction error compared to using kriging models with only HF or LF data. Additionally, in the ESC optimization problem, our proposed method yields better solutions with improvements in all of the quantities of interest, while requiring 20% less data generation cost compared to the HF surrogate modeling approach.
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Submitted 12 November, 2024;
originally announced November 2024.
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Deep-learning real-time phase retrieval of imperfect diffraction patterns from X-ray free-electron lasers
Authors:
Sung Yun Lee,
Do Hyung Cho,
Chulho Jung,
Daeho Sung,
Daewoong Nam,
Sangsoo Kim,
Changyong Song
Abstract:
Machine learning is attracting surging interest across nearly all scientific areas by enabling the analysis of large datasets and the extraction of scientific information from incomplete data. Data-driven science is rapidly growing, especially in X-ray methodologies, where advanced light sources and detection technologies accumulate vast amounts of data that exceed meticulous human inspection capa…
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Machine learning is attracting surging interest across nearly all scientific areas by enabling the analysis of large datasets and the extraction of scientific information from incomplete data. Data-driven science is rapidly growing, especially in X-ray methodologies, where advanced light sources and detection technologies accumulate vast amounts of data that exceed meticulous human inspection capabilities. Despite the increasing demands, the full application of machine learning has been hindered by the need for data-specific optimizations. In this study, we introduce a new deep-learning-based phase retrieval method for imperfect diffraction data. This method provides robust phase retrieval for simulated data and performs well on weak-signal single-pulse diffraction data from X-ray free-electron lasers. Moreover, the method significantly reduces data processing time, facilitating real-time image reconstructions that are crucial for high-repetition-rate data acquisition. Thus, this approach offers a reliable solution to the phase problem and is expected to be widely adopted across various research areas.
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Submitted 24 September, 2024;
originally announced September 2024.
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Learning Dynamic Manipulation Skills from Haptic-Play
Authors:
Taeyoon Lee,
Donghyun Sung,
Kyoungyeon Choi,
Choongin Lee,
Changwoo Park,
Keunjun Choi
Abstract:
In this paper, we propose a data-driven skill learning approach to solve highly dynamic manipulation tasks entirely from offline teleoperated play data. We use a bilateral teleoperation system to continuously collect a large set of dexterous and agile manipulation behaviors, which is enabled by providing direct force feedback to the operator. We jointly learn the state conditional latent skill dis…
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In this paper, we propose a data-driven skill learning approach to solve highly dynamic manipulation tasks entirely from offline teleoperated play data. We use a bilateral teleoperation system to continuously collect a large set of dexterous and agile manipulation behaviors, which is enabled by providing direct force feedback to the operator. We jointly learn the state conditional latent skill distribution and skill decoder network in the form of goal-conditioned policy and skill conditional state transition dynamics using a two-stage generative modeling framework. This allows one to perform robust model-based planning, both online and offline planning methods, in the learned skill-space to accomplish any given downstream tasks at test time. We provide both simulated and real-world dual-arm box manipulation experiments showing that a sequence of force-controlled dynamic manipulation skills can be composed in real-time to successfully configure the box to the randomly selected target position and orientation; please refer to the supplementary video, https://youtu.be/LA5B236ILzM.
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Submitted 28 July, 2022;
originally announced July 2022.
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Broadcasted Residual Learning for Efficient Keyword Spotting
Authors:
Byeonggeun Kim,
Simyung Chang,
Jinkyu Lee,
Dooyong Sung
Abstract:
Keyword spotting is an important research field because it plays a key role in device wake-up and user interaction on smart devices. However, it is challenging to minimize errors while operating efficiently in devices with limited resources such as mobile phones. We present a broadcasted residual learning method to achieve high accuracy with small model size and computational load. Our method conf…
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Keyword spotting is an important research field because it plays a key role in device wake-up and user interaction on smart devices. However, it is challenging to minimize errors while operating efficiently in devices with limited resources such as mobile phones. We present a broadcasted residual learning method to achieve high accuracy with small model size and computational load. Our method configures most of the residual functions as 1D temporal convolution while still allows 2D convolution together using a broadcasted-residual connection that expands temporal output to frequency-temporal dimension. This residual mapping enables the network to effectively represent useful audio features with much less computation than conventional convolutional neural networks. We also propose a novel network architecture, Broadcasting-residual network (BC-ResNet), based on broadcasted residual learning and describe how to scale up the model according to the target device's resources. BC-ResNets achieve state-of-the-art 98.0% and 98.7% top-1 accuracy on Google speech command datasets v1 and v2, respectively, and consistently outperform previous approaches, using fewer computations and parameters. Code is available at https://github.com/Qualcomm-AI-research/bcresnet.
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Submitted 5 July, 2023; v1 submitted 8 June, 2021;
originally announced June 2021.
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An Enhanced Access Reservation Protocol with a Partial Preamble Transmission Mechanism in NB-IoT Systems
Authors:
Taehoon Kim,
Dong Min Kim,
Nuno Pratas,
Petar Popovski,
Dan Keun Sung
Abstract:
In this letter, we propose an enhanced Access Reservation Protocol (ARP) with a partial preamble transmission (PPT) mechanism for the narrow band Internet of Things (NB-IoT) systems. The proposed ARP can enhance the ARP performance by mitigating the occurrence of preamble collisions, while being compatible with the conventional NB-IoT ARP. We provide an analytical model that captures the performan…
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In this letter, we propose an enhanced Access Reservation Protocol (ARP) with a partial preamble transmission (PPT) mechanism for the narrow band Internet of Things (NB-IoT) systems. The proposed ARP can enhance the ARP performance by mitigating the occurrence of preamble collisions, while being compatible with the conventional NB-IoT ARP. We provide an analytical model that captures the performance of the proposed ARP in terms of false alarm, mis-detection and collision probabilities. Moreover, we investigate a trade-off between the mis-detection and the collision probabilities, and optimize the proposed ARP according to the system loads. The results show that the proposed ARP outperforms the conventional NB-IoT ARP, in particular at heavier system loads.
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Submitted 14 December, 2017;
originally announced December 2017.
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A Preamble Collision Resolution Scheme via Tagged Preambles for Cellular IoT/M2M Communications
Authors:
Han Seung Jang,
Su Min Kim,
Hong-Shik Park,
Dan Keun Sung
Abstract:
In this paper, we propose a preamble (PA) collision resolution (PACR) scheme based on multiple timing advance (TA) values captured via tagged PAs. In the proposed PACR scheme, tags are embedded in random access (RA) PAs and multiple TA values are captured for a single detected PA during a tag detection procedure. The proposed PACR scheme significantly improves RA success probability for stationary…
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In this paper, we propose a preamble (PA) collision resolution (PACR) scheme based on multiple timing advance (TA) values captured via tagged PAs. In the proposed PACR scheme, tags are embedded in random access (RA) PAs and multiple TA values are captured for a single detected PA during a tag detection procedure. The proposed PACR scheme significantly improves RA success probability for stationary machine nodes since the nodes using collided PAs can successfully complete the corresponding RAs using exclusive data resource blocks.
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Submitted 13 August, 2017; v1 submitted 25 July, 2017;
originally announced July 2017.
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Joint Link Adaptation and User Scheduling with HARQ in Multi-Cell Environments
Authors:
Su Min Kim,
Bang Chul Jung,
Dan Keun Sung
Abstract:
Inter-cell interference (ICI) is one of the most critical factors affecting performance of cellular networks. In this paper, we investigate a joint link adaptation and user scheduling problem for multi-cell downlink employing HARQ techniques, where the ICI exists among cells. We first propose an approximation method on aggregated ICI for analyzing an effective signal-to-interference-and-noise rati…
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Inter-cell interference (ICI) is one of the most critical factors affecting performance of cellular networks. In this paper, we investigate a joint link adaptation and user scheduling problem for multi-cell downlink employing HARQ techniques, where the ICI exists among cells. We first propose an approximation method on aggregated ICI for analyzing an effective signal-to-interference-and-noise ratio (SINR) with the HARQ technique at users, named identical path-loss approximation (IPLA). Based on the proposed IPLA, we propose a transmission rate selection algorithm maximizing an expected throughput at each user. We also propose a simple but effective cross-layer framework jointly combining transmission rate adaptation and user scheduling techniques, considering both HARQ and ICI. It is shown that statistical distribution of the effective SINR at users based on the IPLA agrees well with the empirical distribution, while the conventional Gaussian approximation (GA) does not work well in the case that dominant ICIs exist. Thus, IPLA enables base stations to choose more accurate transmission rates. Furthermore, the proposed IPLA-based cross-layer policy outperforms existing policies in terms of both system throughput and user fairness.
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Submitted 11 March, 2015;
originally announced March 2015.
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Variable-Length Feedback Codes under a Strict Delay Constraint
Authors:
Seong Hwan Kim,
Dan Keun Sung,
Tho Le-Ngoc
Abstract:
We study variable-length feedback (VLF) codes under a strict delay constraint to maximize their average transmission rate (ATR) in a discrete memoryless channel (DMC) while considering periodic decoding attempts. We first derive a lower bound on the maximum achievable ATR, and confirm that the VLF code can outperform non-feedback codes with a larger delay constraint. We show that for a given decod…
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We study variable-length feedback (VLF) codes under a strict delay constraint to maximize their average transmission rate (ATR) in a discrete memoryless channel (DMC) while considering periodic decoding attempts. We first derive a lower bound on the maximum achievable ATR, and confirm that the VLF code can outperform non-feedback codes with a larger delay constraint. We show that for a given decoding period, as the strict delay constraint, L, increases, the gap between the ATR of the VLF code and the DMC capacity scales at most on the order of O(L^{-1}) instead of O(L^{-1/2}) for non-feedback codes as shown in Polyanskiy et al. ["Channel coding rate in the finite blocklengh regime," IEEE Trans. Inf. Theory, vol. 56, no. 5, pp. 2307-2359, May 2010.]. We also develop an approximation indicating that, for a given L, the achievable ATR increases as the decoding period decreases.
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Submitted 23 February, 2015;
originally announced February 2015.