A High Power Density Electrostatic Vibration-to-Electric Energy Converter Based On An In-Plane Overlap Plate (IPOP) Mechanism
Authors:
A. M. Paracha,
Ph. Basset,
F. Marty,
A. Vaisman Chasin,
P. Poulichet,
T. Bourouina
Abstract:
In this paper, design, fabrication and characterization issues of a bulk silicon-based, vibration powered, electric energy generator are addressed. The converter is based on an In-Plane Overlap Plate (IPOP) configuration [1]. Measurements have shown that with a theoretically lossless electronics and a starting voltage of 5 V, power density of 58 $μ$W/cm3 is achievable at the resonance frequency…
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In this paper, design, fabrication and characterization issues of a bulk silicon-based, vibration powered, electric energy generator are addressed. The converter is based on an In-Plane Overlap Plate (IPOP) configuration [1]. Measurements have shown that with a theoretically lossless electronics and a starting voltage of 5 V, power density of 58 $μ$W/cm3 is achievable at the resonance frequency of 290 Hz. It can be further improved by reducing the parasitic capacitance, which can be achieved by silicon etching, but a considerable mass is lost. In [2], it is shown that 19% of mass reduction improves power density from 12.95 $μ$W/cm3 to 59 $μ$W/cm3. Hence an enhancement in fabrication process is proposed, which is termed as Backside DRIE. It helps in increasing power density without loosing an important quantity of mass. Simulations have shown that 2.5% of mass removal improves power density up to 76.71 $μ$W/cm3. Initial simulation results and problems of associated electronics are also discussed.
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Submitted 21 February, 2008;
originally announced February 2008.
An Active Chaotic Micromixer Integrating Thermal Actuation Associating PDMS and Silicon Microtechnology
Authors:
O. Français,
M. -C. Jullien,
L. Rousseau,
P. Poulichet,
S. Desportes,
A. Chouai,
J. -P. Lefevre,
J. Delaire
Abstract:
Due to scaling laws, in microfluidic, flows are laminar. Consequently, mixing between two liquids is mainly obtained by natural diffusion which may take a long time or equivalently requires centimetre length channels. To reduce time and length for mixing, it is possible to generate chaotic-like flows either by modifying the channel geometry or by creating an external perturbation of the flow. In…
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Due to scaling laws, in microfluidic, flows are laminar. Consequently, mixing between two liquids is mainly obtained by natural diffusion which may take a long time or equivalently requires centimetre length channels. To reduce time and length for mixing, it is possible to generate chaotic-like flows either by modifying the channel geometry or by creating an external perturbation of the flow. In this paper, an active micromixer is presented consisting on thermal actuation with heating resistors. In order to disturb the liquid flow, an oscillating transverse flow is generated by heating the liquid. Depending on the value of boiling point, either bubble expansion or volumetric dilation controlled the transverse flow amplitude. A chaotic like mixing is then induced under particular conditions depending on volume expansion, liquid velocity, frequency of actuation... This solution presents the advantage to achieve mixing in a very short time (1s) and along a short channel distance (channel width). It can also be integrated in a more complex device due to actuator integration with microfluidics.
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Submitted 21 November, 2007;
originally announced November 2007.