Monolithic Six-DOF Parallel Positioning System for High-precision and Large-range Applications
Authors:
Mohammadali Ghafarian,
Bijan Shirinzadeh,
Ammar Al-Jodah
Abstract:
A compact large-range six-degrees-of-freedom (six-DOF) parallel positioning system with high resolution, high resonant frequency, and high repeatability was proposed. It mainly consists of three identical kinematic sections. Each kinematic section consists of two identical displacement amplification and guiding mechanisms, which are finally connected to a limb. Each limb was designed with a univer…
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A compact large-range six-degrees-of-freedom (six-DOF) parallel positioning system with high resolution, high resonant frequency, and high repeatability was proposed. It mainly consists of three identical kinematic sections. Each kinematic section consists of two identical displacement amplification and guiding mechanisms, which are finally connected to a limb. Each limb was designed with a universal joint at each end and connected to a moving stage. A computational model of the positioner was built in the ANSYS software package, hence, the input stiffness, output compliance, range, and modal analysis of the system were found. Furthermore, a monolithic prototype made of Acrylonitrile Butadiene Styrene (ABS) was successfully manufactured by the 3D-printing process. It was actuated and sensed by piezoelectric actuators (PEAs) and capacitive displacement sensors, respectively. Finally, the performances of this proposed positioner were experimentally investigated. The positioning resolution was achieved as 10.5nm {\times} 10.5nm {\times} 15nm {\times} 1.8μrad {\times} 1.3μrad {\times} 0.5μrad. The experimental results validate the behavior and capabilities of the proposed positioning system, and also verify the nanometer-scale spatial positioning accuracy within the overall stroke range. Practical applications of the proposed system can be expanded to pick-and-place manipulation, vibration-canceling in microsurgery/micro-assembly, and collaborative manipulators systems.
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Submitted 2 February, 2023;
originally announced February 2023.
Experimental System Identification and Disturbance Observer-based Control for a Monolithic $Zθ_{x}θ_{y}$ Precision Positioning System
Authors:
Mohammadali Ghafarian,
Bijan Shirinzadeh,
Ammar Al-Jodah,
Tilok Kumar Das,
Tianyao Shen
Abstract:
A compliant parallel micromanipulator is a mechanism in which the moving platform is connected to the base through a number of flexural components. Utilizing parallel-kinematics configurations and flexure joints, the monolithic micromanipulators can achieve extremely high motion resolution and accuracy. In this work, the focus was towards the experimental evaluation of a 3-DOF ($Zθ_{x}θ_{y}$) mono…
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A compliant parallel micromanipulator is a mechanism in which the moving platform is connected to the base through a number of flexural components. Utilizing parallel-kinematics configurations and flexure joints, the monolithic micromanipulators can achieve extremely high motion resolution and accuracy. In this work, the focus was towards the experimental evaluation of a 3-DOF ($Zθ_{x}θ_{y}$) monolithic flexure-based piezo-driven micromanipulator for precise out-of-plane micro/nano positioning applications. The monolithic structure avoids the deficiencies of non-monolithic designs such as backlash, wear, friction, and improves the performance of micromanipulator in terms of high resolution, accuracy, and repeatability. A computational study was conducted to investigate and obtain the inverse kinematics of the proposed micromanipulator. As a result of computational analysis, the developed prototype of the micromanipulator is capable of executing large motion range of $\pm$238.5$μ$m $\times$ $\pm$4830.5$μ$rad $\times$ $\pm$5486.2$μ$rad. Finally, a sliding mode control strategy with nonlinear disturbance observer (SMC-NDO) was designed and implemented on the proposed micromanipulator to obtain system behaviors during experiments. The obtained results from different experimental tests validated the fine micromanipulator's positioning ability and the efficiency of the control methodology for precise micro/nano manipulation applications. The proposed micromanipulator achieved very fine spatial and rotational resolutions of $\pm$4nm, $\pm$250nrad, and $\pm$230nrad throughout its workspace.
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Submitted 12 January, 2023;
originally announced January 2023.
