Nitrogen Plasma Passivated Niobium Resonators for Superconducting Quantum Circuits
Authors:
K. Zheng,
D. Kowsari,
N. J. Thobaben,
X. Du,
X. Song,
S. Ran,
E. A. Henriksen,
D. S. Wisbey,
K. W. Murch
Abstract:
Microwave loss in niobium metallic structures used for superconducting quantum circuits is limited by a native surface oxide layer formed over a timescale of minutes when exposed to an ambient environment. In this work, we show that nitrogen plasma treatment forms a niobium nitride layer at the metal-air interface which prevents such oxidation. X-ray photoelectron spectroscopy confirms the doping…
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Microwave loss in niobium metallic structures used for superconducting quantum circuits is limited by a native surface oxide layer formed over a timescale of minutes when exposed to an ambient environment. In this work, we show that nitrogen plasma treatment forms a niobium nitride layer at the metal-air interface which prevents such oxidation. X-ray photoelectron spectroscopy confirms the doping of nitrogen more than 5 nm into the surface and a suppressed oxygen presence. This passivation remains stable after aging for 15 days in an ambient environment. Cryogenic microwave characterization shows an average filling factor adjusted two-level-system loss tangent $\rm{Fδ_{TLS}}$ of $(2.9\pm0.5)\cdot10^{-7}$ for resonators with 3 $\rmμ$m center strip and $(1.0\pm0.3)\cdot10^{-7}$ for 20 $\rmμ$m center strip, exceeding the performance of unpassivated samples by a factor of four.
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Submitted 18 February, 2022; v1 submitted 5 January, 2022;
originally announced January 2022.
Fabrication and surface treatment of electron-beam evaporated niobium for low-loss coplanar waveguide resonators
Authors:
D. Kowsari,
K. Zheng,
J. T. Monroe,
N. J. Thobaben,
X. Du,
P. M. Harrington,
E. A. Henriksen,
D. S. Wisbey,
K. W. Murch
Abstract:
We characterize low-loss electron-beam evaporated niobium thin films deposited under ultra-high vacuum conditions. Slow deposition yields films with a high superconducting transition temperature ($9.20 \pm 0.06 \rm ~K$) as well as a residual resistivity ratio of $4.8$. We fabricate the films into coplanar waveguide resonators to extract the intrinsic loss due to the presence of two-level-system fl…
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We characterize low-loss electron-beam evaporated niobium thin films deposited under ultra-high vacuum conditions. Slow deposition yields films with a high superconducting transition temperature ($9.20 \pm 0.06 \rm ~K$) as well as a residual resistivity ratio of $4.8$. We fabricate the films into coplanar waveguide resonators to extract the intrinsic loss due to the presence of two-level-system fluctuators using microwave measurements. For a coplanar waveguide resonator gap of $2~μ\rm m$, the films exhibit filling-factor-adjusted two-level-system loss tangents as low as $1.5 \times 10^{-7}$ with single-photon regime internal quality factors in excess of one million after removing native surface oxides of the niobium.
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Submitted 4 October, 2021; v1 submitted 11 August, 2021;
originally announced August 2021.
