-
Disorder and cavity evolution in single-crystalline Ge during implantation of Sb ions monitored in-situ by spectroscopic ellipsometry
Authors:
Tivadar Lohner,
Attila Nemeth,
Zsolt Zolnai,
Benjamin Kalas,
Alekszej Romanenko,
Nguyen Quoc Khanh,
Edit Szilagyi,
Endre Kotai,
Emil Agocs,
Zsolt Toth,
Judit Budai,
Peter Petrik,
Miklos Fried,
Istvan Barsony,
Jozsef Gyulai
Abstract:
Ion implantation has been a key technology for the controlled surface modification of materials in microelectronics and generally, for tribology, biocompatibility, corrosion resistance and many more. To form shallow junctions in Ge is a challenging task. In this work the formation and accumulation of shallow damage profiles was studied by in-situ spectroscopic ellipsometry (SE) for the accurate tr…
▽ More
Ion implantation has been a key technology for the controlled surface modification of materials in microelectronics and generally, for tribology, biocompatibility, corrosion resistance and many more. To form shallow junctions in Ge is a challenging task. In this work the formation and accumulation of shallow damage profiles was studied by in-situ spectroscopic ellipsometry (SE) for the accurate tracking and evaluation of void and damage fractions in crystalline Ge during implantation of 200-keV Sb ions with a total fluence up to 1E16 cm-2 and an ion flux of 2.1E12 cm-2 s-1. The consecutive stages of damage accumulation were identified using optical multi-layer models with quantitative parameters of the thickness of modified layers as well as the volume fractions of amorphized material and voids. The effective size of damaged zones formed from ion tracks initiated by individual bombarding ions can be estimated by numerical simulation compared with the dynamics of damage profiles measured by ion beam analysis and ellipsometry. According to our observations, the formation of initial partial disorder was followed by complete amorphization and void formation occurring at the fluence of about 1E15 cm-2, leading to a high volume fraction of voids and a modified layer thickness of approx. 200 nm by the end of the irradiation process. This agrees with the results of numerical simulations and complementary scanning electron microscopy (SEM) measurements. In addition, we found a quasi-periodic time dependent behavior of amorphization and void formation represented by alternating accelerations and decelerations of different reorganization processes, respectively.
△ Less
Submitted 12 May, 2023;
originally announced May 2023.
-
Irradiation-induced strain localization and strain burst suppression investigated by microcompression and concurrent acoustic emission experiments
Authors:
Dávid Ugi,
Gábor Péterffy,
Sándor Lipcsei,
Zsolt Fogarassy,
Edit Szilágyi,
István Groma,
Péter Dusán Ispánovity
Abstract:
Plastic deformation of microsamples is characterised by large intermittent strain bursts caused by dislocation avalanches. Here we investigate how ion irradiation affects this phenomenon during single slip single crystal plasticity. To this end, in situ compression of Zn micropillars oriented for basal slip was carried out in a SEM. The unique experimental setup also allowed the concurrent recordi…
▽ More
Plastic deformation of microsamples is characterised by large intermittent strain bursts caused by dislocation avalanches. Here we investigate how ion irradiation affects this phenomenon during single slip single crystal plasticity. To this end, in situ compression of Zn micropillars oriented for basal slip was carried out in a SEM. The unique experimental setup also allowed the concurrent recording of the acoustic emission (AE) signals emitted from the sample during deformation. It was shown that irradiation introduced a homogeneous distribution of basal dislocation loops that lead to hardening of the sample as well as strain softening due to dislocation channeling at larger strains. With the used deformation protocol strain burst sizes were found to be decreased due to channeling. The concurrently recorded AE events were correlated with the strain bursts and their analysis provided additional information of the details of collective dislocation dynamics. It was found that the rate of AE events decreased significantly upon irradiation, however, other statistical properties did not change. This was attributed to the appearance of a new type of plastic events dominated by short-range dislocation-obstacle interactions that cannot be detected by AE sensors.
△ Less
Submitted 28 June, 2022;
originally announced June 2022.
-
Depth Profile of the Phase Transition of the FeRh Alloy in FeRh/BaTiO3
Authors:
Attila Lengyel,
Gábor Bazsó,
Aleksandr I. Chumakov,
Dénes L. Nagy,
Gergő Hegedűs,
Dimitrios Bessas,
Zsolt E. Horváth,
Norbert M. Nemes,
Maria A. Gracheva,
Edit Szilágyi,
Szilárd Sajti,
Dániel G. Merkel
Abstract:
We report on the depth dependence and technological limits of the phase transition of the iron rhodium alloy as function of temperature, external magnetic and electric fields in the FeRh/BaTiO3 multiferroic, determined by grazing-incidence nuclear resonant scattering measurements. The change of temperature induces a continuous and homogenous antiferromagnetic / ferromagnetic phase transition throu…
▽ More
We report on the depth dependence and technological limits of the phase transition of the iron rhodium alloy as function of temperature, external magnetic and electric fields in the FeRh/BaTiO3 multiferroic, determined by grazing-incidence nuclear resonant scattering measurements. The change of temperature induces a continuous and homogenous antiferromagnetic / ferromagnetic phase transition through the entire FeRh layer, except in the near substrate region. External magnetic field does not affect this mechanism, but the application of electric field changes it fundamentally (via piezoelectric strain): the phase transition of the alloy suddenly propagates from the substrate up to a height, defined by the combination of temperature and external magnetic field, as soon as the applied electric field reaches ~ 20 kV/m.
△ Less
Submitted 18 November, 2021; v1 submitted 18 October, 2021;
originally announced October 2021.
-
Spectroellipsometric and ion beam analytical studies on a glazed ceramic object with metallic lustre decoration
Authors:
T. Lohner,
E. Agócs,
P. Petrik,
Z. Zolnai,
E. Szilágyi,
I. Kovács,
Z. Szőkefalvi-Nagy,
L. Tóth,
A. L. Tóth,
L. Illés,
I. Bársony
Abstract:
In this work recently produced and commercially available glazed ceramic object with metallic lustre decoration was studied by using a spectroscopic ellipsometer with rotating compensator. The thickness and metal content of the surface lustre layers are determined by ion beam analytical techniques, i.e., Rutherford backscattering spectrometry and external beam particle-induced X-ray emission and t…
▽ More
In this work recently produced and commercially available glazed ceramic object with metallic lustre decoration was studied by using a spectroscopic ellipsometer with rotating compensator. The thickness and metal content of the surface lustre layers are determined by ion beam analytical techniques, i.e., Rutherford backscattering spectrometry and external beam particle-induced X-ray emission and the results were utilized in the construction of multilayer optical models for the evaluation and interpretation of the spectroellipsometric measurements.
△ Less
Submitted 13 October, 2014;
originally announced October 2014.
-
Channelling study of La$_{1-x}$Sr$_x$CoO$_3$ films on different substrates
Authors:
E. Szilágyi,
E. Kótai,
D. Rata,
Z. Németh,
G. Vankó
Abstract:
The cobalt oxide system LaCoO$_3$ and its Sr-doped child compounds have been intensively studied for decades due to their intriguing magnetic and electronic properties. Preparing thin La$_{1-x}$Sr$_x$CoO$_3$ (LSCO) films on different substrates allows for studies with a new type of perturbation, as the films are subject to substrate-dependent epitaxial strain. By choosing a proper substrate for a…
▽ More
The cobalt oxide system LaCoO$_3$ and its Sr-doped child compounds have been intensively studied for decades due to their intriguing magnetic and electronic properties. Preparing thin La$_{1-x}$Sr$_x$CoO$_3$ (LSCO) films on different substrates allows for studies with a new type of perturbation, as the films are subject to substrate-dependent epitaxial strain. By choosing a proper substrate for a thin film grow, not only compressing but also tensile strain can be applied. The consequences for the fundamental physical properties are dramatic: while compressed films are metallic, as the bulk material, films under tensile strain become insulating. The goal of this work is to determine the strain tensor in LSCO films prepared on LaAlO$_3$ and SrTiO$_3$ substrates by pulsed laser deposition using RBS/channelling methods. Apart from the composition and defect structure of the samples, the depth dependence of the strain tensor, the cell parameters, and the volume of the unit cell are also determined. Asymmetric behaviour of the strained cell parameters is found on both substrates. This asymmetry is rather weak in the case of LSCO film grown on LaAlO$_3$, while stronger on SrTiO$_3$ substrate. The strain is more effective at the interface, some relaxation can be observed near to the surface.
△ Less
Submitted 6 March, 2014;
originally announced March 2014.
-
Tayloring neutron optical performance of Fe/Si multilayers
Authors:
D. G. Merkel,
L. Bottyán,
B. Nagy,
Sz. Sajti,
E. Szilágyi,
R. Kovács-Mezei
Abstract:
Reflected neutron beam originating from a crystal monochromator contains higher order wavelength contribution. Creating multilayer mirror structures with custom reflectivity curves including a monochromatic polarized neutron beam is a challenge in modern neutron optics. In this work we present the study of three types of magnetron-sputtered aperiodic Fe/Si layer structures with the purpose of high…
▽ More
Reflected neutron beam originating from a crystal monochromator contains higher order wavelength contribution. Creating multilayer mirror structures with custom reflectivity curves including a monochromatic polarized neutron beam is a challenge in modern neutron optics. In this work we present the study of three types of magnetron-sputtered aperiodic Fe/Si layer structures with the purpose of higher harmonic suppression. First, an approximate sinusoidal profile was achieved directly by carefully controlling the evaporation parameters during sputtering process. Second, we implemented a random distribution of the layer thicknesses in which the layer structure of the sample was derived from a prescribed simulated spectrum. Third, a quasi-sinusoidal rounded bilayer scattering length profile was attempted to achieve by 0, 5, 10, 27 and 270x1e15 /cm2 fluence of 350 keV neon irradiation starting from a sharp bilayer profile. Besides the highest fluence, which considerably decreased the overall bilayer contrast, we found an improvement of the monochromatisation with increasing irradiation fluence by the decrease of the total intensity of higher order reflections from 11.1% to 2.2% while the intensity of the first order Bragg peak decreased from 80% to 70%. The polarizing efficiency also increased with increasing fluence of Ne+ irradiation from 78.8% to 90.7%. We were able to achieve 92% and 82% reflectivity of the random multilayer structure and sinusoidal profile sample with 87.6% and 97.1% polarizing efficiency, respectively.
△ Less
Submitted 22 September, 2011;
originally announced September 2011.
-
Study of proximity effects in superconductor/ferromagnet interface using waveguide enhancement of neutron standing waves
Authors:
V. L. Aksenov,
K. N. Zhernenkov,
Yu. N. Khaidukov,
Yu. V. Nikitenko,
L. Bottyan,
F. Tancziko,
D. Merkel,
B. Nagy,
L. Deak,
D. L. Nagy,
E. Szilagyi,
Zs. E. Horvath,
L. Kiss,
A. Csik,
K. Vad,
G. Langer,
A. Ruhm
Abstract:
This work is devoted to experimental study of influence of superconductivity (S) on ferromagnetism (FM) (inverse proximity effects) with the help of Polarized Neutron Reflectivity. Combining meausurements of specular and diffuse intensities it is possible to obtain full picture of magnetization change in S/FM layered systems like magnetization rotation, domain state formation, inducing of magnet…
▽ More
This work is devoted to experimental study of influence of superconductivity (S) on ferromagnetism (FM) (inverse proximity effects) with the help of Polarized Neutron Reflectivity. Combining meausurements of specular and diffuse intensities it is possible to obtain full picture of magnetization change in S/FM layered systems like magnetization rotation, domain state formation, inducing of magnetization in S layer, etc. To increase weak magnetic signal we propose to use enhanced neutron standing wave regime (e.g. waveguides). In previous work we have made calculation to increase enhcanced factor. Here we present results of preparation sets of S/FM samples and attestation of their structural, magnetic, superconducting and neutron waveguide properties.
△ Less
Submitted 16 January, 2009;
originally announced January 2009.
-
Tailoring Fe/Ag Superparamagnetic Composites by Multilayer Deposition
Authors:
J. Balogh,
D. Kaptás,
L. F. Kiss,
T. Pusztai,
E. Szilágyi,
Á. Tunyogi,
J. Swerts,
S. Vandezande,
K. Temst,
C. Van Haesendonck
Abstract:
The magnetic properties of Fe/Ag granular multilayers were examined by SQUID magnetization and Mossbauer spectroscopy measurements. Very thin (0.2 nm) discontinuous Fe layers show superparamagnetic properties that can be tailored by the thickness of both the magnetic and the spacer layers. The role of magnetic interactions was studied in novel heterostructures of superparamagnetic and ferromagne…
▽ More
The magnetic properties of Fe/Ag granular multilayers were examined by SQUID magnetization and Mossbauer spectroscopy measurements. Very thin (0.2 nm) discontinuous Fe layers show superparamagnetic properties that can be tailored by the thickness of both the magnetic and the spacer layers. The role of magnetic interactions was studied in novel heterostructures of superparamagnetic and ferromagnetic layers and the specific contribution of the ferromagnetic layers to the low field magnetic susceptibility was identified.
△ Less
Submitted 24 February, 2005;
originally announced February 2005.
