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Fundamental Understanding of Exposure and Process Chemistry for Enhanced Lithography and Stability of Metal Oxide Resists
Authors:
Kevin M. Dorney,
Ivan Pollentier,
Fabian Holzmeier,
Roberto Fallica,
Ying-Lin Chen,
Lorenzo Piatti,
Dhirendra Singh,
Laura Galleni,
Michiel J. van Setten,
Hyo Seon Suh,
Danilo De Simone,
Geoffrey Pourtois,
Paul van der Heide,
John Petersen
Abstract:
Metal oxide resists (MORs) have shown great promise for high resolution patterning in extreme ultraviolet (EUV) lithography, with potential for integration into high volume manufacturing. However, MORs have recently been shown to exhibit sensitivity to process conditions and environment, leading to critical dimension (CD) variation. While this variation can be reduced with proper process control,…
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Metal oxide resists (MORs) have shown great promise for high resolution patterning in extreme ultraviolet (EUV) lithography, with potential for integration into high volume manufacturing. However, MORs have recently been shown to exhibit sensitivity to process conditions and environment, leading to critical dimension (CD) variation. While this variation can be reduced with proper process control, there is little knowledge on how these aspects affect the image formation mechanism. To bridge these knowledge gaps, we deploy a coordinated, fundamentals-focused approach to yield deep insights into MOR exposure and process chemistry. Our results on a model MOR, an n-butyl Sn-Oxo system, reveal how parameters such as exposure dose, post-exposure bake temperature, and atmospheric species influence the image formation mechanism. Our results, and the coordinated approach using correlative spectroscopies, provide a strong foundation for understanding the image formation mechanism in MOR materials with potential to link mechanistic aspects to CD variation.
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Submitted 12 May, 2025;
originally announced May 2025.
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DisQu: Investigating the Impact of Disorder in Quantum Generative Models
Authors:
Yannick Werner,
Jasmin Frkatovic,
Vitor Fortes Rey,
Matthias Tschöpe,
Sungho Suh,
Paul Lukowicz,
Nikolaos Palaiodimopoulos,
Maximilian Kiefer-Emmanouilidis
Abstract:
Disordered Quantum many-body Systems (DQS) and Quantum Neural Networks (QNN) have many structural features in common. However, a DQS is essentially an initialized QNN with random weights, often leading to non-random outcomes. In this work, we emphasize the possibilities of random processes being a deceptive quantum-generating model effectively hidden in a QNN. When we choose weights in a QNN rando…
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Disordered Quantum many-body Systems (DQS) and Quantum Neural Networks (QNN) have many structural features in common. However, a DQS is essentially an initialized QNN with random weights, often leading to non-random outcomes. In this work, we emphasize the possibilities of random processes being a deceptive quantum-generating model effectively hidden in a QNN. When we choose weights in a QNN randomly the unitarity property of quantum gates is unchanged. As we show, this can lead to memory effects with multiple consequences on the learnability and trainability of QNN one would not expect from a classical neural network with random weights. This phenomenon may lead to a fundamental misunderstanding of the capabilities of common quantum generative models, where the generation of new samples is essentially averaging over random outputs. While we suggest that DQS can be effectively used for tasks like image augmentation, we draw the attention that overly simple datasets are often used to show the generative capabilities of quantum models, potentially leading to overestimation of their effectiveness.
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Submitted 17 February, 2025; v1 submitted 24 September, 2024;
originally announced September 2024.
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Probabilistic deconstruction of a theory of gravity, Part II: curved space
Authors:
S. Josephine Suh
Abstract:
We propose that the underlying context of holographic duality and the Ryu-Takayanagi formula is that the volume measure of spacetime is a probability measure constrained by quantum dynamics. We define quantum stochastic processes using joint quantum distributions which are realized in a quantum system as expectation values of products of projectors. In anti-de Sitter JT gravity, we show that Einst…
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We propose that the underlying context of holographic duality and the Ryu-Takayanagi formula is that the volume measure of spacetime is a probability measure constrained by quantum dynamics. We define quantum stochastic processes using joint quantum distributions which are realized in a quantum system as expectation values of products of projectors. In anti-de Sitter JT gravity, we show that Einstein's equations arise from the evolution of probability under the quantum stochastic process induced by the boundary, with the area of compactified space in the gravitational theory identified as a probability density evolving under the quantum process. Extrapolating these and related results in flat JT gravity found in arXiv:2108.10916, we conjecture that general relativity arises in the semi-classical limit of the evolution of probability with respect to quantum stochastic processes.
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Submitted 12 November, 2023; v1 submitted 25 August, 2022;
originally announced August 2022.
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Probabilistic deconstruction of a theory of gravity, Part I: flat space
Authors:
S. Josephine Suh
Abstract:
We define and analyze a stochastic process in anti-de Sitter Jackiw-Teitelboim gravity, induced by the quantum dynamics of the boundary and whose random variable takes values in $AdS_2$. With the boundary in a thermal state and for appropriate parameters, we take the asymptotic limit of the quantum process at short time scales and flat space, and show associated classical joint distributions have…
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We define and analyze a stochastic process in anti-de Sitter Jackiw-Teitelboim gravity, induced by the quantum dynamics of the boundary and whose random variable takes values in $AdS_2$. With the boundary in a thermal state and for appropriate parameters, we take the asymptotic limit of the quantum process at short time scales and flat space, and show associated classical joint distributions have the Markov property. We find that Einstein's equations of the theory, sans the cosmological constant term, arise in the semi-classical limit of the quantum evolution of probability under the asymptotic process. In particular, in flat Jackiw-Teitelboim gravity, the area of compactified space solved for by Einstein's equations can be identified as a probability density evolving under the Markovian process.
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Submitted 20 September, 2023; v1 submitted 24 August, 2021;
originally announced August 2021.
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Dynamics of black holes in Jackiw-Teitelboim gravity
Authors:
S. Josephine Suh
Abstract:
We present a general solution for correlators of external boundary operators in black hole states of Jackiw-Teitelboim gravity. We use the Hilbert space constructed using the particle-with-spin interpretation of the Jackiw-Teitelboim action, which consists of wavefunctions defined on Lorentzian $AdS_2$. The density of states of the gravitational system appears in the amplitude for a boundary parti…
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We present a general solution for correlators of external boundary operators in black hole states of Jackiw-Teitelboim gravity. We use the Hilbert space constructed using the particle-with-spin interpretation of the Jackiw-Teitelboim action, which consists of wavefunctions defined on Lorentzian $AdS_2$. The density of states of the gravitational system appears in the amplitude for a boundary particle to emit and reabsorb matter. Up to self-interactions of matter, a general correlator can be reduced in an energy basis to a product of amplitudes for interactions and Wilson polynomials mapping between boundary and bulk interactions.
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Submitted 4 May, 2020; v1 submitted 2 December, 2019;
originally announced December 2019.
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Statistical mechanics of a two-dimensional black hole
Authors:
Alexei Kitaev,
S. Josephine Suh
Abstract:
The dynamics of a nearly-AdS2 spacetime with boundaries is reduced to two particles in the anti-de Sitter space. We determine the class of physically meaningful wavefunctions, and prescribe the statistical mechanics of a black hole. We demonstrate how wavefunctions for a two-sided black hole and a regularized notion of trace can be used to construct thermal partition functions, and more generally,…
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The dynamics of a nearly-AdS2 spacetime with boundaries is reduced to two particles in the anti-de Sitter space. We determine the class of physically meaningful wavefunctions, and prescribe the statistical mechanics of a black hole. We demonstrate how wavefunctions for a two-sided black hole and a regularized notion of trace can be used to construct thermal partition functions, and more generally, arbitrary density matrices. We also obtain correlation functions of external operators.
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Submitted 24 January, 2019; v1 submitted 21 August, 2018;
originally announced August 2018.
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The soft mode in the Sachdev-Ye-Kitaev model and its gravity dual
Authors:
Alexei Kitaev,
S. Josephine Suh
Abstract:
We give an exposition of the SYK model with several new results. A non-local correction to the Schwarzian effective action is found. The same action is obtained by integrating out the bulk degrees of freedom in a certain variant of dilaton gravity. We also discuss general properties of out-of-time-order correlators.
We give an exposition of the SYK model with several new results. A non-local correction to the Schwarzian effective action is found. The same action is obtained by integrating out the bulk degrees of freedom in a certain variant of dilaton gravity. We also discuss general properties of out-of-time-order correlators.
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Submitted 24 January, 2019; v1 submitted 22 November, 2017;
originally announced November 2017.
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Four-point function in the IOP matrix model
Authors:
Ben Michel,
Joseph Polchinski,
Vladimir Rosenhaus,
S. Josephine Suh
Abstract:
The IOP model is a quantum mechanical system of a large-$N$ matrix oscillator and a fundamental oscillator, coupled through a quartic interaction. It was introduced previously as a toy model of the gauge dual of an AdS black hole, and captures a key property that at infinite $N$ the two-point function decays to zero on long time scales. Motivated by recent work on quantum chaos, we sum all planar…
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The IOP model is a quantum mechanical system of a large-$N$ matrix oscillator and a fundamental oscillator, coupled through a quartic interaction. It was introduced previously as a toy model of the gauge dual of an AdS black hole, and captures a key property that at infinite $N$ the two-point function decays to zero on long time scales. Motivated by recent work on quantum chaos, we sum all planar Feynman diagrams contributing to the four-point function. We find that the IOP model does not satisfy the more refined criteria of exponential growth of the out-of-time-order four-point function.
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Submitted 20 February, 2016;
originally announced February 2016.
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Entanglement growth during thermalization in holographic systems
Authors:
Hong Liu,
S. Josephine Suh
Abstract:
We derive in detail several universal features in the time evolution of entanglement entropy and other nonlocal observables in quenched holographic systems. The quenches are such that a spatially uniform density of energy is injected at an instant in time, exciting a strongly coupled CFT which eventually equilibrates. Such quench processes are described on the gravity side by the gravitational col…
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We derive in detail several universal features in the time evolution of entanglement entropy and other nonlocal observables in quenched holographic systems. The quenches are such that a spatially uniform density of energy is injected at an instant in time, exciting a strongly coupled CFT which eventually equilibrates. Such quench processes are described on the gravity side by the gravitational collapse of a thin shell that results in a black hole. Various nonlocal observables have a unified description in terms of the area of extremal surfaces of different dimensions. In the large distance limit, the evolution of an extremal surface, and thus the corresponding boundary observable, is controlled by the geometry around and inside the event horizon of the black hole, allowing us to identify regimes of pre-local- equilibration quadratic growth, post-local-equilibration linear growth, a memory loss regime, and a saturation regime with behavior resembling those in phase transitions. We also discuss possible bounds on the maximal rate of entanglement growth in relativistic systems.
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Submitted 5 November, 2013;
originally announced November 2013.
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Entanglement Tsunami: Universal Scaling in Holographic Thermalization
Authors:
Hong Liu,
S. Josephine Suh
Abstract:
We consider the time evolution of entanglement entropy after a global quench in a strongly coupled holographic system, whose subsequent equilibration is described in the gravity dual by the gravitational collapse of a thin shell of matter resulting in a black hole. In the limit of large regions of entanglement, the evolution of entanglement entropy is controlled by the geometry around and inside t…
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We consider the time evolution of entanglement entropy after a global quench in a strongly coupled holographic system, whose subsequent equilibration is described in the gravity dual by the gravitational collapse of a thin shell of matter resulting in a black hole. In the limit of large regions of entanglement, the evolution of entanglement entropy is controlled by the geometry around and inside the event horizon of the black hole, resulting in regimes of pre-local- equilibration quadratic growth (in time), post-local-equilibration linear growth, a late-time regime in which the evolution does not carry any memory of the size and shape of the entangled region, and a saturation regime with critical behavior resembling those in continuous phase transitions. Collectively, these regimes suggest a picture of entanglement growth in which an "entanglement tsunami" carries entanglement inward from the boundary. We also make a conjecture on the maximal rate of entanglement growth in relativistic systems.
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Submitted 27 June, 2013; v1 submitted 30 May, 2013;
originally announced May 2013.
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A quantum electron star
Authors:
Andrea Allais,
John McGreevy,
S. Josephine Suh
Abstract:
We construct and probe a holographic description of state of matter which results from coupling a Fermi liquid to a relativistic conformal field theory (CFT). The bulk solution is described by a quantum gas of fermions supported from collapse into the gravitational well of AdS by their own electrostatic repulsion. In the probe limit studied here, the Landau quasiparticles survive this coupling to…
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We construct and probe a holographic description of state of matter which results from coupling a Fermi liquid to a relativistic conformal field theory (CFT). The bulk solution is described by a quantum gas of fermions supported from collapse into the gravitational well of AdS by their own electrostatic repulsion. In the probe limit studied here, the Landau quasiparticles survive this coupling to a CFT.
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Submitted 23 February, 2012;
originally announced February 2012.
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Molecular dynamics simulation study of self-diffusion for penetrable-sphere model fluids
Authors:
Soong-Hyuck Suh,
Chun-Ho Kim,
Soon-Chul Kim,
Andrés Santos
Abstract:
Molecular dynamics simulations are carried out to investigate the diffusion behavior of penetrable-sphere model fluids characterized by a finite energy barrier $ε$. The self-diffusion coefficient is evaluated from the time-dependent velocity autocorrelation function and mean-square displacement. Detailed insights into the cluster formation for penetrable spheres are gained from the Enskog factor,…
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Molecular dynamics simulations are carried out to investigate the diffusion behavior of penetrable-sphere model fluids characterized by a finite energy barrier $ε$. The self-diffusion coefficient is evaluated from the time-dependent velocity autocorrelation function and mean-square displacement. Detailed insights into the cluster formation for penetrable spheres are gained from the Enskog factor, the effective particle volume fraction, the mean free path, and the collision frequency for both the soft-type penetrable and the hard-type reflective collisions. The simulation data are compared to theoretical predictions from the Boltzmann kinetic equation and from a simple extension to finite $ε$ of the Enskog prediction for impenetrable hard spheres ($ε\to\infty$). A reasonable agreement between theoretical and simulation results is found in the cases of $ε^*\equiv ε/k_BT=0.2$, $0.5$, and $1.0$. However, for dense systems (packing fraction $φ>0.6$) with a highly repulsive energy barrier ($ε^*=3.0$), a poorer agreement was observed due to metastable static effects of clustering formation and dynamic effects of correlated collision processes among these cluster-forming particles.
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Submitted 19 November, 2010; v1 submitted 8 August, 2010;
originally announced August 2010.
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Phase diagram of quarter-filled band organic salts, [EDT-TTF-CONMe2]2X, X = AsF6 and Br
Authors:
Pascale Auban-Senzier,
Claude R. Pasquier,
Denis Jérome,
S. Suh,
Stuart E. Brown,
Cecile Meziere,
Patrick Batail
Abstract:
An investigation of the P/T phase diagram of the quarter-filled organic conductors, [EDT-TTF-CONMe2]2X, is reported on the basis of transport and NMR studies of two members, X=AsF6 and Br of the family. The strongly insulating character of these materials in the low pressure regime has been attributed to a remarkably stable charge ordered state confirmed by 13C NMR and the only existence of 1/4…
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An investigation of the P/T phase diagram of the quarter-filled organic conductors, [EDT-TTF-CONMe2]2X, is reported on the basis of transport and NMR studies of two members, X=AsF6 and Br of the family. The strongly insulating character of these materials in the low pressure regime has been attributed to a remarkably stable charge ordered state confirmed by 13C NMR and the only existence of 1/4 Umklapp e-e scattering favoring a charge ordering instead of the 1D Mott localization seen in (TM)2X which are quarter-filled compounds with dimerization. A non magnetic insulating phase instead of the spin density wave state is stabilized in the deconfined regime of the phase diagram. This sequence of phases observed under pressure may be considered as a generic behavior for 1/4-filled conductors with correlations.
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Submitted 26 May, 2009;
originally announced May 2009.
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Critical properties of the S=1 spin dimer compound Ba3Mn2O8
Authors:
S. Suh,
K. A. Al-Hassanieh,
E. C. Samulon,
J. S. Brooks,
W. G. Clark,
P. L. Kuhns,
L. L. Lumata,
A. Reyes,
I. R. Fisher,
S. E. Brown,
C. D. Batista
Abstract:
Ba3Mn2O8 is a hexagonally coordinated Mn5+ S=1 spin dimer system with small uniaxial single-ion anisotropy. 135,137Ba NMR spectroscopy is used to establish the lower critical field Hc1 of distinct field-induced phases for H parallel to c,H perpendicular to c, and measure the longitudinal (Ml) and transverse (Mt) magnetizations in the vicinity of the quantum critical point (QCP). Ml_parallel (T,…
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Ba3Mn2O8 is a hexagonally coordinated Mn5+ S=1 spin dimer system with small uniaxial single-ion anisotropy. 135,137Ba NMR spectroscopy is used to establish the lower critical field Hc1 of distinct field-induced phases for H parallel to c,H perpendicular to c, and measure the longitudinal (Ml) and transverse (Mt) magnetizations in the vicinity of the quantum critical point (QCP). Ml_parallel (T, Hc1), Ml_perpendicular (T, Hc1) are reproduced by solving a low-energy model for a dilute gas of interacting bosons. Ml_parallel(T goes to 0, H = Hc1) (Ml_perpendicular(T goes to 0, H = Hc1)) follows the expectation for a BEC (Ising-like) QCP.
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Submitted 5 May, 2009;
originally announced May 2009.
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Interplay between carrier and impurity concentrations in annealed Ga$_{1-x}$Mn$_{x}$As intrinsic anomalous Hall Effect
Authors:
S. H. Chun,
Y. S. Kim,
H. K. Choi,
I. T. Jeong,
W. O. Lee,
K. S. Suh,
Y. S. OH,
K. H. Kim,
Z. G. Khim,
J. C. Woo,
Y. D. Park
Abstract:
Investigating the scaling behavior of annealed Ga$_{1-x}$Mn$_{x}$As anomalous Hall coefficients, we note a universal crossover regime where the scaling behavior changes from quadratic to linear, attributed to the anomalous Hall Effect intrinsic and extrinsic origins, respectively. Furthermore, measured anomalous Hall conductivities when properly scaled by carrier concentration remain constant, e…
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Investigating the scaling behavior of annealed Ga$_{1-x}$Mn$_{x}$As anomalous Hall coefficients, we note a universal crossover regime where the scaling behavior changes from quadratic to linear, attributed to the anomalous Hall Effect intrinsic and extrinsic origins, respectively. Furthermore, measured anomalous Hall conductivities when properly scaled by carrier concentration remain constant, equal to theoretically predicated values, spanning nearly a decade in conductivity as well as over 100 K in T$_{C}$. Both the qualitative and quantitative agreement confirms the validity of new equations of motion including the Berry phase contributions as well as tunablility of the intrinsic anomalous Hall Effect.
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Submitted 30 March, 2006;
originally announced March 2006.
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Speckle-visibility spectroscopy: A tool to study time-varying dynamics
Authors:
R. Bandyopadhyay,
A. S. Gittings,
S. S. Suh,
P. K. Dixon,
D. J. Durian
Abstract:
We describe a multispeckle dynamic light scattering technique capable of resolving the motion of scattering sites in cases that this motion changes systematically with time. The method is based on the visibility of the speckle pattern formed by the scattered light as detected by a single exposure of a digital camera. Whereas previous multispeckle methods rely on correlations between images, here…
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We describe a multispeckle dynamic light scattering technique capable of resolving the motion of scattering sites in cases that this motion changes systematically with time. The method is based on the visibility of the speckle pattern formed by the scattered light as detected by a single exposure of a digital camera. Whereas previous multispeckle methods rely on correlations between images, here the connection with scattering site dynamics is made more simply in terms of the variance of intensity among the pixels of the camera for the specified exposure duration. The essence is that the speckle pattern is more visible, i.e. the variance of detected intensity levels is greater, when the dynamics of the scattering site motion is slow compared to the exposure time of the camera. The theory for analyzing the moments of the spatial intensity distribution in terms of the electric field autocorrelation is presented. It is demonstrated for two well-understood samples, a colloidal suspension of Brownian particles and a coarsening foam, where the dynamics can be treated as stationary. However, the method is particularly appropriate for samples in which the dynamics vary with time, either slowly or rapidly, limited only by the exposure time fidelity of the camera. Potential applications range from soft-glassy materials, to granular avalanches, to flowmetry of living tissue.
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Submitted 3 June, 2005;
originally announced June 2005.
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Carrier-mediated ferromagnetic ordering in Mn ion-implanted p+GaAs:C
Authors:
Y. D. Park,
J. D. Lim,
K. S. Suh,
S. B. Shim,
J. S. Lee,
C. R. Abernathy,
S. J. Pearton,
Y. S. Kim,
Z. G. Khim,
R. G. Wilson
Abstract:
Highly p-type GaAs:C was ion-implanted with Mn at differing doses to produce Mn concentrations in the 1 - 5 at.% range. In comparison to LT-GaAs and n+GaAs:Si samples implanted under the same conditions, transport and magnetic properties show marked differences. Transport measurements show anomalies, consistent with observed magnetic properties and with epi- LT-(Ga,Mn)As, as well as the extraord…
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Highly p-type GaAs:C was ion-implanted with Mn at differing doses to produce Mn concentrations in the 1 - 5 at.% range. In comparison to LT-GaAs and n+GaAs:Si samples implanted under the same conditions, transport and magnetic properties show marked differences. Transport measurements show anomalies, consistent with observed magnetic properties and with epi- LT-(Ga,Mn)As, as well as the extraordinary Hall Effect up to the observed magnetic ordering temperature (T_C). Mn ion-implanted p+GaAs:C with as-grown carrier concentrations > 10^20 cm^-3 show remanent magnetization up to 280 K.
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Submitted 11 August, 2003;
originally announced August 2003.
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Metallic temperature dependence of resistivity in perchlorate doped polyacetylene
Authors:
Y. W. Park,
E. S. Choi,
D. S. Suh
Abstract:
We have measured the electrical resistivity ($ρ$) and the thermoelectric power (TEP) of the perchlorate (ClO4^-) doped stretch oriented polyacetylene (PA) film. For the highly conducting samples ($σ_{RT} > 41000 S/cm$), the temperature dependence of the 4-probe resistivity shows positive temperature coefficient of resistivity (TCR) from T=1.5K to 300K. For the less conducting samples, the 4-prob…
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We have measured the electrical resistivity ($ρ$) and the thermoelectric power (TEP) of the perchlorate (ClO4^-) doped stretch oriented polyacetylene (PA) film. For the highly conducting samples ($σ_{RT} > 41000 S/cm$), the temperature dependence of the 4-probe resistivity shows positive temperature coefficient of resistivity (TCR) from T=1.5K to 300K. For the less conducting samples, the 4-probe resistivity data show the crossover of TCR with a broad minimum peak at T=T* > 200K. For samples of $σ_{RT}$$>$20000 S/cm, the $ρ(1.5K)/ρ(300K) <1$, i.e., the resistivity at 1.5K is lower than the room temperature resistivity value. The temperature dependence of the TEP shows diffusive linear metallic TEP becoming temperature independent below 40K. Unlike the others who used Cu(ClO_4)_2 for the ClO_4^- doping, the initial doping material we used is anhydrous Fe(ClO_4)_3 which is crucial to obtain the positive TCR from T=1.5K to 300K.
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Submitted 7 September, 1998;
originally announced September 1998.
