Showing 1–1 of 1 results for author: Seguin, S M
-
Optimization of Quantum-dot Qubit Fabrication via Machine Learning
Authors:
Antonio B. Mei,
Ivan Milosavljevic,
Amanda L. Simpson,
Valerie A. Smetanka,
Colin P. Feeney,
Shay M. Seguin,
Sieu D. Ha,
Wonill Ha,
Matthew D. Reed
Abstract:
Precise nanofabrication represents a critical challenge to developing semiconductor quantum-dot qubits for practical quantum computation. Here, we design and train a convolutional neural network to interpret in-line scanning electron micrographs and quantify qualitative features affecting device functionality. The high-throughput strategy is exemplified by optimizing a model lithographic process w…
▽ More
Precise nanofabrication represents a critical challenge to developing semiconductor quantum-dot qubits for practical quantum computation. Here, we design and train a convolutional neural network to interpret in-line scanning electron micrographs and quantify qualitative features affecting device functionality. The high-throughput strategy is exemplified by optimizing a model lithographic process within a five-dimensional design space and by demonstrating a new approach to address lithographic proximity effects. The present results emphasize the benefits of machine learning for developing robust processes, shortening development cycles, and enforcing quality control during qubit fabrication.
△ Less
Submitted 15 December, 2020;
originally announced December 2020.
