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Atomistic modeling of thermal effects in focused electron beam induced deposition of Me$_2$Au(tfac)
Authors:
Alexey Prosvetov,
Alexey V. Verkhovtsev,
Gennady Sushko,
Andrey V. Solov'yov
Abstract:
The role of thermal effects in the focused electron beam induced deposition (FEBID) process of Me$_2$Au(tfac) is studied by means of irradiation-driven molecular dynamics simulations. The FEBID of Me$_2$Au(tfac), a commonly used precursor molecule for the fabrication of gold nanostructures, is simulated at different temperatures in the range of $300-450$ K. The deposit's structure, morphology, gro…
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The role of thermal effects in the focused electron beam induced deposition (FEBID) process of Me$_2$Au(tfac) is studied by means of irradiation-driven molecular dynamics simulations. The FEBID of Me$_2$Au(tfac), a commonly used precursor molecule for the fabrication of gold nanostructures, is simulated at different temperatures in the range of $300-450$ K. The deposit's structure, morphology, growth rate, and elemental composition at different temperatures are analyzed. The fragmentation cross section for Me$_2$Au(tfac) is evaluated on the basis of the cross sections for structurally similar molecules. Different fragmentation channels involving the dissociative ionization (DI) and dissociative electron attachment (DEA) mechanisms are considered. The conducted simulations of FEBID confirm experimental observations that deposits consist of small gold clusters embedded into a carbon-rich organic matrix. The simulation results indicate that accounting for both DEA- and DI-induced fragmentation of all the covalent bonds in Me$_2$Au(tfac) and increasing the amount of energy transferred to the system upon fragmentation increase the concentration of gold in the deposit. The simulations predict an increase in Au:C ratio in the deposit from 0.18 to 0.25 upon the temperature increase from 300 K to 450 K, being within the range of experimentally reported values.
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Submitted 25 August, 2022;
originally announced August 2022.
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Atomistic simulation of the FEBID-driven growth of iron-based nanostructures
Authors:
Alexey Prosvetov,
Alexey V. Verkhovtsev,
Gennady Sushko,
Andrey V. Solov'yov
Abstract:
The growth of iron-containing nanostructures in the process of focused electron beam-induced deposition (FEBID) of Fe(CO)$_5$ is studied by means of atomistic irradiation-driven molecular dynamics (IDMD) simulations. The geometrical characteristics (lateral size, height and volume), morphology and metal content of the grown nanostructures are analyzed at different irradiation and precursor repleni…
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The growth of iron-containing nanostructures in the process of focused electron beam-induced deposition (FEBID) of Fe(CO)$_5$ is studied by means of atomistic irradiation-driven molecular dynamics (IDMD) simulations. The geometrical characteristics (lateral size, height and volume), morphology and metal content of the grown nanostructures are analyzed at different irradiation and precursor replenishment conditions corresponding to the electron-limited and precursor-limited regimes (ELR & PLR) of FEBID. A significant variation of the deposit's morphology and elemental composition is observed with increasing the electron current from 1 to 4 nA. At low beam current (1 nA) corresponding to the ELR and a low degree of Fe(CO)$_5$ fragmentation, the nanogranular structures are formed which consist of isolated iron clusters embedded into an organic matrix. In this regime, metal clusters do not coalesce with increasing electron fluence, resulting in relatively low metal content of the nanostructures. A higher beam current of 4 nA corresponding to the PLR facilitates the precursor fragmentation and the coalescence of metal clusters into a dendrite-like structure with the size corresponding to the primary electron beam. The IDMD simulations enable atomistic-level predictions on the nanoscopic characterization of the initial phase of nanostructure growth in the FEBID process. These predictions can be verified in high-resolution transmission electron microscopy experiments.
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Submitted 11 February, 2022; v1 submitted 30 September, 2021;
originally announced September 2021.
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Irradiation driven molecular dynamics simulation of the FEBID process for Pt(PF$_3$)$_4$
Authors:
Alexey Prosvetov,
Alexey V. Verkhovtsev,
Gennady B. Sushko,
Andrey V. Solov'yov
Abstract:
This paper presents a detailed computational protocol for atomistic simulation of the formation and growth of metal-containing nanostructures during the Focused Electron Beam Induced Deposition (FEBID) process. The protocol is based upon the Irradiation-Driven Molecular Dynamics (IDMD) - a novel and general methodology for computer simulations of irradiation-driven transformations of complex molec…
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This paper presents a detailed computational protocol for atomistic simulation of the formation and growth of metal-containing nanostructures during the Focused Electron Beam Induced Deposition (FEBID) process. The protocol is based upon the Irradiation-Driven Molecular Dynamics (IDMD) - a novel and general methodology for computer simulations of irradiation-driven transformations of complex molecular systems by means of the advanced software packages MBN Explorer and MBN Studio. Atomistic simulations performed following the formulated protocol provide valuable insights into the fundamental mechanisms of electron-induced precursor fragmentation and the related mechanism of nanostructure formation and growth using FEBID, which are essential for the further advancement of FEBID-based nanofabrication. The developed computational methodology is general and applicable to different precursor molecules, substrate types, irradiation regimes, etc. The methodology can also be adjusted to simulate the nanostructure formation by other nanofabrication techniques using electron beams, such as direct electron beam lithography. In the present study, the methodology is applied to the IDMD simulation of the FEBID of Pt(PF$_3$)$_4$ - a widely studied precursor molecule - on a SiO$_2$ surface. The simulations reveal the processes driving the initial phase of nanostructure formation during FEBID, including nucleation of Pt atoms, formation of small metal clusters on the surface, followed by their aggregation and the formation of dendritic platinum nanostructures. The analysis of the simulation results provides space resolved relative metal content, height and the growth rate of the deposits which represent valuable reference data for the experimental characterization of the nanostructures grown by FEBID.
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Submitted 15 September, 2021; v1 submitted 25 May, 2021;
originally announced May 2021.
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Shrinking of Rapidly Evaporating Water Microdroplets Reveals their Extreme Supercooling
Authors:
Claudia Goy,
Marco A. C. Potenza,
Sebastian Dedera,
Marilena Tomut,
Emmanuel Guillerm,
Anton Kalinin,
Kay-Obbe Voss,
Alexander Schottelius,
Nikolaos Petridis,
Alexey Prosvetov,
Guzmán Tejeda,
José M. Fernández,
Christina Trautmann,
Frédéric Caupin,
Ulrich Glasmacher,
Robert E. Grisenti
Abstract:
The fast evaporative cooling of micrometer-sized water droplets in vacuum offers the appealing possibility to investigate supercooled water - below the melting point but still a liquid - at temperatures far beyond the state-of-the-art. However, it is challenging to obtain a reliable value of the droplet temperature under such extreme experimental conditions. Here, the observation of morphology-dep…
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The fast evaporative cooling of micrometer-sized water droplets in vacuum offers the appealing possibility to investigate supercooled water - below the melting point but still a liquid - at temperatures far beyond the state-of-the-art. However, it is challenging to obtain a reliable value of the droplet temperature under such extreme experimental conditions. Here, the observation of morphology-dependent resonances in the Raman scattering from a stream of perfectly uniform water droplets has allowed us to measure with an absolute precision of better than 0.2% the variation in droplet size resulting from evaporative mass losses. This finding proved crucial to an unambiguous determination of the droplet temperature. In particular, a fraction of water droplets with initial diameter of 6379$\pm$12 nm were found to remain liquid down to 230.6$\pm$0.6 K. Our results question temperature estimates reported recently for larger supercooled water droplets, and provide valuable information on the hydrogen-bond network in liquid water in the hard-to-access deeply supercooled regime.
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Submitted 7 November, 2017;
originally announced November 2017.
