Electron beam precession for a serial crystallography experiment in a TEM
Authors:
Sergi Plana-Ruiz,
Penghan Lu,
Govind Ummethala,
Rafal Dunin-Borkowski
Abstract:
During the last few years, serial electron crystallography (Serial Electron Diffraction, SerialED) has been gaining attention for the structure determination of crystalline compounds that are sensitive to the irradiation of the electron beam. By recording a single electron diffraction pattern per crystal, indexing hundreds or even thousands of measured particles, and merging the reflection intensi…
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During the last few years, serial electron crystallography (Serial Electron Diffraction, SerialED) has been gaining attention for the structure determination of crystalline compounds that are sensitive to the irradiation of the electron beam. By recording a single electron diffraction pattern per crystal, indexing hundreds or even thousands of measured particles, and merging the reflection intensities of the successfully indexed patterns, one can retrieve crystal structure models with strongly mitigated beam damage contributions. However, one of the technique's bottlenecks is the need to collect that many diffraction patterns, which, done in an automated way, results in low indexing rates. This work demonstrates how to overcome this limitation by performing the serial crystallography experiment following a semi-automated routine with a precessed electron beam (Serial Precession Electron Diffraction, SerialPED). The precession movement increases the number of reflections present in the diffraction patterns and dynamical effects related to specific orientations of the crystals with respect to the electron beam are smoothed out. This leads to more uniform reflection intensities across the serial dataset and a smaller number of patterns are required to merge the reflection intensities for good statistics. Furthermore, structure refinements based on the dynamical diffraction theory become accessible, providing a novel approach for more accurate structure models. In this context, the use of beam precession is presented as an advantageous tool for serial electron crystallography as it enables reliable crystal structure analysis with a lower amount of diffraction data.
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Submitted 1 April, 2025;
originally announced April 2025.
Sustainable wafer-scale integration of epitaxial ZnO on silicon for piezoelectric devices
Authors:
D. Sanchez-Fuentes,
R. Desgarceaux,
A. Rahal,
L. Garcia,
S. Bousri,
S. Ding,
N. Camara,
F. Pascal,
R. Garcia-Bermejo,
N. Guillaume,
G. Ardila,
J. Gazquez,
C. Magen,
S Plana-Ruiz,
C. Guasch,
A. Carretero-Genevrier
Abstract:
To sustainably support the ongoing energetic transition, we need functional metal oxides capable of converting energy, and produce storage, and sensing devices. However, these materials suffer from a high economic cost of manufacturing, and their production in a sustainable way is, to date, a milestone. Additionally, the technical challenges, such as scalability and integration of silicon for indu…
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To sustainably support the ongoing energetic transition, we need functional metal oxides capable of converting energy, and produce storage, and sensing devices. However, these materials suffer from a high economic cost of manufacturing, and their production in a sustainable way is, to date, a milestone. Additionally, the technical challenges, such as scalability and integration of silicon for industrial processing using microelectronic technologies, impose strict conditions for the entire materials process. In this work, we engineer α-quartz virtual substrates up to 4 inches facilitating the large-scale and sustainable integration of multifunctional epitaxial ZnO metal oxide microwire films on silicon. These materials are exclusively manufactured on silicon using solution chemistry, providing single-chip solutions that can meet strict economic constraints for developing sustainable devices at a lower cost. Through this integrative technology, we demonstrate the microfabrication of epitaxial (110)ZnO/(100)α-quartz/(100)silicon piezoelectric membrane resonators at the wafer-scale with potential applications in energy conversion and sensing. We combined four dimensional (4D)-STEM diffraction technology and Piezoelectric Force Microscopy (PFM) to establish a correlation between out of plane crystalline strain and piezoelectric response in epitaxial (110) ZnO at the microscale. Finally, we proved the fabrication of 800 nm thick (110) ZnO suspended membranes that can be transferred to flexible substrates, making them suitable for flexible devices.
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Submitted 18 March, 2025;
originally announced March 2025.
