X-ray diffraction characterization of suspended structures for MEMS applications
Authors:
P. Goudeau,
N. Tamura,
B. Lavelle,
S. Rigo,
T. Masri,
A. Bosseboeuf,
T. Sarnet,
J. -A. Petit,
J. -M. Desmarres
Abstract:
Mechanical stress control is becoming one of the major challenges for the future of micro and nanotechnologies. Micro scanning X-ray diffraction is one of the promising techniques that allows stress characterization in such complex structures at sub micron scales. Two types of MEMS structure have been studied: a bilayer cantilever composed of a gold film deposited on poly-silicon and a boron doped…
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Mechanical stress control is becoming one of the major challenges for the future of micro and nanotechnologies. Micro scanning X-ray diffraction is one of the promising techniques that allows stress characterization in such complex structures at sub micron scales. Two types of MEMS structure have been studied: a bilayer cantilever composed of a gold film deposited on poly-silicon and a boron doped silicon bridge. X-ray diffraction results are discussed in view of numerical simulation experiments.
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Submitted 10 January, 2025;
originally announced January 2025.
Investigating liquid surfaces down to the nanometer scale using grazing incidence x-ray scattering
Authors:
C. Fradin,
A. Braslau,
D. Luzet,
M. Alba,
C. Gourier,
J. Daillant,
G. Gruebel,
G. Vignaud,
J. -F. Legrand,
J. Lal J. -M. Petit,
F. Rieutord
Abstract:
Grazing incidence x-ray surface scattering has been used to investigate liquid surfaces down to the molecular scale. The free surface of water is well described by the capillary wave model (<z(q)z(-q)> ~ q-2 spectrum) up to wavevectors > 10^8 m^-1. At larger wavevectors near-surface acoustic waves must be taken into account. When the interface is bounded by a surfactant monolayer, it exhibits a…
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Grazing incidence x-ray surface scattering has been used to investigate liquid surfaces down to the molecular scale. The free surface of water is well described by the capillary wave model (<z(q)z(-q)> ~ q-2 spectrum) up to wavevectors > 10^8 m^-1. At larger wavevectors near-surface acoustic waves must be taken into account. When the interface is bounded by a surfactant monolayer, it exhibits a bending stiffness and the bending rigidity modulus can be measured. However, bending effects generally cannot be described using the Helfrich Hamiltonian and the characteristic exponent in the roughness power spectrum can smaller than 4. Finally, upon compression, tethered monolayers formed on a subphase containing divalent ions are shown to buckle in the third dimension with a characteristic wavelength on the order of 10^8 m^-1.
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Submitted 22 August, 1997;
originally announced August 1997.
