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Role of energetic ions in the growth of fcc and ω crystalline phases in Ti films deposited by HiPIMS
Authors:
David Dellasega,
Francesco Mirani,
Davide Vavassori,
Claudia Conti,
Matteo Passoni
Abstract:
Titanium (Ti), due to its excellent properties, is widely exploited in thin film technology that usually leads to the production of α-phase (hcp) Ti films. In this work, we investigate the phase evolution of Ti films deposited by varying type and energy of the film-forming species. To investigate different plasma species environments, films with different thicknesses are grown by using conventiona…
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Titanium (Ti), due to its excellent properties, is widely exploited in thin film technology that usually leads to the production of α-phase (hcp) Ti films. In this work, we investigate the phase evolution of Ti films deposited by varying type and energy of the film-forming species. To investigate different plasma species environments, films with different thicknesses are grown by using conventional Direct Current Magnetron Sputtering (DCMS) and High Power Impulse Magnetron Sputtering (HiPIMS). Furthermore, HiPIMS depositions with different substrate bias voltage US (0 V, -300 V and -500 V) are performed to investigate different ion energy ranges. Microstructure, morphology and residual stress of the deposited films, as well as the DCMS and HiPIMS plasma composition, are analysed with different characterization techniques. The DCMS samples exhibit the Ti α-phase only and show a tensile residual stress decreasing with thickness. As far as HiPIMS samples are concerned, a compressive-tensile-compressive (CTC) behavior is observed for residual stresses as thickness increases. Specifically, films deposited in low energy ion conditions (US =0 V) show the presence of the Ti fcc phase up to a maximum thickness of about 370 nm. Differently, films deposited under high energy conditions (US = -300 V and -500 V) show the nucleation of the Ti ω-phase for thicknesses greater than 260 and 330 nm, respectively. The formation of these unusual Ti phases is discussed considering the different deposition conditions.
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Submitted 27 April, 2021; v1 submitted 31 August, 2020;
originally announced August 2020.
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Fractal Carbon nanofoams by nanosecond and femtosecond pulsed-laser deposition
Authors:
Andrea Pazzaglia,
Alessandro Maffini,
Davide Orecchia,
Margherita Zavelani-Rossi,
Matteo Passoni
Abstract:
We report on an investigation on the properties of ultra-low density, fractal, Carbon nanofoams fabricated with the nanosecond and femtosecond pulsed-laser deposition (PLD) techniques. We measure through innovative techniques the foam mean density and the properties of the fractal aggregates composing the film (i.e. nanoparticles diameter, fractal dimension, and gyration radius) as a function of s…
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We report on an investigation on the properties of ultra-low density, fractal, Carbon nanofoams fabricated with the nanosecond and femtosecond pulsed-laser deposition (PLD) techniques. We measure through innovative techniques the foam mean density and the properties of the fractal aggregates composing the film (i.e. nanoparticles diameter, fractal dimension, and gyration radius) as a function of several PLD process parameters, namely the background gas pressure and the laser pulse characteristics (energy, time duration, repetition rate). We discuss the experimental observation on the basis of the existing literature, and we propose an analytical equation, based on the fractal scaling law, to predict the foam density from the aggregates properties. Finally, we use analytical arguments to explain the observed trends in the nanofoam density with respect to the process parameters, useful to gain new insights on the nanofoam growth and to guide experimental work in fabricating ultra-low density films with precisely controlled properties.
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Submitted 2 March, 2022; v1 submitted 31 August, 2020;
originally announced August 2020.
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Angular dependence and absorption properties of the anapolemode of Si nano-disks
Authors:
Lucia Fornasari,
Marco Passoni,
Franco Marabelli,
Yuyao Chen,
Yu Wang,
Luca Dal Negro
Abstract:
The polarization- and angle- resolved optical response of the anapole mode in silicon nano-disks array have been experimentally and theoretically investigated. The good agreement betweenmeasured data and simulations yields to a consistent description of the anapole mode behaviorthat exhibits different features for TE or TM polarization excitation. Scattering matrix calculationallows us to disentan…
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The polarization- and angle- resolved optical response of the anapole mode in silicon nano-disks array have been experimentally and theoretically investigated. The good agreement betweenmeasured data and simulations yields to a consistent description of the anapole mode behaviorthat exhibits different features for TE or TM polarization excitation. Scattering matrix calculationallows us to disentangle scattered and diffused light contributions and to provide a quantitativeestimation of the absorbance enhancement associated to 2D excitation of the anapole mode. Weperformed the multipolar decomposition of the far-field scattered radiation for both TE and TMpolarizations and unambiguously identified the anapole resonant condition in excellent agreementwith the experimental results over a large range of incident angles. Our findings demonstrate thecontrolled excitation of electromagnetic anapole modes in engineered arrays of silicon nano-disksfor the development of optical nanostructures with enhanced light-matter interaction
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Submitted 23 April, 2020;
originally announced April 2020.
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Reference-free evaluation of thin films mass thickness and composition through energy dispersive x-ray spectroscopy
Authors:
Andrea Pazzaglia,
Alessandro Maffini,
David Dellasega,
Alessio Lamperti,
Matteo Passoni
Abstract:
In this paper we report the development of a new method for the evaluation of thin films mass thickness and composition based on the Energy Dispersive X-Ray Spectroscopy (EDS). The method exploits the theoretical calculation of the in-depth characteristic X-ray generation distribution function, $φ$/($ρ$ z), in multilayer samples, obtained by the numerical solution of the electron transport equatio…
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In this paper we report the development of a new method for the evaluation of thin films mass thickness and composition based on the Energy Dispersive X-Ray Spectroscopy (EDS). The method exploits the theoretical calculation of the in-depth characteristic X-ray generation distribution function, $φ$/($ρ$ z), in multilayer samples, obtained by the numerical solution of the electron transport equation, to achieve reliable measurements without the need of a reference sample and multiple voltages acquisitions. The electron transport model is derived from the Boltzmann transport equation and it exploits the most updated and reliable physical parameters in order to obtain an accurate description of the phenomenon. The method for the calculation of film mass thickness and composition is validated with benchmarks from standard techniques. In addition, a model uncertainty and sensitivity analysis is carried out and it indicates that the mass thickness accuracy is in the order of 10 $μ$g/cm$^2$, which is comparable to the nuclear standard techniques resolution. We show the technique peculiarities in one example measurement: two-dimensional mass thickness and composition profiles are obtained for a ultra-low density, high roughness, nanostructured film.
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Submitted 8 May, 2019; v1 submitted 11 January, 2019;
originally announced January 2019.
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Helium load on W-O coatings grown by pulsed laser deposition
Authors:
R. Mateus,
D. Dellasega,
M. Passoni,
Z. Siketić,
I. Bogdanović Radović,
A. Hakola,
E. Alves
Abstract:
W-O deposits with complex morphologies and significant He contents will growth on the surface of plasma facing components exposed to He discharges. To mimic the re/co-deposition process, W-O-He coatings were produced by implanting He+ ions on W films grown by pulsed laser deposition (PLD). The use of appropriate PLD experimental parameters such as Ar or He background atmospheres induces the deposi…
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W-O deposits with complex morphologies and significant He contents will growth on the surface of plasma facing components exposed to He discharges. To mimic the re/co-deposition process, W-O-He coatings were produced by implanting He+ ions on W films grown by pulsed laser deposition (PLD). The use of appropriate PLD experimental parameters such as Ar or He background atmospheres induces the deposition of porous or amorphous-like W-O structures, respectively. After multiple ion implantation stages using 150 keV, 100 keV and 50 keV incident He+ ion beams with a total fluence of 5 x 1017 ion/cm^2, significant amounts of He were identified in porous coatings by Rutherford backscattering (RBS). Time-of-flight elastic recoil detection (TOF-ERDA) measurements showed that most of the implanted He was already released from the porous coatings five month after implantation while for the case of amorphous ones the He content remains significant at deeper layers and smoothly decrease towards the surface, as result of a different morphology and nanostructure. The proposed method involving PLD and ion implantation seems adequate to produce W-O-He reference samples for fusion investigations.
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Submitted 17 December, 2018; v1 submitted 5 December, 2018;
originally announced December 2018.
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Tunable out-of-plane excitons in 2D single crystal perovskites
Authors:
A. Fieramosca,
L. De Marco,
M. Passoni,
L. Polimeno,
A. Rizzo,
B. L. T. Rosa,
G. Cruciani,
L. Dominici,
M. De Giorgi,
G. Gigli,
L. C. Andreani,
D. Gerace,
D. Ballarini,
D. Sanvitto
Abstract:
Hybrid organic-inorganic perovskites have emerged as very promising materials for photonic applications, thanks to the great synthetic versatility that allows to tune their optical properties. In the two-dimensional (2D) crystalline form, these materials behave as multiple quantum-well heterostructures with stable excitonic resonances up to room temperature. In this work strong light-matter coupli…
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Hybrid organic-inorganic perovskites have emerged as very promising materials for photonic applications, thanks to the great synthetic versatility that allows to tune their optical properties. In the two-dimensional (2D) crystalline form, these materials behave as multiple quantum-well heterostructures with stable excitonic resonances up to room temperature. In this work strong light-matter coupling in 2D perovskite single-crystal flakes is observed, and the polarization-dependent exciton-polariton response is used to disclose new excitonic features. For the first time, an out-of-plane component of the excitons is observed, unexpected for such 2D systems and completely absent in other layered materials, such as transition-metal dichalcogenides. By comparing different hybrid perovskites with the same inorganic layer but different organic interlayers, it is shown how the nature of the organic ligands controllably affects the out-of-plane exciton-photon coupling. Such vertical dipole coupling is particularly sought in those systems, e.g. plasmonic nanocavities, in which the direction of the field is usually orthogonal to the material sheet. Organic interlayers are shown to affect also the strong birefringence associated to the layered structure, which is exploited in this work to completely rotate the linear polarization degree in only few microns of propagation, akin to what happens in metamaterials.
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Submitted 2 November, 2018;
originally announced November 2018.
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Thermomechanical properties of amorphous metallic tungsten-oxygen and tungsten-oxide coatings
Authors:
Edoardo Besozzi,
David Dellasega,
Valeria Russo,
Matteo Passoni,
Marco Beghi
Abstract:
In this work, we investigate the correlation between morphology, composition, and the mechanical properties of metallic amorphous tungsten-oxygen and amorphous tungsten-oxide films deposited by Pulsed Laser Deposition. This correlation is investigated by the combined use of Brillouin Spectroscopy and the substrate curvature method. The stiffness of the films is strongly affected by both the oxygen…
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In this work, we investigate the correlation between morphology, composition, and the mechanical properties of metallic amorphous tungsten-oxygen and amorphous tungsten-oxide films deposited by Pulsed Laser Deposition. This correlation is investigated by the combined use of Brillouin Spectroscopy and the substrate curvature method. The stiffness of the films is strongly affected by both the oxygen content and the mass density. The elastic moduli show a decreasing trend as the mass density decreases and the oxygen-tungsten ratio increases. A plateaux region is detected in correspondence of the transition between metallic and oxide films. The compressive residual stresses, moderate stiffness and high local ductility that characterize compact amorphous tungsten-oxide films make them promising for applications involving thermal or mechanical loads. The coefficient of thermal expansion is quite high (i.e. 8.9 $\cdot$ 10$^{-6}$ K$^{-1}$), being strictly correlated to the amorphous structure and stoichiometry of the films. Under thermal treatments they show a quite low relaxation temperature (i.e. 450 K). They crystallize into the $γ$ monoclinic phase of WO$_3$ starting from 670 K, inducing an increase by about 70\% of material stiffness.
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Submitted 7 January, 2019; v1 submitted 2 October, 2018;
originally announced October 2018.
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Coefficient of thermal expansion of nanostructured tungsten based coatings assessed by thermally induced substrate curvature method
Authors:
E. Besozzi,
D. Dellasega,
A. Pezzoli,
A. Mantegazza,
M. Passoni,
M. G. Beghi
Abstract:
The in plane coefficient of thermal expansion (CTE) and the residual stress of nanostructured W based coatings are extensively investigated. The CTE and the residual stresses are derived by means of an optimized ad-hoc developed experimental setup based on the detection of the substrate curvature by a laser system. The nanostructured coatings are deposited by Pulsed Laser Deposition. Thanks to its…
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The in plane coefficient of thermal expansion (CTE) and the residual stress of nanostructured W based coatings are extensively investigated. The CTE and the residual stresses are derived by means of an optimized ad-hoc developed experimental setup based on the detection of the substrate curvature by a laser system. The nanostructured coatings are deposited by Pulsed Laser Deposition. Thanks to its versatility, nanocrystalline W metallic coatings, ultra-nano-crystalline pure W and W-Tantalum coatings and amorphous-like W coatings are obtained. The correlation between the nanostructure, the residual stress and the CTE of the coatings are thus elucidated. We find that all the samples show a compressive state of stress that decreases as the structure goes from columnar nanocrystalline to amorphous-like. The CTE of all the coatings is higher than the one of the corresponding bulk W form. In particular, as the grain size shrinks, the CTE increases from 5.1 10$^{-6}$ K$^{-1}$ for nanocrystalline W to 6.6 10$^{-6}$ K$^{-1}$ in the ultra-nano-crystalline region. When dealing with amorphous W, the further increase of the CTE is attributed to a higher porosity degree of the samples. The CTE trend is also investigated as function of materials stiffness. In this case, as W coatings become softer, the easier they thermally expand.
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Submitted 27 October, 2017; v1 submitted 23 October, 2017;
originally announced October 2017.
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Amorphous, ultra-nano- and nano-crystalline tungsten-based coatings grown by Pulsed Laser Deposition: mechanical characterization by Surface Brillouin Spectroscopy
Authors:
E. Besozzi,
D. Dellasega,
A. Pezzoli,
C. Conti,
M. Passoni,
M. G. Beghi
Abstract:
Pulsed Laser Deposition allows to obtain W and W-Ta alloy coatings with different nanostructures, monitored by X-ray diffraction. The correlation between such structures and the elastic properties is investigated for amorphous-like, ultra-nano- and nano-crystalline coatings obtained by tuning the gas pressure during deposition, annealing temperature and Ta concentration. The full elastic character…
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Pulsed Laser Deposition allows to obtain W and W-Ta alloy coatings with different nanostructures, monitored by X-ray diffraction. The correlation between such structures and the elastic properties is investigated for amorphous-like, ultra-nano- and nano-crystalline coatings obtained by tuning the gas pressure during deposition, annealing temperature and Ta concentration. The full elastic characterization is achieved by surface Brillouin spectroscopy, interpreted by isotropic and anisotropic film models. Amorphous like coatings are obtained with He pressures of tens of Pa. In comparison with bulk W, they have lower stiffness, by about 60\%, closely correlated to the mass density (lower by about 40\%). In the nanocrystalline regime the stiffness is more correlated to the average grain size, approaching the bulk values for increasing crystallite size. Vacuum annealing of amorphous like coatings leads to the nucleation of ultra-nano crystalline seeds, embedded in an amorphous matrix with intermediate values for mass density and stiffness. Here, the stiffness results from an interplay between the crystal size and the density. Alloying with Ta leads to properties which are consistent with the lever rule in the nanocrystalline regime, and deviate from it when the higher Ta concentration, interfering with crystal growth, induces an ultra-nano crystalline structure.
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Submitted 23 October, 2017; v1 submitted 20 October, 2017;
originally announced October 2017.
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Boron films produced by high energy Pulsed Laser Deposition
Authors:
David Dellasega,
Valeria Russo,
Andrea Pezzoli,
Claudia Conti,
Nora Lecis,
Edoardo Besozzi,
Marco Beghi,
Carlo E. Bottani,
Matteo Passoni
Abstract:
Micron-thick boron films have been deposited by Pulsed Laser Deposition in vacuum on several substrates at room temperature. The use of high energy pulses (>700 mJ) results in the deposition of smooth coatings with low oxygen uptake even at base pressures of 10$^{-4}$ - 10$^{-3}$ Pa. A detailed structural analysis, by X-Ray Diffraction and Raman, allowed to assess the amorphous nature of the depos…
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Micron-thick boron films have been deposited by Pulsed Laser Deposition in vacuum on several substrates at room temperature. The use of high energy pulses (>700 mJ) results in the deposition of smooth coatings with low oxygen uptake even at base pressures of 10$^{-4}$ - 10$^{-3}$ Pa. A detailed structural analysis, by X-Ray Diffraction and Raman, allowed to assess the amorphous nature of the deposited films as well as to determine the base pressure that prevents boron oxide formation. In addition the crystallization dynamics has been characterized showing that film crystallinity already improves at relatively low temperatures (800 °C). Elastic properties of the boron films have been determined by Brillouin spectroscopy. Finally, micro-hardness tests have been used to explore cohesion and hardness of B films deposited on aluminum, silicon and alumina. The reported deposition strategy allows the growth of reliable boron coatings paving the way for their use in many technology fields.
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Submitted 20 October, 2017; v1 submitted 19 October, 2017;
originally announced October 2017.
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Two-dimensional TiOx nanostructures on Au(111): a Scanning Tunneling Microscopy and Spectroscopy investigation
Authors:
F. Tumino,
P. Carrozzo,
L. Mascaretti,
C. S. Casari,
M. Passoni,
S. Tosoni,
C. E. Bottani,
A. Li Bassi
Abstract:
We investigated the growth of titanium oxide two-dimensional (2D) nanostructures on Au(111), produced by Ti evaporation and post-deposition oxidation. Scanning tunneling microscopy and spectroscopy (STM and STS) and low-energy electron diffraction (LEED) measurements characterized the morphological, structural and electronic properties of the observed structures. Five distinct TiO\sub{x} phases we…
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We investigated the growth of titanium oxide two-dimensional (2D) nanostructures on Au(111), produced by Ti evaporation and post-deposition oxidation. Scanning tunneling microscopy and spectroscopy (STM and STS) and low-energy electron diffraction (LEED) measurements characterized the morphological, structural and electronic properties of the observed structures. Five distinct TiO\sub{x} phases were identified: the \emph{honeycomb} and \emph{pinwheel} phases appear as monolayer films wetting the gold surface, while nanocrystallites of the \emph{triangular}, \emph{row} and \emph{needle} phases grow mainly over the honeycomb or pinwheel layers. Density Functional Theory (DFT) investigation of the honeycomb structure supports a $(2\times 2)$ structural model based on a Ti-O bilayer having $\text{Ti}_2\text{O}_3$ stoichiometry. The pinwheel phase was observed to evolve, for increasing coverage, from single triangular crystallites to a well-ordered film forming a $(4\sqrt{7}\times 4\sqrt{7})R19.1^\circ$ superstructure, which can be interpreted within a moirÃ\c{opyright}-like model. Structural characteristics of the other three phases were disclosed from the analysis of high-resolution STM measurements. STS measurements revealed a partial metallization of honeycomb and pinwheel and a semiconducting character of row and triangular phases.
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Submitted 8 September, 2015;
originally announced September 2015.
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Direct observation of the basic mechanisms of Pd island nucleation on Au(111)
Authors:
C. S. Casari,
S. Foglio,
F. Siviero,
A. Li Bassi,
M. Passoni,
C. E. Bottani
Abstract:
The formation mechanisms of evaporated Pd islands on the reconstructed Au(111) $22 /times /sqrt{3}$ herringbone surface have been here studied by Scanning Tunneling Microscopy (STM) at room temperature. Atomically resolved STM images at the very early stages of growth provide a direct observation of the mechanisms involved in preferential Pd islands nucleation at the elbows of the herringbone st…
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The formation mechanisms of evaporated Pd islands on the reconstructed Au(111) $22 /times /sqrt{3}$ herringbone surface have been here studied by Scanning Tunneling Microscopy (STM) at room temperature. Atomically resolved STM images at the very early stages of growth provide a direct observation of the mechanisms involved in preferential Pd islands nucleation at the elbows of the herringbone structure. At low Pd coverage the Au(111) herringbone structure remains substantially unperturbed and isolated Pd atoms settled in hollow sites between Au atoms are found nearby the elbows and the distortions of the reconstructed surface. In the same regions, at extremely low coverage (0.003 ML), substituted Pd atoms in lattice sites of the Au(111) surface are also observed, revealing the occurrence of a place exchange mechanism. Substitution seems to play a fundamental role in the nucleation process, forming aggregation centers for incoming atoms and thus leading to the ordered growth of Pd islands on Au(111). Atomically resolved STM images of Pd islands reveal a close-packed arrangement with lattice parameter close to the interatomic distance between gold atoms in the fcc regions of the Au(111) surface. Distortion of the herringbone structure for Pd coverages higher than 0.25 ML indicates strong interaction between the growing islands and the topmost Au(111) layer.
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Submitted 22 September, 2009; v1 submitted 19 November, 2008;
originally announced November 2008.
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Bulk Cr tips for scanning tunneling microscopy and spin-polarized scanning tunneling microscopy
Authors:
A. Li Bassi,
C. S. Casari,
D. Cattaneo,
F. Donati,
S. Foglio,
M. Passoni,
C. E. Bottani,
P. Biagioni,
A. Brambilla,
M. Finazzi,
F. Ciccacci,
L. Duo'
Abstract:
A simple, reliable method for preparation of bulk Cr tips for Scanning Tunneling Microscopy (STM) is proposed and its potentialities in performing high-quality and high-resolution STM and Spin Polarized-STM (SP-STM) are investigated. Cr tips show atomic resolution on ordered surfaces. Contrary to what happens with conventional W tips, rest atoms of the Si(111)-7x7 reconstruction can be routinely…
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A simple, reliable method for preparation of bulk Cr tips for Scanning Tunneling Microscopy (STM) is proposed and its potentialities in performing high-quality and high-resolution STM and Spin Polarized-STM (SP-STM) are investigated. Cr tips show atomic resolution on ordered surfaces. Contrary to what happens with conventional W tips, rest atoms of the Si(111)-7x7 reconstruction can be routinely observed, probably due to a different electronic structure of the tip apex. SP-STM measurements of the Cr(001) surface showing magnetic contrast are reported. Our results reveal that the peculiar properties of these tips can be suited in a number of STM experimental situations.
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Submitted 29 October, 2007; v1 submitted 17 September, 2007;
originally announced September 2007.
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Different W cluster deposition regimes in pulsed laser ablation observed by in situ Scanning Tunneling Microscopy
Authors:
D. Cattaneo,
S. Foglio,
C. S. Casari,
A. Li Bassi,
M. Passoni,
C. E. Bottani
Abstract:
We report on how different cluster deposition regimes can be obtained and observed by in situ Scanning Tunneling Microscopy (STM) by exploiting deposition parameters in a pulsed laser deposition (PLD) process. Tungsten clusters were produced by nanosecond Pulsed Laser Ablation in Ar atmosphere at different pressures and deposited on Au(111) and HOPG surfaces. Deposition regimes including cluster…
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We report on how different cluster deposition regimes can be obtained and observed by in situ Scanning Tunneling Microscopy (STM) by exploiting deposition parameters in a pulsed laser deposition (PLD) process. Tungsten clusters were produced by nanosecond Pulsed Laser Ablation in Ar atmosphere at different pressures and deposited on Au(111) and HOPG surfaces. Deposition regimes including cluster deposition-diffusion-aggregation (DDA), cluster melting and coalescence and cluster implantation were observed, depending on background gas pressure and target-to-substrate distance which influence the kinetic energy of the ablated species. These parameters can thus be easily employed for surface modification by cluster bombardment, deposition of supported clusters and growth of films with different morphologies. The variation in cluster mobility on different substrates and its influence on aggregation and growth mechanisms has also been investigated.
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Submitted 20 February, 2007;
originally announced February 2007.
