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Performance Improvement of Graphenic Carbon X-ray Transmission Windows
Authors:
Sebastian Huebner,
Natsuki Miyakawa,
Andreas Pahlke,
Franz Kreupl
Abstract:
Graphenic carbon (GC) x-ray transmission windows for EDX and XRF applications with a high transparency for x-rays below 2.5 keV have been fabricated on 6 inch wafers with a CMOS-compatible CVD process. GC windows with an open diameter of 7.4 mm and a thickness of 770 nm withstand up to 6.5 bars of differential pressure. A high transmissivity of 40 % for fluorine Kα (0.677 keV) radiation is demonst…
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Graphenic carbon (GC) x-ray transmission windows for EDX and XRF applications with a high transparency for x-rays below 2.5 keV have been fabricated on 6 inch wafers with a CMOS-compatible CVD process. GC windows with an open diameter of 7.4 mm and a thickness of 770 nm withstand up to 6.5 bars of differential pressure. A high transmissivity of 40 % for fluorine Kα (0.677 keV) radiation is demonstrated for a GC thickness of 650 nm. The GC membranes outperform beryllium (Be) windows, in terms of higher x-ray transmission and better mechanical stability while avoiding the toxicity of Be. Optical profilometry has been employed to visualize a large deformation of the GC layer during the window fabrication. This seems to limit the thickness of the GC windows that can currently be fabricated. A two-step growth process can overcome these limitations and windows with a thickness of up to 6 μm have been realized.
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Submitted 15 March, 2016;
originally announced March 2016.
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Design and properties of low energy x-ray transmission windows based on graphenic carbon
Authors:
Sebastian Huebner,
Natsuki Miyakawa,
Andreas Pahlke,
Franz Kreupl
Abstract:
X-ray transmission windows for the low energy range, especially between 0.1 keV and 1 keV have been designed and fabricated based on graphenic carbon (GC) with an integrated silicon frame. A hexagonal and a bar grid support structure design have been evaluated. The bar grid design allows to substitute polymer-based windows with the advantages of higher transmission, better rejection of visible lig…
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X-ray transmission windows for the low energy range, especially between 0.1 keV and 1 keV have been designed and fabricated based on graphenic carbon (GC) with an integrated silicon frame. A hexagonal and a bar grid support structure design have been evaluated. The bar grid design allows to substitute polymer-based windows with the advantages of higher transmission, better rejection of visible light and vacuum operability of the encapsulated silicon drift detectors (SDD). In addition, the high mechanical resilience of graphenic carbon is demonstrated by pressure cycle tests, yielding over 10 million cycles without damage. The data are complemented by bulge tests to determine a Young`s modulus for graphenic carbon of approximately 130 GPa. Additional finite-element simulation and Raman studies reveal that the mechanical stress is not homogeneously distributed, but reaches a maximum near the anchoring points of the free standing graphenic carbon membrane.
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Submitted 5 November, 2015;
originally announced November 2015.
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High Performance X-Ray Transmission Windows Based on Graphenic Carbon
Authors:
Sebastian Huebner,
Natsuki Miyakawa,
Stefan Kapser,
Andreas Pahlke,
Franz Kreupl
Abstract:
A novel x-ray transmission window based on graphenic carbon has been developed with superior performance compared to beryllium transmission windows that are currently used in the field. Graphenic carbon in combination with an integrated silicon frame allows for a window design which does not use a mechanical support grid or additional light blocking layers. Compared to beryllium, the novel x-ray t…
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A novel x-ray transmission window based on graphenic carbon has been developed with superior performance compared to beryllium transmission windows that are currently used in the field. Graphenic carbon in combination with an integrated silicon frame allows for a window design which does not use a mechanical support grid or additional light blocking layers. Compared to beryllium, the novel x-ray transmission window exhibits an improved transmission in the low energy region ($0.1 hbox{keV}-3 hbox{keV}$ ) while demonstrating excellent mechanical stability, as well as light and vacuum tightness. Therefore, the newly established graphenic carbon window, can replace beryllium in x-ray transmission windows with a nontoxic and abundant material. Index terms: Beryllium, Carbon, Graphene, Thin films, X-ray applications, X-ray detectors
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Submitted 10 March, 2015;
originally announced March 2015.
