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Ultrashort Pulse Laser Annealing of Amorphous Atomic Layer Deposited MoS$_2$ Films
Authors:
Malte J. M. J. Becher,
Julia Jagosz,
Rahel-Manuela Neubieser,
Jan-Lucas Wree,
Anjana Devi,
Marvin Michel,
Claudia Bock,
Evgeny L. Gurevich,
Andreas Ostendorf
Abstract:
Thin films of molybendum disulfide grown via thermal atomic layer deposition at low temperatures, suitable for temperature sensible substrates, can be amorphous. To avoid a high temperature post treatment of the whole sample, which can cause thermal degradation of the substrate or other layers, a ultrashort pulse (usp) laser-induced transformation to crystalline layers is one of the most promising…
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Thin films of molybendum disulfide grown via thermal atomic layer deposition at low temperatures, suitable for temperature sensible substrates, can be amorphous. To avoid a high temperature post treatment of the whole sample, which can cause thermal degradation of the substrate or other layers, a ultrashort pulse (usp) laser-induced transformation to crystalline layers is one of the most promising routes. In this paper we report the crystallization of amorphous MoS$_2$ layers processed with ultrashort laser pulses. The amorphous MoS$_2$ films were deposited by atomic layer deposition (ALD) and exposed to picosecond laser pulses ($λ= 532$ nm). The crystallization and the influence of the processing parameters on the film morphology were analyzed in detail by Raman spectroscopy and scanning electron microscopy. Furthermore, a transition of amorphous MoS$_2$ by laser annealing to self-organized patterns is demonstrated and a possible process mechanism for the ultrashort pulse laser annealing is discussed. Finally, the usp laser annealed films were compared to thermally and continuous wave (cw) laser annealed samples.
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Submitted 18 May, 2023;
originally announced May 2023.
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Studies on ultra-short pulsed laser shock peening of stainless-steel in different confinement media
Authors:
Kishore Elango,
Jan S. Hoppius,
Lalit M. Kukreja,
Andreas Ostendorf,
Evgeny L. Gurevich
Abstract:
Laser Shock Peening (LSP) of stainless-steel 316 and 316L was studied using Ti: Sapphire laser pulses of about 2 ps duration, maximum energy of about 1mJ and pulse repetition rate of 5kHz in different liquid confinement media of Ethanol, Deionized water and separate aqueous solutions of NaCl and Glycerol. It is found that the laser fluence and/or energy attenuating mechanisms like self-focusing, f…
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Laser Shock Peening (LSP) of stainless-steel 316 and 316L was studied using Ti: Sapphire laser pulses of about 2 ps duration, maximum energy of about 1mJ and pulse repetition rate of 5kHz in different liquid confinement media of Ethanol, Deionized water and separate aqueous solutions of NaCl and Glycerol. It is found that the laser fluence and/or energy attenuating mechanisms like self-focusing, filamentation, plasma breakdown in the confinement media are less significant with ps laser pulses than those with sub-ps or fs pulse durations. It is shown that the resulting surface hardness of the peened steel as a function of laser fluence depends significantly on the confinement media and the relative increase in the hardness increases monotonically with the acoustic impedance of the liquid of the confinement medium used during LSP.
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Submitted 27 August, 2019;
originally announced August 2019.
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Femtosecond laser patterning of graphene electrodes for thin-film transistors
Authors:
Maren Kasischke,
Ersoy Subaşı,
Claudia Bock,
Duy-Vu Pham,
Evgeny L. Gurevich,
Ulrich Kunze,
Andreas Ostendorf
Abstract:
The aim of this study is to assess femtosecond laser patterning of graphene in air and in vacuum for the application as source and drain electrodes in thin-film transistors (TFTs). The analysis of the laser-patterned graphene with scanning electron microscopy, atomic force microscopy and Raman spectroscopy showed that processing in vacuum leads to less debris formation and thus re-deposited carbon…
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The aim of this study is to assess femtosecond laser patterning of graphene in air and in vacuum for the application as source and drain electrodes in thin-film transistors (TFTs). The analysis of the laser-patterned graphene with scanning electron microscopy, atomic force microscopy and Raman spectroscopy showed that processing in vacuum leads to less debris formation and thus re-deposited carbonaceous material on the sample compared to laser processing in air. It was found that the debris reduction due to patterning in vacuum improves the TFT characteristics significantly. Hysteresis disappears, the mobility is enhanced by an order of magnitude and the subthreshold swing is reduced from $S_{sub}~=~2.5~\mbox{V/dec}$ to $S_{sub}~=~1.5~\mbox{V/dec}$.
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Submitted 29 January, 2019;
originally announced January 2019.
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Femtosecond laser crystallization of amorphous titanium oxide thin films
Authors:
Jan S. Hoppius,
Danny Bialuschewski,
Sanjay Mathur,
Andreas Ostendorf,
Evgeny L. Gurevich
Abstract:
In this paper we demonstrate experimentally that crystalline phases appear in amorphous titanium oxide upon processing with ultrafast laser pulses. Amorphous titanium thin films were produced by plasma-enhanced chemical vapor deposition (PECVD) and exposed to femtosecond laser pulses. Formation of rutile phase was confirmed by X-ray diffraction, Raman measurements and electron backscattering diffr…
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In this paper we demonstrate experimentally that crystalline phases appear in amorphous titanium oxide upon processing with ultrafast laser pulses. Amorphous titanium thin films were produced by plasma-enhanced chemical vapor deposition (PECVD) and exposed to femtosecond laser pulses. Formation of rutile phase was confirmed by X-ray diffraction, Raman measurements and electron backscattering diffraction. A rang of processing parameters for the crystallization is reported and possible background mechanisms are discussed.
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Submitted 15 August, 2018;
originally announced August 2018.
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Wavelength Dependence of Picosecond Laser-Induced Periodic Surface Structures on Copper
Authors:
Stella Maragkaki,
Thibault J. -Y. Derrien,
Yoann Levy,
Nadezhda M. Bulgakova,
Andreas Ostendorf,
Evgeny L. Gurevich
Abstract:
The physical mechanisms of the laser-induced periodic surface structures (LIPSS) formation are studied in this paper for single-pulse irradiation regimes. The change in the LIPSS period with wavelength of incident laser radiation is investigated experimentally, using a picosecond laser system, which provides 7-ps pulses in near-IR, visible, and UV spectral ranges. The experimental results are comp…
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The physical mechanisms of the laser-induced periodic surface structures (LIPSS) formation are studied in this paper for single-pulse irradiation regimes. The change in the LIPSS period with wavelength of incident laser radiation is investigated experimentally, using a picosecond laser system, which provides 7-ps pulses in near-IR, visible, and UV spectral ranges. The experimental results are compared with predictions made under the assumption that the surface-scattered waves are involved in the LIPSS formation. Considerable disagreement suggests that hydrodynamic mechanisms can be responsible for the observed pattern periodicity.
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Submitted 13 February, 2017;
originally announced February 2017.
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Choice of the uncritical manifold for dilute polymer solutions
Authors:
Andrea Ostendorf,
Johannes S. Hager
Abstract:
We discuss the dependence of the results of renormalized perturbation theory for dilute polymer solutions on the choice of the uncritical manifold where the perturbation series are evaluated. Special emphasis is given to the influence of polydispersity corrections on the results of one and two loop calculations. For monodisperse solutions we establish that after a Borel resummation the dependenc…
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We discuss the dependence of the results of renormalized perturbation theory for dilute polymer solutions on the choice of the uncritical manifold where the perturbation series are evaluated. Special emphasis is given to the influence of polydispersity corrections on the results of one and two loop calculations. For monodisperse solutions we establish that after a Borel resummation the dependence on the choice of the uncritical manifold decreases when higher orders of the expansion are taken into account.
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Submitted 21 December, 2004;
originally announced December 2004.