Smart sensing of the multifunctional properties of magnetron sputtered $MoS_2$ across the amorphous-crystalline transition
Authors:
Jose L. Ocana-Pujol,
Rebecca A. Gallivan,
Ramon Camilo Dominguez Ordoñez,
Nikolaus Porenta,
Arnold Müller,
Christof Vockenhuber,
Ralph Spolenak,
Henning Galinski
Abstract:
Molybdenum disulfide, $MoS_2$, is a next-generation semiconductor and is frequently integrated into emergent optoelectronic technologies based on two-dimensional materials. Here, we present a method that provides direct optical feedback on the thickness and crystallinity of sputter-deposited $MoS_2$ down to the few-layer regime. This smart sensing enables tracking the material's functional propert…
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Molybdenum disulfide, $MoS_2$, is a next-generation semiconductor and is frequently integrated into emergent optoelectronic technologies based on two-dimensional materials. Here, we present a method that provides direct optical feedback on the thickness and crystallinity of sputter-deposited $MoS_2$ down to the few-layer regime. This smart sensing enables tracking the material's functional properties, such as excitonic response, sheet resistance, and hardness across the amorphous-crystalline transition. To illustrate the potential of such feedback-controlled fabrication, we realized $MoS_2$-based hyperbolic metamaterials (HMM) with controllable optical topological transitions and hardness.
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Submitted 19 December, 2023; v1 submitted 15 December, 2023;
originally announced December 2023.