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A foundry-fabricated spin qubit unit cell with in-situ dispersive readout
Authors:
Pierre Hamonic,
Mathieu Toubeix,
Guillermo Haas,
Jayshankar Nath,
Matthieu C. Dartiailh,
Biel Martinez,
Benoit Bertrand,
Heimanu Niebojewski,
Maud Vinet,
Christopher Bäuerle,
Franck Balestro,
Tristan Meunier,
Matias Urdampilleta
Abstract:
Spin qubits based on semiconductor quantum dots are a promising prospect for quantum computation because of their high coherence times and gate fidelities. However, scaling up those structures to the numbers required by fault-tolerant quantum computing is currently hampered by a number of issues. One of the main issues is the need for single-shot low-footprint qubit readout. Here, we demonstrate t…
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Spin qubits based on semiconductor quantum dots are a promising prospect for quantum computation because of their high coherence times and gate fidelities. However, scaling up those structures to the numbers required by fault-tolerant quantum computing is currently hampered by a number of issues. One of the main issues is the need for single-shot low-footprint qubit readout. Here, we demonstrate the single-shot in situ measurement of a compact qubit unit-cell. The unit cell is composed of two electron spins with a controllable exchange interaction. We report initialization, single-shot readout and two-electron entangling gate. The unit cell was successfully operated at up to 1 K, with state-of-the-art charge noise levels extracted using free induction decay. With its integrated readout and high stability, this foundry fabricated qubit unit cell demonstrates strong potential for scalable quantum computing architectures.
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Submitted 29 April, 2025;
originally announced April 2025.
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Coherence of a hole spin flopping-mode qubit in a circuit quantum electrodynamics environment
Authors:
Léo Noirot,
Cécile X. Yu,
José C. Abadillo-Uriel,
Étienne Dumur,
Heimanu Niebojewski,
Benoit Bertrand,
Romain Maurand,
Simon Zihlmann
Abstract:
The entanglement of microwave photons and spin qubits in silicon represents a pivotal step forward for quantum information processing utilizing semiconductor quantum dots. Such hybrid spin circuit quantum electrodynamics (cQED) has been achieved by granting a substantial electric dipole moment to a spin by de-localizing it in a double quantum dot under spin-orbit interaction, thereby forming a flo…
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The entanglement of microwave photons and spin qubits in silicon represents a pivotal step forward for quantum information processing utilizing semiconductor quantum dots. Such hybrid spin circuit quantum electrodynamics (cQED) has been achieved by granting a substantial electric dipole moment to a spin by de-localizing it in a double quantum dot under spin-orbit interaction, thereby forming a flopping-mode (FM) spin qubit. Despite its promise, the coherence properties demonstrated to date remain insufficient to envision FM spin qubits as practical single qubits. Here, we present a FM hole spin qubit in a silicon nanowire coupled to a high-impedance niobium nitride microwave resonator for readout. We report Rabi frequencies exceeding 100 MHz and coherence times in the microsecond range, resulting in a high single gate quality factor of 380. This establishes FM spin qubits as fast and reliable qubits. Moreover, using the large frequency tunability of the FM qubit, we reveal for the first time that photonic effects predominantly limit coherence, with radiative decay being the main relaxation channel and photon shot-noise inducing dephasing. These results highlight that optimized microwave engineering can unlock the potential of FM spin qubits in hybrid cQED architectures, offering a scalable and robust platform for fast and coherent spin qubits with strong coupling to microwave photons.
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Submitted 13 March, 2025;
originally announced March 2025.
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Transport characterization and quantum dot coupling in commercial 22FDX
Authors:
Giselle A. Elbaz,
Pierre-Louis Julliard,
Mikaël Cassé,
Heimanu Niebojewski,
Benoit Bertrand,
Grégoire Roussely,
Valentin Labracherie,
Maud Vinet,
Tristan Meunier,
Bruna Cardoso Paz
Abstract:
Different groups worldwide have been working with the GlobalFoundries 22nm platform (22FDX) with the hopes of industrializing the fabrication of Si spin qubits. To guide this effort, we have performed a systematic study of six of the foundry's processes of reference (POR). Using effective mobility as a figure of merit, we study the impact of gate stack, channel type and back bias as a function of…
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Different groups worldwide have been working with the GlobalFoundries 22nm platform (22FDX) with the hopes of industrializing the fabrication of Si spin qubits. To guide this effort, we have performed a systematic study of six of the foundry's processes of reference (POR). Using effective mobility as a figure of merit, we study the impact of gate stack, channel type and back bias as a function of temperature. This screening process selected qubit devices that allowed us to couple quantum dots along both the length and width of the Si channel. We present stability diagrams with clear and regular honeycomb patterns, where spurious elements such as dopants are not observed. By combining these results with room and low temperature simulations, we provide insights into potential technology optimizations and show both the utility of qubit pre-screening protocols as well as the advantages of leveraging forward body bias within an FDSOI (Fully Depleted Silicon-On-Insulator) qubit platform.
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Submitted 17 January, 2025;
originally announced January 2025.
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Optimal operation of hole spin qubits
Authors:
Marion Bassi,
Esteban-Alonso Rodrıguez-Mena,
Boris Brun,
Simon Zihlmann,
Thanh Nguyen,
Victor Champain,
José Carlos Abadillo-Uriel,
Benoit Bertrand,
Heimanu Niebojewski,
Romain Maurand,
Yann-Michel Niquet,
Xavier Jehl,
Silvano De Franceschi,
Vivien Schmitt
Abstract:
Hole spins in silicon or germanium quantum dots have emerged as a compelling solid-state platform for scalable quantum processors. Besides relying on well-established manufacturing technologies, hole-spin qubits feature fast, electric-field-mediated control stemming from their intrinsically large spin-orbit coupling [1, 2]. This key feature is accompanied by an undesirable susceptibility to charge…
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Hole spins in silicon or germanium quantum dots have emerged as a compelling solid-state platform for scalable quantum processors. Besides relying on well-established manufacturing technologies, hole-spin qubits feature fast, electric-field-mediated control stemming from their intrinsically large spin-orbit coupling [1, 2]. This key feature is accompanied by an undesirable susceptibility to charge noise, which usually limits qubit coherence. Here, by varying the magnetic-field orientation, we experimentally establish the existence of ``sweetlines'' in the polar-azimuthal manifold where the qubit is insensitive to charge noise. In agreement with recent predictions [3], we find that the observed sweetlines host the points of maximal driving efficiency, where we achieve fast Rabi oscillations with quality factors as high as 1200. Furthermore, we demonstrate that moderate adjustments in gate voltages can significantly shift the sweetlines. This tunability allows multiple qubits to be simultaneously made insensitive to electrical noise, paving the way for scalable qubit architectures that fully leverage all-electrical spin control. The conclusions of this experimental study, performed on a silicon metal-oxide-semiconductor device, are expected to apply to other implementations of hole spin qubits.
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Submitted 17 December, 2024;
originally announced December 2024.
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Parametric longitudinal coupling of a semiconductor charge qubit and a RF resonator
Authors:
Victor Champain,
Simon Zihlmann,
Alessandro Chessari,
Benoit Bertrand,
Heimanu Niebojewski,
Etienne Dumur,
Xavier Jehl,
Vivien Schmitt,
Boris Brun,
Clemens Winkelmann,
Yann-Michel Niquet,
Michele Filippone,
Silvano De Franceschi,
Romain Maurand
Abstract:
In this study, we provide a full experimental characterization of the parametric longitudinal coupling between a CMOS charge qubit and an off-chip RF resonator. Following Corrigan et al, Phys. Rev. Applied 20, 064005 (2023), we activate parametric longitudinal coupling by driving the charge qubit at the resonator frequency. Managing the crosstalk between the drive applied to the qubit and the reso…
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In this study, we provide a full experimental characterization of the parametric longitudinal coupling between a CMOS charge qubit and an off-chip RF resonator. Following Corrigan et al, Phys. Rev. Applied 20, 064005 (2023), we activate parametric longitudinal coupling by driving the charge qubit at the resonator frequency. Managing the crosstalk between the drive applied to the qubit and the resonator allows for the systematic study of the dependence of the longitudinal and dispersive charge-photon couplings on the qubit-resonator detuning and the applied drive. Our experimental estimations of the charge-photon couplings are perfectly reproduced by theoretical simple formulas, without relying on any fitting parameter. We go further by showing a parametric displacement of the resonator's steady state, conditional on the qubit state, and the insensitivity of the longitudinal coupling constant on the photon population of the resonator. Our results open to the exploration of the photon-mediated longitudinal readout and coupling of multiple and distant spins, with long coherent times, in hybrid CMOS cQED architectures.
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Submitted 26 October, 2024;
originally announced October 2024.
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Combining multiplexed gate-based readout and isolated CMOS quantum dot arrays
Authors:
Pierre Hamonic,
Martin Nurizzo,
Jayshankar Nath,
Matthieu C. Dartiailh,
Victor El-Homsy,
Mathis Fragnol,
Biel Martinez,
Pierre-Louis Julliard,
Bruna Cardoso Paz,
Mathilde Ouvrier-Buffet,
Jean-Baptiste Filippini,
Benoit Bertrand,
Heimanu Niebojewski,
Christopher Bäuerle,
Maud Vinet,
Franck Balestro,
Tristan Meunier,
Matias Urdampilleta
Abstract:
Semiconductor quantum dot arrays are a promising platform to perform spin-based error-corrected quantum computation with large numbers of qubits. However, due to the diverging number of possible charge configurations combined with the limited sensitivity of large-footprint charge sensors, achieving single-spin occupancy in each dot in a growing quantum dot array is exceedingly complex. Therefore,…
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Semiconductor quantum dot arrays are a promising platform to perform spin-based error-corrected quantum computation with large numbers of qubits. However, due to the diverging number of possible charge configurations combined with the limited sensitivity of large-footprint charge sensors, achieving single-spin occupancy in each dot in a growing quantum dot array is exceedingly complex. Therefore, to scale-up a spin-based architecture we must change how individual charges are readout and controlled. Here, we demonstrate single-spin occupancy of each dot in a foundry-fabricated array by combining two methods. 1/ Loading a finite number of electrons into the quantum dot array; simplifying electrostatic tuning by isolating the array from the reservoirs. 2/ Deploying multiplex gate-based reflectometry to dispersively probe charge tunneling and spin states without charge sensors or reservoirs. Our isolated arrays probed by embedded multiplex readout can be readily electrostatically tuned. They are thus a viable, scalable approach for spin-based quantum architectures.
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Submitted 3 October, 2024;
originally announced October 2024.
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Real-time milli-Kelvin thermometry in a semiconductor qubit architecture
Authors:
Victor Champain,
Vivien Schmitt,
Benoit Bertrand,
Heimanu Niebojewski,
Romain Maurand,
Xavier Jehl,
Clemens Winkelmann,
Silvano De Franceschi,
Boris Brun
Abstract:
We report local time-resolved thermometry in a silicon nanowire quantum dot device designed to host a linear array of spin qubits. Using two alternative measurement schemes based on rf reflectometry, we are able to probe either local electron or phonon temperatures with $μ$s-scale time resolution and a noise equivalent temperature of $3$ $\rm mK/\sqrt{\rm Hz}$. Following the application of short m…
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We report local time-resolved thermometry in a silicon nanowire quantum dot device designed to host a linear array of spin qubits. Using two alternative measurement schemes based on rf reflectometry, we are able to probe either local electron or phonon temperatures with $μ$s-scale time resolution and a noise equivalent temperature of $3$ $\rm mK/\sqrt{\rm Hz}$. Following the application of short microwave pulses, causing local periodic heating, time-dependent thermometry can track the dynamics of thermal excitation and relaxation, revealing clearly different characteristic time scales. This work opens important prospects to investigate the out-of-equilibrium thermal properties of semiconductor quantum electronic devices operating at very low temperature. In particular, it may provide a powerful handle to understand heating effects recently observed in semiconductor spin-qubit systems.
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Submitted 20 June, 2024; v1 submitted 24 August, 2023;
originally announced August 2023.
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Broadband parametric amplification for multiplexed SiMOS quantum dot signals
Authors:
Victor Elhomsy,
Luca Planat,
David J. Niegemann,
Bruna Cardoso-Paz,
Ali Badreldin,
Bernhard Klemt,
Vivien Thiney,
Renan Lethiecq,
Eric Eyraud,
Matthieu C. Dartiailh,
Benoit Bertrand,
Heimanu Niebojewski,
Christopher Bäuerle,
Maud Vinet,
Tristan Meunier,
Nicolas Roch,
Matias Urdampilleta
Abstract:
Spins in semiconductor quantum dots hold great promise as building blocks of quantum processors. Trapping them in SiMOS transistor-like devices eases future industrial scale fabrication. Among the potentially scalable readout solutions, gate-based dispersive radiofrequency reflectometry only requires the already existing transistor gates to readout a quantum dot state, relieving the need for addit…
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Spins in semiconductor quantum dots hold great promise as building blocks of quantum processors. Trapping them in SiMOS transistor-like devices eases future industrial scale fabrication. Among the potentially scalable readout solutions, gate-based dispersive radiofrequency reflectometry only requires the already existing transistor gates to readout a quantum dot state, relieving the need for additional elements. In this effort towards scalability, traveling-wave superconducting parametric amplifiers significantly enhance the readout signal-to-noise ratio (SNR) by reducing the noise below typical cryogenic low-noise amplifiers, while offering a broad amplification band, essential to multiplex the readout of multiple resonators. In this work, we demonstrate a 3GHz gate-based reflectometry readout of electron charge states trapped in quantum dots formed in SiMOS multi-gate devices, with SNR enhanced thanks to a Josephson traveling-wave parametric amplifier (JTWPA). The broad, tunable 2GHz amplification bandwidth combined with more than 10dB ON/OFF SNR improvement of the JTWPA enables frequency and time division multiplexed readout of interdot transitions, and noise performance near the quantum limit. In addition, owing to a design without superconducting loops and with a metallic ground plane, the JTWPA is flux insensitive and shows stable performances up to a magnetic field of 1.2T at the quantum dot device, compatible with standard SiMOS spin qubit experiments.
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Submitted 2 August, 2023; v1 submitted 27 July, 2023;
originally announced July 2023.
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A new FDSOI spin qubit platform with 40nm effective control pitch
Authors:
T. Bédécarrats,
B. Cardoso Paz,
B. Martinez Diaz,
H. Niebojewski,
B. Bertrand1,
N. Rambal,
C. Comboroure,
A. Sarrazin,
F. Boulard,
E. Guyez,
J. -M. Hartmann,
Y. Morand,
A. Magalhaes-Lucas,
E. Nowak,
E. Catapano,
M. Cassé,
M. Urdampilleta,
Y. -M. Niquet,
F. Gaillard,
S. De Franceschi,
T. Meunier,
M. Vinet
Abstract:
Operating Si quantum dot (QD) arrays requires homogeneous and ultra-dense structures with aggressive gate pitch. Such a density is necessary to separately control the QDs chemical potential (i.e. charge occupation of each QD) from the exchange interaction (i.e. tunnel barriers between each QD). We present here a novel Si quantum device integration that halves the effective gate pitch and provides…
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Operating Si quantum dot (QD) arrays requires homogeneous and ultra-dense structures with aggressive gate pitch. Such a density is necessary to separately control the QDs chemical potential (i.e. charge occupation of each QD) from the exchange interaction (i.e. tunnel barriers between each QD). We present here a novel Si quantum device integration that halves the effective gate pitch and provides full controllability in 1D FDSOI QD arrays. The major advantages of this architecture are explored through numerical simulations. Functionality of the fabricated structure is validated via 300K statistical electrical characterization, while tunnel-coupling control is demonstrated at cryogenic temperature.
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Submitted 7 April, 2023;
originally announced April 2023.
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Electrical manipulation of a single electron spin in CMOS with micromagnet and spin-valley coupling
Authors:
Bernhard Klemt,
Victor El-Homsy,
Martin Nurizzo,
Pierre Hamonic,
Biel Martinez,
Bruna Cardoso Paz,
Cameron spence,
Matthieu Dartiailh,
Baptiste Jadot,
Emmanuel Chanrion,
Vivien Thiney,
Renan Lethiecq,
Benoit Bertrand,
Heimanu Niebojewski,
Christopher Bäuerle,
Maud Vinet,
Yann-Michel Niquet,
Tristan Meunier,
Matias Urdampilleta
Abstract:
For semiconductor spin qubits, complementary-metal-oxide-semiconductor (CMOS) technology is the ideal candidate for reliable and scalable fabrication. Making the direct leap from academic fabrication to qubits fabricated fully by industrial CMOS standards is difficult without intermediate solutions. With a flexible back-end-of-line (BEOL) new functionalities such as micromagnets or superconducting…
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For semiconductor spin qubits, complementary-metal-oxide-semiconductor (CMOS) technology is the ideal candidate for reliable and scalable fabrication. Making the direct leap from academic fabrication to qubits fabricated fully by industrial CMOS standards is difficult without intermediate solutions. With a flexible back-end-of-line (BEOL) new functionalities such as micromagnets or superconducting circuits can be added in a post-CMOS process to study the physics of these devices or achieve proof of concepts. Once the process is established it can be incorporated in the foundry-compatible process flow. Here, we study a single electron spin qubit in a CMOS device with a micromagnet integrated in the flexible BEOL. We exploit the synthetic spin orbit coupling (SOC) to control the qubit via electric field and we investigate the spin-valley physics in the presence of SOC where we show an enhancement of the Rabi frequency at the spin-valley hotspot. Finally, we probe the high frequency noise in the system using dynamical decoupling pulse sequences and demonstrate that charge noise dominates the qubit decoherence in this range.
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Submitted 8 March, 2023;
originally announced March 2023.
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Parity and singlet-triplet high fidelity readout in a silicon double quantum dot at 0.5 K
Authors:
David J. Niegemann,
Victor El-Homsy,
Baptiste Jadot,
Martin Nurizzo,
Bruna Cardoso-Paz,
Emmanuel Chanrion,
Matthieu Dartiailh,
Bernhard Klemt,
Vivien Thiney,
Christopher Bäuerle,
Pierre-André Mortemousque,
Benoit Bertrand,
Heimanu Niebojewski,
Maud Vinet,
Franck Balestro,
Tristan Meunier,
Matias Urdampilleta
Abstract:
We demonstrate singlet-triplet readout and parity readout allowing to distinguish T0 and the polarized triplet states. We achieve high fidelity spin readout with an average fidelity above $99.9\%$ for a readout time of $20~μ$s and $99\%$ for $4~μ$s at a temperature of $0.5~K$. We initialize a singlet state in a single dot with a fidelity higher than $99\%$ and separate the two electrons while keep…
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We demonstrate singlet-triplet readout and parity readout allowing to distinguish T0 and the polarized triplet states. We achieve high fidelity spin readout with an average fidelity above $99.9\%$ for a readout time of $20~μ$s and $99\%$ for $4~μ$s at a temperature of $0.5~K$. We initialize a singlet state in a single dot with a fidelity higher than $99\%$ and separate the two electrons while keeping the same spin state with $a \approx 95.6\%$ fidelity.
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Submitted 21 July, 2022;
originally announced July 2022.
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Strong coupling between a photon and a hole spin in silicon
Authors:
Cécile X. Yu,
Simon Zihlmann,
José C. Abadillo-Uriel,
Vincent P. Michal,
Nils Rambal,
Heimanu Niebojewski,
Thomas Bedecarrats,
Maud Vinet,
Etienne Dumur,
Michele Filippone,
Benoit Bertrand,
Silvano De Franceschi,
Yann-Michel Niquet,
Romain Maurand
Abstract:
Spins in semiconductor quantum dots constitute a promising platform for scalable quantum information processing. Coupling them strongly to the photonic modes of superconducting microwave resonators would enable fast non-demolition readout and long-range, on-chip connectivity, well beyond nearest-neighbor quantum interactions. Here we demonstrate strong coupling between a microwave photon in a supe…
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Spins in semiconductor quantum dots constitute a promising platform for scalable quantum information processing. Coupling them strongly to the photonic modes of superconducting microwave resonators would enable fast non-demolition readout and long-range, on-chip connectivity, well beyond nearest-neighbor quantum interactions. Here we demonstrate strong coupling between a microwave photon in a superconducting resonator and a hole spin in a silicon-based double quantum dot issued from a foundry-compatible MOS fabrication process. By leveraging the strong spin-orbit interaction intrinsically present in the valence band of silicon, we achieve a spin-photon coupling rate as high as 330~MHz largely exceeding the combined spin-photon decoherence rate. This result, together with the recently demonstrated long coherence of hole spins in silicon, opens a new realistic pathway to the development of circuit quantum electrodynamics with spins in semiconductor quantum dots.
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Submitted 9 May, 2023; v1 submitted 28 June, 2022;
originally announced June 2022.
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A single hole spin with enhanced coherence in natural silicon
Authors:
N. Piot,
B. Brun,
V. Schmitt,
S. Zihlmann,
V. P. Michal,
A. Apra,
J. C. Abadillo-Uriel,
X. Jehl,
B. Bertrand,
H. Niebojewski,
L. Hutin,
M. Vinet,
M. Urdampilleta,
T. Meunier,
Y. -M. Niquet,
R. Maurand,
S. De Franceschi
Abstract:
Semiconductor spin qubits based on spin-orbit states are responsive to electric field excitation allowing for practical, fast and potentially scalable qubit control. Spin-electric susceptibility, however, renders these qubits generally vulnerable to electrical noise, which limits their coherence time. Here we report on a spin-orbit qubit consisting of a single hole electrostatically confined in a…
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Semiconductor spin qubits based on spin-orbit states are responsive to electric field excitation allowing for practical, fast and potentially scalable qubit control. Spin-electric susceptibility, however, renders these qubits generally vulnerable to electrical noise, which limits their coherence time. Here we report on a spin-orbit qubit consisting of a single hole electrostatically confined in a natural silicon metal-oxide-semiconductor device. By varying the magnetic field orientation, we reveal the existence of operation sweet spots where the impact of charge noise is minimized while preserving an efficient electric-dipole spin control. We correspondingly observe an extension of the Hahn-echo coherence time up to 88 $μ$s, exceeding by an order of magnitude the best reported values for hole-spin qubits, and approaching the state-of-the-art for electron spin qubits with synthetic spin-orbit coupling in isotopically-purified silicon. This finding largely enhances the prospects of silicon-based hole spin qubits for scalable quantum information processing.
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Submitted 25 September, 2022; v1 submitted 21 January, 2022;
originally announced January 2022.
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Spin-valley coupling anisotropy and noise in CMOS quantum dots
Authors:
Cameron Spence,
Bruna Cardoso Paz,
Bernhard Klemt,
Emmanuel Chanrion,
David J. Niegemann,
Baptiste Jadot,
Vivien Thiney,
Benoit Bertrand,
Heimanu Niebojewski,
Pierre-André Mortemousque,
Xavier Jehl,
Romain Maurand,
Silvano De Franceschi,
Maud Vinet,
Franck Balestro,
Christopher Bäuerle,
Yann-Michel Niquet,
Tristan Meunier,
Matias Urdampilleta
Abstract:
One of the main advantages of silicon spin qubits over other solid-state qubits is their inherent scalability and compatibility with the 300 mm CMOS fabrication technology that is already widely used in the semiconductor industry, whilst maintaining high readout and gate fidelities. We demonstrate detection of a single electron spin using energy-selective readout in a CMOS-fabricated nanowire devi…
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One of the main advantages of silicon spin qubits over other solid-state qubits is their inherent scalability and compatibility with the 300 mm CMOS fabrication technology that is already widely used in the semiconductor industry, whilst maintaining high readout and gate fidelities. We demonstrate detection of a single electron spin using energy-selective readout in a CMOS-fabricated nanowire device with an integrated charge detector. We measure a valley splitting of 0.3 meV and 0.16 meV in two similar devices. The anisotropy of the spin-valley mixing is measured and shown to follow the dependence expected from the symmetry of the local confinement, indicating low disorder in the region of the quantum dot. Finally the charge noise in the spin-valley coupling regime is investigated and found to induce fluctuations in the qubit energy in the range of $0.6GHz/\sqrt{Hz}$.
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Submitted 28 September, 2021;
originally announced September 2021.