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Tile-and-trim micro-resonator array fabrication optimized for high multiplexing factors
Authors:
Christopher M. McKenney,
Jason E. Austermann,
Jim Beall,
Bradley Dober,
Shannon M. Duff,
Jiansong Gao,
Gence C. Hilton,
Johannes Hubmayr,
Dale Li,
Joel N. Ullom,
Jeff Van Lanen,
Michael R. Vissers
Abstract:
We present a superconducting micro-resonator array fabrication method that is scalable, reconfigurable, and has been optimized for high multiplexing factors. The method uses uniformly sized tiles patterned on stepper photolithography reticles as the building blocks of an array. We demonstrate this technique on a 101-element microwave kinetic inductance detector (MKID) array made from a titanium-ni…
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We present a superconducting micro-resonator array fabrication method that is scalable, reconfigurable, and has been optimized for high multiplexing factors. The method uses uniformly sized tiles patterned on stepper photolithography reticles as the building blocks of an array. We demonstrate this technique on a 101-element microwave kinetic inductance detector (MKID) array made from a titanium-nitride superconducting film. Characterization reveals 1.5\% maximum fractional frequency spacing deviations caused primarily by material parameters that vary smoothly across the wafer. However, local deviations exhibit a Gaussian distribution in fractional frequency spacing with a standard deviation of $2.7 \times 10^{-3}$. We exploit this finding to increase the yield of the BLAST-TNG $250 \; μ\text{m}$ production wafer by placing resonators in the array close in both physical and frequency space. This array consists of 1836 polarization-sensitive MKIDs wired in three multiplexing groups. We present the array design and show that the achieved yield is consistent with our model of frequency collisions and is comparable to what has been achieved in other low temperature detector technologies.
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Submitted 12 March, 2018;
originally announced March 2018.
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Superconducting micro-resonator arrays with ideal frequency spacing and extremely low frequency collision rate
Authors:
X. Liu,
W. Guo,
Y. Wang,
M. Dai,
L. F. Wei,
B. Dober,
C. McKenney,
G. C. Hilton,
J. Hubmayr,
J. E. Austermann,
J. N. Ullom,
J. Gao,
M. R. Vissers
Abstract:
We present a wafer trimming technique for producing superconducting micro-resonator arrays with highly uniform frequency spacing. With the light-emitting diode (LED) mapper technique demonstrated previously, we first map the measured resonance frequencies to the physical resonators. Then, we fine-tune each resonator's frequency by lithographically trimming a small length, calculated from the devia…
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We present a wafer trimming technique for producing superconducting micro-resonator arrays with highly uniform frequency spacing. With the light-emitting diode (LED) mapper technique demonstrated previously, we first map the measured resonance frequencies to the physical resonators. Then, we fine-tune each resonator's frequency by lithographically trimming a small length, calculated from the deviation of the measured frequency from its design value, from the interdigitated capacitor. We demonstrate this technique on a 127-resonator array made of titanium-nitride (TiN) and show that the uniformity of frequency spacing is greatly improved. The array yield in terms of frequency collisions improves from 84% to 97%, while the quality factors and noise properties are unaffected. The wafer trimming technique provides an easy-to-implement tool to improve the yield and multiplexing density of large resonator arrays, which is important for various applications in photon detection and quantum computing.
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Submitted 21 November, 2017;
originally announced November 2017.
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Cryogenic LED pixel-to-frequency mapper for kinetic inductance detector arrays
Authors:
X. Liu,
W. Guo,
Y. Wang,
L. F. Wei,
C. M. Mckenney,
B. Dober,
T. Billings,
J. Hubmayr,
L. S. Ferreira,
M. R. Vissers,
J. Gao
Abstract:
We present a cryogenic wafer mapper based on light emitting diodes (LEDs) for spatial mapping of a large microwave kinetic inductance detector (MKID) array. In this scheme, an array of LEDs, addressed by DC wires and collimated through horns onto the detectors, is mounted in front of the detector wafer. By illuminating each LED individually and sweeping the frequency response of all the resonators…
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We present a cryogenic wafer mapper based on light emitting diodes (LEDs) for spatial mapping of a large microwave kinetic inductance detector (MKID) array. In this scheme, an array of LEDs, addressed by DC wires and collimated through horns onto the detectors, is mounted in front of the detector wafer. By illuminating each LED individually and sweeping the frequency response of all the resonators, we can unambiguously correspond a detector pixel to its measured resonance frequency. We have demonstrated mapping a 76.2 mm 90-pixel MKID array using a mapper containing 126 LEDs with 16 DC bias wires. With the frequency to pixel-position correspondence data obtained by the LED mapper, we have found a radially position-dependent frequency non-uniformity < 1.6% over the 76.2 mm wafer. Our LED wafer mapper has no moving parts and is easy to implement. It may find broad applications in superconducting detector and quantum computing/information experiments.
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Submitted 12 July, 2017;
originally announced July 2017.
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Operation of a titanium nitride superconducting microresonator detector in the nonlinear regime
Authors:
L. J. Swenson,
P. K. Day,
B. H. Eom,
H. G. Leduc,
N. Llombart,
C. M. McKenney,
O. Noroozian,
J. Zmuidzinas
Abstract:
If driven sufficiently strongly, superconducting microresonators exhibit nonlinear behavior including response bifurcation. This behavior can arise from a variety of physical mechanisms including heating effects, grain boundaries or weak links, vortex penetration, or through the intrinsic nonlinearity of the kinetic inductance. Although microresonators used for photon detection are usually driven…
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If driven sufficiently strongly, superconducting microresonators exhibit nonlinear behavior including response bifurcation. This behavior can arise from a variety of physical mechanisms including heating effects, grain boundaries or weak links, vortex penetration, or through the intrinsic nonlinearity of the kinetic inductance. Although microresonators used for photon detection are usually driven fairly hard in order to optimize their sensitivity, most experiments to date have not explored detector performance beyond the onset of bifurcation. Here we present measurements of a lumped-element superconducting microresonator designed for use as a far-infrared detector and operated deep into the nonlinear regime. The 1 GHz resonator was fabricated from a 22 nm thick titanium nitride film with a critical temperature of 2 K and a normal-state resistivity of $100\, μΩ\,$cm. We measured the response of the device when illuminated with 6.4 pW optical loading using microwave readout powers that ranged from the low-power, linear regime to 18 dB beyond the onset of bifurcation. Over this entire range, the nonlinear behavior is well described by a nonlinear kinetic inductance. The best noise-equivalent power of $2 \times 10^{-16}$ W/Hz$^{1/2}$ at 10 Hz was measured at the highest readout power, and represents a $\sim$10 fold improvement compared with operating below the onset of bifurcation.
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Submitted 18 May, 2013;
originally announced May 2013.
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Microwave Dielectric Loss at Single Photon Energies and milliKelvin Temperatures
Authors:
Aaron D. O'Connell,
M. Ansmann,
R. C. Bialczak,
M. Hofheinz,
N. Katz,
Erik Lucero,
C. McKenney,
M. Neeley,
H. Wang,
E. M. Weig,
A. N. Cleland,
J. M. Martinis
Abstract:
The microwave performance of amorphous dielectric materials at very low temperatures and very low excitation strengths displays significant excess loss. Here, we present the loss tangents of some common amorphous and crystalline dielectrics, measured at low temperatures (T < 100 mK) with near single-photon excitation energies, using both coplanar waveguide (CPW) and lumped LC resonators. The los…
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The microwave performance of amorphous dielectric materials at very low temperatures and very low excitation strengths displays significant excess loss. Here, we present the loss tangents of some common amorphous and crystalline dielectrics, measured at low temperatures (T < 100 mK) with near single-photon excitation energies, using both coplanar waveguide (CPW) and lumped LC resonators. The loss can be understood using a two-level state (TLS) defect model. A circuit analysis of the half-wavelength resonators we used is outlined, and the energy dissipation of such a resonator on a multilayered dielectric substrate is considered theoretically.
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Submitted 17 February, 2008;
originally announced February 2008.
