Showing 1–1 of 1 results for author: Lavelle, B

X-ray diffraction characterization of suspended structures for MEMS applications

Authors: P. Goudeau, N. Tamura, B. Lavelle, S. Rigo, T. Masri, A. Bosseboeuf, T. Sarnet, J. -A. Petit, J. -M. Desmarres

Abstract: Mechanical stress control is becoming one of the major challenges for the future of micro and nanotechnologies. Micro scanning X-ray diffraction is one of the promising techniques that allows stress characterization in such complex structures at sub micron scales. Two types of MEMS structure have been studied: a bilayer cantilever composed of a gold film deposited on poly-silicon and a boron doped… ▽ More Mechanical stress control is becoming one of the major challenges for the future of micro and nanotechnologies. Micro scanning X-ray diffraction is one of the promising techniques that allows stress characterization in such complex structures at sub micron scales. Two types of MEMS structure have been studied: a bilayer cantilever composed of a gold film deposited on poly-silicon and a boron doped silicon bridge. X-ray diffraction results are discussed in view of numerical simulation experiments. △ Less

Submitted 10 January, 2025; originally announced January 2025.

Comments: Thin Films Stresses And Mechanical Properties, Mar 2005, San Francisco CA, United States