Disorder and cavity evolution in single-crystalline Ge during implantation of Sb ions monitored in-situ by spectroscopic ellipsometry
Authors:
Tivadar Lohner,
Attila Nemeth,
Zsolt Zolnai,
Benjamin Kalas,
Alekszej Romanenko,
Nguyen Quoc Khanh,
Edit Szilagyi,
Endre Kotai,
Emil Agocs,
Zsolt Toth,
Judit Budai,
Peter Petrik,
Miklos Fried,
Istvan Barsony,
Jozsef Gyulai
Abstract:
Ion implantation has been a key technology for the controlled surface modification of materials in microelectronics and generally, for tribology, biocompatibility, corrosion resistance and many more. To form shallow junctions in Ge is a challenging task. In this work the formation and accumulation of shallow damage profiles was studied by in-situ spectroscopic ellipsometry (SE) for the accurate tr…
▽ More
Ion implantation has been a key technology for the controlled surface modification of materials in microelectronics and generally, for tribology, biocompatibility, corrosion resistance and many more. To form shallow junctions in Ge is a challenging task. In this work the formation and accumulation of shallow damage profiles was studied by in-situ spectroscopic ellipsometry (SE) for the accurate tracking and evaluation of void and damage fractions in crystalline Ge during implantation of 200-keV Sb ions with a total fluence up to 1E16 cm-2 and an ion flux of 2.1E12 cm-2 s-1. The consecutive stages of damage accumulation were identified using optical multi-layer models with quantitative parameters of the thickness of modified layers as well as the volume fractions of amorphized material and voids. The effective size of damaged zones formed from ion tracks initiated by individual bombarding ions can be estimated by numerical simulation compared with the dynamics of damage profiles measured by ion beam analysis and ellipsometry. According to our observations, the formation of initial partial disorder was followed by complete amorphization and void formation occurring at the fluence of about 1E15 cm-2, leading to a high volume fraction of voids and a modified layer thickness of approx. 200 nm by the end of the irradiation process. This agrees with the results of numerical simulations and complementary scanning electron microscopy (SEM) measurements. In addition, we found a quasi-periodic time dependent behavior of amorphization and void formation represented by alternating accelerations and decelerations of different reorganization processes, respectively.
△ Less
Submitted 12 May, 2023;
originally announced May 2023.
Large-area nanoengineering of graphene corrugations for visible-frequency graphene plasmons
Authors:
Gergely Dobrik,
Peter Nemes-Incze,
Bruno Majerus,
Peter Sule,
Peter Vancso,
Gabor Piszter,
Miklos Menyhard,
Benjamin Kalas,
Peter Petrik,
Luc Henrard,
Levente Tapaszto
Abstract:
Quantum confinement of graphene carriers is an effective way to engineer its properties. It is commonly realized through physical edges that are associated with the deterioration of mobility and strong suppression of plasmon resonances. Here, we demonstrate a simple, large-area, edge-free nanostructuring technique, based on amplifying random nanoscale structural corrugations to a level where they…
▽ More
Quantum confinement of graphene carriers is an effective way to engineer its properties. It is commonly realized through physical edges that are associated with the deterioration of mobility and strong suppression of plasmon resonances. Here, we demonstrate a simple, large-area, edge-free nanostructuring technique, based on amplifying random nanoscale structural corrugations to a level where they efficiently confine carriers, without inducing significant inter-valley scattering. This soft confinement, allows the low-loss lateral ultra-confinement of graphene plasmons, scaling up their resonance frequency from native terahertz to commercially relevant visible range. Visible graphene plasmons localized into nanocorrugations mediate several orders of magnitude stronger light-matter interactions (Raman enhancement) than those previously achieved with graphene, enabling the detection of specific molecules from femtomolar solutions or ambient air. Moreover, nanocorrugated graphene sheets also support propagating visible plasmon modes revealed by scanning near-field optical microscopy observation of their interference patterns.
△ Less
Submitted 19 January, 2022;
originally announced January 2022.
