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Comparing the performance of direct and parametric drives for piezoelectric MEMS actuators
Authors:
Samer Houri,
Veronique Rochus
Abstract:
This work investigates and compares the response of piezoelectrically actuated nonlinear microelectromechanical devices (MEMS) to direct and to degenerate parametric drives. We describe the regime of degenerate parametric amplification in piezoelectric Duffing-type nonlinear MEMS devices using a single mode expansion, we then explore the existence of regions in parameter space where parametric exc…
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This work investigates and compares the response of piezoelectrically actuated nonlinear microelectromechanical devices (MEMS) to direct and to degenerate parametric drives. We describe the regime of degenerate parametric amplification in piezoelectric Duffing-type nonlinear MEMS devices using a single mode expansion, we then explore the existence of regions in parameter space where parametric excitation maybe advantageous compared to direct drive, which we label "parametric advantage". Analytical, experimental, and numerical verification demonstrates that parametric advantage can not exist if both pump and signal voltages are accounted for in the total voltage budget. This work determines non-dimensional scaling rules that can act as guidelines for selecting an optimal operating regime for degenerate parametric amplification.
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Submitted 4 May, 2025;
originally announced May 2025.
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MEMS-EYE: A M/NEMS platform for the investigation of multi-physical and complex nonlinear systems
Authors:
Samer Houri,
Gaetan Kerschen
Abstract:
The ultimate goal of this research proposal is the creation of a micro-optomechanical intelligence. The proposal centers on the development and investigation of very large-scale integrated (VLSI) arrays of coupled M/NEMS devices as platforms for the experimental study of nonlinear dynamics of high-dimensional systems. The potential of VLSI M/NEMS arrays to function as advanced sensors will be demo…
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The ultimate goal of this research proposal is the creation of a micro-optomechanical intelligence. The proposal centers on the development and investigation of very large-scale integrated (VLSI) arrays of coupled M/NEMS devices as platforms for the experimental study of nonlinear dynamics of high-dimensional systems. The potential of VLSI M/NEMS arrays to function as advanced sensors will be demonstrated through the novel idea of a MEMS EYE, an electronics-free platform that combines imaging and pattern recognition functionality.
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Submitted 12 April, 2023;
originally announced April 2023.
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A Kuramoto Network in a Single Nonlinear Microelectromechanical Device
Authors:
Samer Houri,
Motoki Asano,
Hajime Okamoto,
Hiroshi Yamaguchi
Abstract:
This work presents a frequency multiplexed 3-limit cycles network in a multimode microelectromechanical nonlinear resonator. The network is composed of libration limit cycles and behaves in an analogous manner to a phase oscillator network. The libration limit cycles, being of low frequency, interact through the stress tuning of the resonator, and result in an all-to-all coupling that can be descr…
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This work presents a frequency multiplexed 3-limit cycles network in a multimode microelectromechanical nonlinear resonator. The network is composed of libration limit cycles and behaves in an analogous manner to a phase oscillator network. The libration limit cycles, being of low frequency, interact through the stress tuning of the resonator, and result in an all-to-all coupling that can be described by a Kuramoto model. Beyond the typically present cubic nonlinearity the modes in question do not require any special frequency ratios. Thus an interconnect free Kuramoto network is established within a single physical device without the need for electrical or optical coupling mechanisms between the individual elements.
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Submitted 5 January, 2022;
originally announced January 2022.
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The Librator: A new dynamical regime for nonlinear microelectromechanical devices
Authors:
Samer Houri,
Motoki Asano,
Hajime Okamoto,
Hiroshi Yamaguchi
Abstract:
We present a novel mode of operation for Duffing-type nonlinear microelectromechanical (MEMS) devices whereby a self-sustained multi-frequency output is generated. This new librator regime creates a limit cycle around a dynamical fixed point, i.e. around fixed points within the rotating frame, whereas a traditional oscillator generates a limit cycle around a static fixed point. The librator limit…
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We present a novel mode of operation for Duffing-type nonlinear microelectromechanical (MEMS) devices whereby a self-sustained multi-frequency output is generated. This new librator regime creates a limit cycle around a dynamical fixed point, i.e. around fixed points within the rotating frame, whereas a traditional oscillator generates a limit cycle around a static fixed point. The librator limit cycles thus created do not change the global topology of the rotating frame phase space, but are constrained by it. Due to the Duffing nonlinearity different types of limit cycles may be generated within the same phase space, with each type possessing distinct dynamical features. Transitioning between these limit cycles requires crossing homoclinic bifurcations, which is done without generating chaos as the phase space dynamics are two dimensional. This work opens the possibility to the creation of a librator network in analogy with oscillator network, however this can be done in a single MEMS device.
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Submitted 9 June, 2021;
originally announced June 2021.
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Generation and propagation of topological solitons in a chain of coupled parametric-micromechanical-resonator arrays
Authors:
Hiroshi Yamaguchi,
Samer Houri
Abstract:
Using a coupled parametric-resonator array for generating and propagating a topological soliton in its rotating-frame phase space is theoretically and numerically investigated. In an analogy with the well-known phi4 model, the existence of a soliton is topologically protected as the boundary of two different phase domains of parametric oscillation. Numerical simulation indicates that the propagati…
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Using a coupled parametric-resonator array for generating and propagating a topological soliton in its rotating-frame phase space is theoretically and numerically investigated. In an analogy with the well-known phi4 model, the existence of a soliton is topologically protected as the boundary of two different phase domains of parametric oscillation. Numerical simulation indicates that the propagation can be triggered by switching of the phase state of one specific resonator, and the effects of damping, collision, and the symmetry lifting by harmonic drive on the propagation dynamics are studied. The topological soliton can be implemented by using electromechanical resonators, which allow its propagation dynamics to be precisely electrically controlled and provide a fully controlled on-chip test bed for the study of a topological soliton.
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Submitted 7 January, 2021;
originally announced January 2021.
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A Generic Rotating-Frame-Based Approach to Chaos Generation in Nonlinear MEMS NEMS Resonators
Authors:
Samer Houri,
Motoki Asano,
Hiroshi Yamaguchi,
Natsue Yoshimura,
Yasuharu Koike,
Ludovico Minati
Abstract:
This work provides a low-power method for chaos generation which is generally applicable to nonlinear M/NEMS resonators. The approach taken is independent of the material, scale, design, and actuation of the device in question; it simply assumes a good quality factor and a Duffing type nonlinearity, features that are commonplace to M/NEMS resonators. The approach models the rotating-frame dynamics…
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This work provides a low-power method for chaos generation which is generally applicable to nonlinear M/NEMS resonators. The approach taken is independent of the material, scale, design, and actuation of the device in question; it simply assumes a good quality factor and a Duffing type nonlinearity, features that are commonplace to M/NEMS resonators. The approach models the rotating-frame dynamics to analytically constrain the parameter space required for chaos generation. By leveraging these common properties of M/NEMS devices, a period-doubling route to chaos is generated using an order-of-magnitude smaller forcing than typically reported in the literature.
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Submitted 19 May, 2020;
originally announced May 2020.
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Multimode internal resonances in a MEMS self-sustained oscillator
Authors:
S. Houri,
D. Hatanaka,
M. Asano,
H. Yamaguchi
Abstract:
We investigate the dynamics of a microelectromechanical (MEMS) self-sustained oscillator supporting multiple resonating and interacting modes. In particular, the interaction of the first four flexural modes along with the first torsional mode are studied, whereby 1:2, 1:3, and 2:1 internal resonances occur. Even and odd modes are induced to couple by breaking the longitudinal symmetry of the struc…
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We investigate the dynamics of a microelectromechanical (MEMS) self-sustained oscillator supporting multiple resonating and interacting modes. In particular, the interaction of the first four flexural modes along with the first torsional mode are studied, whereby 1:2, 1:3, and 2:1 internal resonances occur. Even and odd modes are induced to couple by breaking the longitudinal symmetry of the structure. Self-oscillations are induced in the second flexural mode via a gain-feedback loop, thereafter its frequency is pulled into a commensurate frequency ratio with the other modes, enabling the oscillator to act as a driver/pump for four modes simultaneously. Thus, by leveraging multiple internal resonances, a five modes frequency-locked comb is generated.
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Submitted 6 August, 2019;
originally announced August 2019.
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Modal Analysis Investigation of Mechanical Kerr Frequency Combs
Authors:
Samer Houri,
Daiki Hatanaka,
Yaroslav M. Blanter,
Hiroshi Yamaguchi
Abstract:
The aim of this work is to theoretically investigate the possibility of Kerr frequency combs in mechanical systems. In particular, whether microelectrome-chanical devices (MEMS) can be used to generate frequency combs in a manner that is analogous to the optical frequency combs generated in optical microresona-tors with Kerr-type nonlinearity. The analysis assumes a beam-like micromechani-cal stru…
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The aim of this work is to theoretically investigate the possibility of Kerr frequency combs in mechanical systems. In particular, whether microelectrome-chanical devices (MEMS) can be used to generate frequency combs in a manner that is analogous to the optical frequency combs generated in optical microresona-tors with Kerr-type nonlinearity. The analysis assumes a beam-like micromechani-cal structure, and starting from the Euler-Bernoulli beam equation derives the nec-essary conditions in parameter space for the comb generation. The chapter equally presents potential means for the physical implementation of mechanical Kerr combs.
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Submitted 26 February, 2019;
originally announced February 2019.
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High-frequency stochastic switching of graphene resonators near room temperature
Authors:
Robin J. Dolleman,
Pierpaolo Belardinelli,
Samer Houri,
Herre S. J. van der Zant,
Farbod Alijani,
Peter G. Steeneken
Abstract:
Stochastic switching between the two bistable states of a strongly driven mechanical resonator enables detection of weak signals based on probability distributions, in a manner that mimics biological systems. However, conventional silicon resonators at the microscale require a large amount of fluctuation power to achieve a switching rate in the order of a few Hertz. Here, we employ graphene membra…
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Stochastic switching between the two bistable states of a strongly driven mechanical resonator enables detection of weak signals based on probability distributions, in a manner that mimics biological systems. However, conventional silicon resonators at the microscale require a large amount of fluctuation power to achieve a switching rate in the order of a few Hertz. Here, we employ graphene membrane resonators of atomic thickness to achieve a stochastic switching rate of 7.8 kHz, which is 200 times faster than current state-of-the-art. The (effective) temperature of the fluctuations is approximately 400 K, which is 3000 times lower than the state-of-the-art. This shows that these membranes are potentially useful to transduce weak signals in the audible frequency domain. Furthermore, we perform numerical simulations to understand the transition dynamics of the resonator and derive simple analytical expressions to investigate the relevant scaling parameters that allow high-frequency, low-temperature stochastic switching to be achieved in mechanical resonators.
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Submitted 21 December, 2018;
originally announced December 2018.
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Limit cycles and bifurcations in a nonlinear MEMS oscillator with a 1:3 internal resonance. Part I: The case of a driven resonator
Authors:
S. Houri,
D. Hatanaka,
M. Asano,
R. Ohta,
H. Yamaguchi
Abstract:
This work investigates the behavior of an AlGaAs/GaAs piezoelectric nonlinear MEMS oscillator exhibiting a 1:3 internal resonance. The device is explored in an open-loop configuration, i.e. as a driven resonator, where depending on the drive conditions we observe energy transfer between the first and third modes, and the emergence of supercritical Hopf limit cycles. We examine the dependence of th…
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This work investigates the behavior of an AlGaAs/GaAs piezoelectric nonlinear MEMS oscillator exhibiting a 1:3 internal resonance. The device is explored in an open-loop configuration, i.e. as a driven resonator, where depending on the drive conditions we observe energy transfer between the first and third modes, and the emergence of supercritical Hopf limit cycles. We examine the dependence of these bifurcations on the oscillator's frequency and amplitude, and reproduce the observed behavior using a system of nonlinearly coupled equations which show interesting scaling behavior.
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Submitted 10 December, 2018;
originally announced December 2018.
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Pulse-width modulated oscillations in a nonlinear resonator under two-tone driving as a means for MEMS sensor readout
Authors:
Samer Houri,
Ryuichi Ohta,
Motoki Asano,
Yaroslav M. Blanter,
Hiroshi Yamaguchi
Abstract:
A MEMS Duffing resonator is driven by two adjacent frequency tones into the nonlinear regime. We show that if the two-tone drive is applied at a frequency where a bistable response of the nonlinear oscillator exists, then the system output will be modulated by a relaxation cycle caused by periodically jumping between the two solution-branches of the bistable response. Although the jumps are caused…
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A MEMS Duffing resonator is driven by two adjacent frequency tones into the nonlinear regime. We show that if the two-tone drive is applied at a frequency where a bistable response of the nonlinear oscillator exists, then the system output will be modulated by a relaxation cycle caused by periodically jumping between the two solution-branches of the bistable response. Although the jumps are caused by the beating of the drives, the existence and period of this relaxation or hysteresis cycle is not solely dictated by the beat frequency between the two driving tones, but also by their amplitude and detuning with respect to the device resonance frequency. We equally demonstrate how the period of the cycles can be tuned via added tension in the device and how these oscillations can be used as a means of sensitive pulse-width modulated (PWM) readout of MEMS sensors.
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Submitted 10 December, 2018;
originally announced December 2018.
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Graphene multi-mode parametric oscillators
Authors:
Robin J. Dolleman,
Samer Houri,
Abhilash Chandrashekar,
Farbod Alijani,
Herre S. J. van der Zant,
Peter G. Steeneken
Abstract:
In the field of nanomechanics, parametric excitations are of interest since they can greatly enhance sensing capabilities and eliminate cross-talk. However, parametric excitations often rely on externally tuned springs, which limits their application to high quality factor resonators and usually does not allow excitation of multiple higher modes into parametric resonance. Here we demonstrate param…
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In the field of nanomechanics, parametric excitations are of interest since they can greatly enhance sensing capabilities and eliminate cross-talk. However, parametric excitations often rely on externally tuned springs, which limits their application to high quality factor resonators and usually does not allow excitation of multiple higher modes into parametric resonance. Here we demonstrate parametric amplification and resonance of suspended single-layer graphene membranes by an efficient opto-thermal drive that modulates the intrinsic spring constant. With a large amplitude of the optical drive, a record number of 14 mechanical modes can be brought into parametric resonance by modulating a single parameter: the pretension. In contrast to conventional mechanical resonators, it is shown that graphene membranes demonstrate an interesting combination of both strong nonlinear stiffness and nonlinear damping.
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Submitted 23 November, 2017;
originally announced November 2017.
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Optomechanics for thermal characterization of suspended graphene
Authors:
Robin J. Dolleman,
Samer Houri,
Dejan Davidovikj,
Santiago J. Cartamil-Bueno,
Yaroslav M. Blanter,
Herre S. J. van der Zant,
Peter G. Steeneken
Abstract:
Thermal properties of suspended single-layer graphene membranes are investigated by characterization of their mechanical motion in response to a high-frequency modulated laser. A characteristic delay time $τ$ between the optical intensity and mechanical motion is observed, which is attributed to the time required to raise the temperature of the membrane. We find, however, that the measured time co…
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Thermal properties of suspended single-layer graphene membranes are investigated by characterization of their mechanical motion in response to a high-frequency modulated laser. A characteristic delay time $τ$ between the optical intensity and mechanical motion is observed, which is attributed to the time required to raise the temperature of the membrane. We find, however, that the measured time constants are significantly larger than the predicted ones based on values of the specific heat and thermal conductivity. In order to explain the discrepancy between measured and modeled tau, a model is proposed that takes a thermal boundary resistance at the edge of the graphene drum into account. The measurements provide a noninvasive way to characterize thermal properties of suspended atomically thin membranes, providing information that can be hard to obtain by other means.
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Submitted 22 February, 2017;
originally announced February 2017.
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Direct and parametric synchronization of a graphene self-oscillator
Authors:
S. Houri,
S. J. Cartamil-Bueno,
M. Poot,
P. G. Steeneken,
H. S. J. van der Zant,
W. J. Venstra
Abstract:
We explore the dynamics of a graphene nanomechanical oscillator coupled to a reference oscillator. Circular graphene drums are forced into self-oscillation, at a frequency fosc, by means of photothermal feedback induced by illuminating the drum with a continuous-wave red laser beam. Synchronization to a reference signal, at a frequency fsync, is achieved by shining a power-modulated blue laser ont…
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We explore the dynamics of a graphene nanomechanical oscillator coupled to a reference oscillator. Circular graphene drums are forced into self-oscillation, at a frequency fosc, by means of photothermal feedback induced by illuminating the drum with a continuous-wave red laser beam. Synchronization to a reference signal, at a frequency fsync, is achieved by shining a power-modulated blue laser onto the structure. We investigate two regimes of synchronization as a function of both detuning and signal strength for direct (fsync = fosc) and parametric locking (fsync = 2fosc). We detect a regime of phase resonance, where the phase of the oscillator behaves as an underdamped second-order system, with the natural frequency of the phase resonance showing a clear power-law dependence on the locking signal strength. The phase resonance is qualitatively reproduced using a forced van der Pol-Duffing-Mathieu equation.
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Submitted 17 January, 2017;
originally announced January 2017.
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Colorimetry technique for scalable characterization of suspended graphene
Authors:
Santiago J. Cartamil-Bueno,
Peter G. Steeneken,
Alba Centeno,
Amaia Zurutuza,
Herre S. J. van der Zant,
Samer Houri
Abstract:
Previous statistical studies on the mechanical properties of chemical-vapor-deposited (CVD) suspended graphene membranes have been performed by means of measuring individual devices or with techniques that affect the material. Here, we present a colorimetry technique as a parallel, non-invasive, and affordable way of characterizing suspended graphene devices. We exploit Newton rings interference p…
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Previous statistical studies on the mechanical properties of chemical-vapor-deposited (CVD) suspended graphene membranes have been performed by means of measuring individual devices or with techniques that affect the material. Here, we present a colorimetry technique as a parallel, non-invasive, and affordable way of characterizing suspended graphene devices. We exploit Newton rings interference patterns to study the deformation of a double-layer graphene drum 13.2 micrometer in diameter when a pressure step is applied. By studying the time evolution of the deformation, we find that filling the drum cavity with air is 2-5 times slower than when it is purged.
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Submitted 17 August, 2016;
originally announced August 2016.
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Dynamic relaxation oscillations in a nonlinearly driven quartz crystal
Authors:
S. Houri,
M. J. Geuze,
W. J. Venstra
Abstract:
We demonstrate thermo-mechanical relaxation oscillations in a strongly driven quartz crystal. Dynamic bifurcation leads to two stable oscillation states with a distinct electrical impedance. Slow Joule-heating, which shifts the susceptibility of the crystal, provides a feedback that leads to thermally-induced oscillations, in which the amplitude of the crystal is modulated by a relaxation cycle. T…
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We demonstrate thermo-mechanical relaxation oscillations in a strongly driven quartz crystal. Dynamic bifurcation leads to two stable oscillation states with a distinct electrical impedance. Slow Joule-heating, which shifts the susceptibility of the crystal, provides a feedback that leads to thermally-induced oscillations, in which the amplitude of the crystal is modulated by a relaxation cycle. The frequency of the relaxation cycle is roughly a million times lower than the resonance frequency of the crystal, and it can be adjusted by the detuning from the critical point for dynamic bifurcation. The experimental observations are reproduced by a simple model that takes into account the slow dynamics of the system.
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Submitted 10 September, 2015;
originally announced September 2015.