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Simultaneous Measurement of Mid-Infrared Refractive Indices in Thin-Film Heterostructures: Methodology and Results for GaAs/AlGaAs
Authors:
Lukas W. Perner,
Gar-Wing Truong,
David Follman,
Maximilian Prinz,
Georg Winkler,
Stephan Puchegger,
Garrett D. Cole,
Oliver H. Heckl
Abstract:
We present our results for simultaneous measurement of the refractive indices of gallium arsenide (GaAs) and aluminum gallium arsenide (Al$_\mathrm{x}$Ga$_\mathrm{1-x}$As) from $2.0$ to $7.1\,\mathrm{μm}$ ($5000$ to $1400\,\mathrm{cm^{-1}}$). We obtain these values from a monocrystalline superlattice Bragg mirror of excellent purity (background doping $\leq 1 \times 10^{-14}\,\mathrm{cm^{-3}}$), g…
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We present our results for simultaneous measurement of the refractive indices of gallium arsenide (GaAs) and aluminum gallium arsenide (Al$_\mathrm{x}$Ga$_\mathrm{1-x}$As) from $2.0$ to $7.1\,\mathrm{μm}$ ($5000$ to $1400\,\mathrm{cm^{-1}}$). We obtain these values from a monocrystalline superlattice Bragg mirror of excellent purity (background doping $\leq 1 \times 10^{-14}\,\mathrm{cm^{-3}}$), grown via molecular beam epitaxy. To recover the refractive indices over such a broad wavelength range, we fit a dispersion model for each material. In a novel combination of well-established methods, we measure both a photometrically accurate transmittance spectrum of the Bragg mirror via Fourier-transform infrared spectrometry and the individual physical layer thicknesses of the structure via scanning electron microscopy. To infer the uncertainty of the refractive index values, we estimate relevant measurement uncertainties and propagate them via a Monte-Carlo method. This highly-adaptable approach conclusively yields propagated relative uncertainties on the order of $10^{-4}$ over the measured spectral range for both GaAs and Al$_{0.929}$Ga$_{0.071}$As. The fitted model can also approximate the refractive index for MBE-grown Al$_\mathrm{x}$Ga$_\mathrm{1-x}$As for $0\leq x \leq 1$. Both these updated values and the measurement approach will be essential in the design, fabrication, and characterization of next-generation active and passive optical devices in a spectral region that is of high interest in many fields, e.g., laser design and cavity-enhanced spectroscopy in the mid-infrared spectral region.
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Submitted 16 May, 2023; v1 submitted 18 January, 2023;
originally announced January 2023.
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Precise Measurement of Refractive Indices in Thin Film Heterostructures
Authors:
Lukas W. Perner,
Gar-Wing Truong,
David Follman,
Maximilian Prinz,
Georg Winkler,
Stephan Puchegger,
Garrett D. Cole,
Oliver H. Heckl
Abstract:
We present a robust, precise, and accurate method to simultaneously measure the refractive indices of two transparent materials within an interference coating. This is achieved by measuring both a photometrically accurate transmittance spectrum and the as-grown individual layer thicknesses of a thin-film multilayer structure. These measurements are used for a TMM-based curve-fitting routine which…
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We present a robust, precise, and accurate method to simultaneously measure the refractive indices of two transparent materials within an interference coating. This is achieved by measuring both a photometrically accurate transmittance spectrum and the as-grown individual layer thicknesses of a thin-film multilayer structure. These measurements are used for a TMM-based curve-fitting routine which extracts the refractive indices and their measurement uncertainties via a Monte-Carlo-type error propagation. We demonstrate the performance of this approach by experimentally measuring the refractive indices of both, GaAs and Al$_{0.929}$Ga$_{0.071}$As, as present in an epitaxial distributed Bragg reflector. A variety of devices can be used to obtain the transmittance spectrum (e.g., FTIR, grating-based spectrophotometer) and layer thicknesses (e.g., SEM, TEM, AFM), the discussed approach is readily adaptable to virtually any wavelength region and many transparent material combinations of interest. The subsequent model-fitting approach yields refractive index values with $10^{-4}$-level uncertainty for both materials.
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Submitted 18 January, 2023;
originally announced January 2023.
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Mid-infrared monocrystalline interference coatings with excess optical loss below 10 ppm
Authors:
G. Winkler,
L. W. Perner,
G. -W. Truong,
G. Zhao,
D. Bachmann,
A. S. Mayer,
J. Fellinger,
D. Follman,
P. Heu,
C. Deutsch,
D. M. Bailey,
H. Peelaers,
S. Puchegger,
A. J. Fleisher,
G. D. Cole,
O. H. Heckl
Abstract:
We present high-reflectivity substrate-transferred single-crystal GaAs/AlGaAs interference coatings at a center wavelength of 4.54 um with record-low excess optical loss below 10 parts per million. These high-performance mirrors are realized via a novel microfabrication process that differs significantly from the production of amorphous multilayers generated via physical vapor deposition processes…
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We present high-reflectivity substrate-transferred single-crystal GaAs/AlGaAs interference coatings at a center wavelength of 4.54 um with record-low excess optical loss below 10 parts per million. These high-performance mirrors are realized via a novel microfabrication process that differs significantly from the production of amorphous multilayers generated via physical vapor deposition processes. This new process enables reduced scatter loss due to the low surface and interfacial roughness, while low background doping in epitaxial growth ensures strongly reduced absorption. We report on a suite of optical measurements, including cavity ring-down, transmittance spectroscopy, and direct absorption tests to reveal the optical losses for a set of prototype mirrors. In the course of these measurements, we observe a unique polarization-orientation-dependent loss mechanism which we attribute to elastic anisotropy of these strained epitaxial multilayers. A future increase in layer count and a corresponding reduction of transmittance will enable optical resonators with a finesse in excess of 100 000 in the mid-infrared spectral region, allowing for advances in high resolution spectroscopy, narrow-linewidth laser stabilization, and ultrasensitive measurements of various light-matter interactions.
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Submitted 10 September, 2020;
originally announced September 2020.
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High-performance near- and mid-infrared crystalline coatings
Authors:
Garrett D. Cole,
Wei Zhang,
Bryce J. Bjork,
David Follman,
Paula Heu,
Christoph Deutsch,
Lindsay Sonderhouse,
John Robinson,
Chris Franz,
Alexei Alexandrovski,
Mark Notcutt,
Oliver H. Heckl,
Jun Ye,
Markus Aspelmeyer
Abstract:
Substrate-transferred crystalline coatings have recently emerged as a groundbreaking new concept in optical interference coatings. Building upon our initial demonstration of this technology, we have now realized significant improvements in the limiting optical performance of these novel single-crystal $GaAs/Al_{x}Ga_{1-x}As$ multilayers. In the near-infrared (NIR), for coating center wavelengths s…
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Substrate-transferred crystalline coatings have recently emerged as a groundbreaking new concept in optical interference coatings. Building upon our initial demonstration of this technology, we have now realized significant improvements in the limiting optical performance of these novel single-crystal $GaAs/Al_{x}Ga_{1-x}As$ multilayers. In the near-infrared (NIR), for coating center wavelengths spanning 1064 to 1560 nm, we have reduced the excess optical losses (scatter + absorption) to levels as low as 3 parts per million, enabling the realization of a cavity finesse exceeding $3\times 10^{5}$ at the telecom-relevant wavelength range near 1550 nm. Moreover, we demonstrate the direct measurement of sub-ppm optical absorption at 1064 nm. Concurrently, we investigate the mid-IR (MIR) properties of these coatings and observe exceptional performance for first attempts in this important wavelength region. Specifically, we verify excess losses at the hundred ppm level for wavelengths of 3300 and 3700 nm. Taken together, our NIR optical losses are now fully competitive with ion beam sputtered multilayer coatings, while our first prototype MIR optics have already reached state-of-the-art performance levels for reflectors covering this portion of the fingerprint region for optical gas sensing. Mirrors fabricated with our crystalline coating technique exhibit the lowest mechanical loss, and thus the lowest Brownian noise, the highest thermal conductivity, and, potentially, the widest spectral coverage of any "supermirror" technology in a single material platform. Looking ahead, we see a bright future for crystalline coatings in applications requiring the ultimate levels of optical, thermal, and optomechanical performance
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Submitted 22 March, 2016;
originally announced April 2016.