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X-ray scattering investigation of hydride surface segregation in epitaxial Nb films
Authors:
David A. Garcia-Wetten,
Philip J. Ryan,
Jong Woo Kim,
Dominic P Goronzy,
Roger J. Reinertsen,
Mark C. Hersam,
Michael J. Bedzyk
Abstract:
Hydride precipitation in niobium-based, superconducting circuits is a damaging side-effect of hydrofluoric acid treatments used to clean and thin the Nb surface oxides and Si oxides. The precipitate microstructure is difficult to probe because of the high hydrogen mobility in the niobium matrix. In particular, destructive techniques used to prepare samples for elemental depth profiling can change…
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Hydride precipitation in niobium-based, superconducting circuits is a damaging side-effect of hydrofluoric acid treatments used to clean and thin the Nb surface oxides and Si oxides. The precipitate microstructure is difficult to probe because of the high hydrogen mobility in the niobium matrix. In particular, destructive techniques used to prepare samples for elemental depth profiling can change the hydride structure. Here, we use X-ray surface scattering to non-destructively probe the depth distribution of precipitates in hydrided, epitaxial, niobium thin films. We find that the niobium hydride is confined within the top ten nm of the surface.
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Submitted 15 April, 2025;
originally announced April 2025.
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Identifying Materials-Level Sources of Performance Variation in Superconducting Transmon Qubits
Authors:
Akshay A. Murthy,
Mustafa Bal,
Michael J. Bedzyk,
Hilal Cansizoglu,
Randall K. Chan,
Venkat Chandrasekhar,
Francesco Crisa,
Amlan Datta,
Yanpei Deng,
Celeo D. Matute Diaz,
Vinayak P. Dravid,
David A. Garcia-Wetten,
Sabrina Garattoni,
Sunil Ghimire,
Dominic P. Goronzy,
Sebastian de Graaf,
Sam Haeuser,
Mark C. Hersam,
Peter Hopkins,
Dieter Isheim,
Kamal Joshi,
Richard Kim,
Saagar Kolachina,
Cameron J. Kopas,
Matthew J. Kramer
, et al. (24 additional authors not shown)
Abstract:
The Superconducting Materials and Systems (SQMS) Center, a DOE National Quantum Information Science Research Center, has conducted a comprehensive and coordinated study using superconducting transmon qubit chips with known performance metrics to identify the underlying materials-level sources of device-to-device performance variation. Following qubit coherence measurements, these qubits of varying…
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The Superconducting Materials and Systems (SQMS) Center, a DOE National Quantum Information Science Research Center, has conducted a comprehensive and coordinated study using superconducting transmon qubit chips with known performance metrics to identify the underlying materials-level sources of device-to-device performance variation. Following qubit coherence measurements, these qubits of varying base superconducting metals and substrates have been examined with various nondestructive and invasive material characterization techniques at Northwestern University, Ames National Laboratory, and Fermilab as part of a blind study. We find trends in variations of the depth of the etched substrate trench, the thickness of the surface oxide, and the geometry of the sidewall, which when combined, lead to correlations with the T$_1$ lifetime across different devices. In addition, we provide a list of features that varied from device to device, for which the impact on performance requires further studies. Finally, we identify two low-temperature characterization techniques that may potentially serve as proxy tools for qubit measurements. These insights provide materials-oriented solutions to not only reduce performance variations across neighboring devices, but also to engineer and fabricate devices with optimal geometries to achieve performance metrics beyond the state-of-the-art values.
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Submitted 2 June, 2025; v1 submitted 18 March, 2025;
originally announced March 2025.
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Formation and Microwave Losses of Hydrides in Superconducting Niobium Thin Films Resulting from Fluoride Chemical Processing
Authors:
Carlos G. Torres-Castanedo,
Dominic P. Goronzy,
Thang Pham,
Anthony McFadden,
Nicholas Materise,
Paul Masih Das,
Matthew Cheng,
Dmitry Lebedev,
Stephanie M. Ribet,
Mitchell J. Walker,
David A. Garcia-Wetten,
Cameron J. Kopas,
Jayss Marshall,
Ella Lachman,
Nikolay Zhelev,
James A. Sauls,
Joshua Y. Mutus,
Corey Rae H. McRae,
Vinayak P. Dravid,
Michael J. Bedzyk,
Mark C. Hersam
Abstract:
Superconducting Nb thin films have recently attracted significant attention due to their utility for quantum information technologies. In the processing of Nb thin films, fluoride-based chemical etchants are commonly used to remove surface oxides that are known to affect superconducting quantum devices adversely. However, these same etchants can also introduce hydrogen to form Nb hydrides, potenti…
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Superconducting Nb thin films have recently attracted significant attention due to their utility for quantum information technologies. In the processing of Nb thin films, fluoride-based chemical etchants are commonly used to remove surface oxides that are known to affect superconducting quantum devices adversely. However, these same etchants can also introduce hydrogen to form Nb hydrides, potentially negatively impacting microwave loss performance. Here, we present comprehensive materials characterization of Nb hydrides formed in Nb thin films as a function of fluoride chemical treatments. In particular, secondary-ion mass spectrometry, X-ray scattering, and transmission electron microscopy reveal the spatial distribution and phase transformation of Nb hydrides. The rate of hydride formation is determined by the fluoride solution acidity and the etch rate of Nb2O5, which acts as a diffusion barrier for hydrogen into Nb. The resulting Nb hydrides are detrimental to Nb superconducting properties and lead to increased power-independent microwave loss in coplanar waveguide resonators. However, Nb hydrides do not correlate with two-level system loss or device aging mechanisms. Overall, this work provides insight into the formation of Nb hydrides and their role in microwave loss, thus guiding ongoing efforts to maximize coherence time in superconducting quantum devices.
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Submitted 5 April, 2024;
originally announced April 2024.
