-
Stress Accommodation in Nanoscale Dolan Bridges Designed for Superconducting Qubits
Authors:
Sueli Skinner-Ramos,
Matthew L. Freeman,
Douglas Pete,
Rupert M. Lewis,
Matthew Eichenfield,
C. Thomas Harris
Abstract:
Josephson junctions are the principal circuit element in numerous superconducting quantum information devices and can be readily integrated into large-scale electronics. However, device integration at the wafer scale necessarily depends on having a reliable, high-fidelity, and high-yield fabrication method for creating Josephson junctions. When creating Al/AlOx based superconducting qubits, the st…
▽ More
Josephson junctions are the principal circuit element in numerous superconducting quantum information devices and can be readily integrated into large-scale electronics. However, device integration at the wafer scale necessarily depends on having a reliable, high-fidelity, and high-yield fabrication method for creating Josephson junctions. When creating Al/AlOx based superconducting qubits, the standard Josephson junction fabrication method relies on a sub-micron suspended resist bridge, known as a Dolan bridge, which tends to be particularly fragile and can often times fracture during the resist development process, ultimately resulting in device failure. In this work, we demonstrate a unique Josephson junction lithography mask design that incorporates stress-relief channels. Our simulation results show that the addition of stress-relief channels reduces the lateral stress in the Dolan bridge by more than 70% for all the bridge geometries investigated. In practice, our novel mask design significantly increased the survivability of the bridge during device processing, resulting in 100% yield for over 100 Josephson junctions fabricated.
△ Less
Submitted 31 January, 2025;
originally announced February 2025.
-
Origin of pinning disorder in magnetic-field-induced Wigner solids
Authors:
Matthew L. Freeman,
P. T. Madathil,
L. N. Pfeiffer,
K. W. Baldwin,
Y. J. Chung,
R. Winkler,
M. Shayegan,
L. W. Engel
Abstract:
At low Landau level filling factors ($ν$), Wigner solid phases of two-dimensional electron systems in GaAs are pinned by disorder, and exhibit a pinning mode, whose frequency is a measure of the disorder that pins the Wigner solid. Despite numerous studies spanning the last three decades, the origin of the disorder that causes the pinning and determines the pinning mode frequency remains unknown.…
▽ More
At low Landau level filling factors ($ν$), Wigner solid phases of two-dimensional electron systems in GaAs are pinned by disorder, and exhibit a pinning mode, whose frequency is a measure of the disorder that pins the Wigner solid. Despite numerous studies spanning the last three decades, the origin of the disorder that causes the pinning and determines the pinning mode frequency remains unknown. Here we present a study of the pinning mode resonance in the low-$ν$ Wigner solid phases of a series of ultralow-disorder GaAs quantum wells which are similar except for their varying well widths, $d$. The pinning mode frequencies,$f_p$, decrease strongly as $d$ increases, with the widest well exhibiting $f_p$ as low as $\simeq$35 MHz. The amount of reduction of \fp\ with increasing $d$ can be explained remarkably well by tails of the wave function impinging into the alloy-disordered Al$_x$Ga$_{1-x}$As barriers that contain the electrons. However, it is imperative that the model for the confinement and wave function includes the Coulomb repulsion in the growth direction between the electrons as they occupy the quantum well.
△ Less
Submitted 10 April, 2024;
originally announced April 2024.
-
Resistively loaded coplanar waveguide for microwave measurements of induced carriers
Authors:
M. L. Freeman,
Tzu-Ming Lu,
L. W. Engel
Abstract:
We describe the use of a coplanar waveguide whose slots are filled with resistive film, a resistively loaded coplanar waveguide (RLCPW), to measure two dimensional electron systems (2DES). The RLCPW applied to the sample hosting the 2DES provides a uniform metallic surface serving as a gate, to control the areal charge density of the 2DES. As a demonstration of this technique we present measuremen…
▽ More
We describe the use of a coplanar waveguide whose slots are filled with resistive film, a resistively loaded coplanar waveguide (RLCPW), to measure two dimensional electron systems (2DES). The RLCPW applied to the sample hosting the 2DES provides a uniform metallic surface serving as a gate, to control the areal charge density of the 2DES. As a demonstration of this technique we present measurements on a Si MOSFET, and a model that successfully converts microwave transmission coefficients into conductivity of a nearby 2DES capacitively coupled to the RLCPW. We also describe the process of fabricating the highly resistive metal film required for fabrication of the RLCPW.
△ Less
Submitted 13 January, 2022; v1 submitted 7 January, 2022;
originally announced January 2022.
