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Low Resistivity and High Breakdown Current Density of 10-nm Diameter van der Waals TaSe3 Nanowires by Chemical Vapor Deposition
Authors:
Thomas A. Empante,
Aimee Martinez,
Michelle Wurch,
Yanbing Zhu,
Adane K. Geremew,
Koichi Yamaguchi,
Miguel Isarraraz,
Sergey Rumyantsev,
Evan J. Reed,
Alexander A. Balandin,
Ludwig Bartels
Abstract:
Micron-scale single-crystal nanowires of metallic TaSe3, a material that forms -Ta-Se3-Ta-Se3- stacks separated from one another by a tubular van der Waals (vdW) gap, have been synthesized using chemical vapor deposition (CVD) on a SiO2/Si substrate, in a process compatible with semiconductor industry requirements. Their electrical resistivity was found unaffected by downscaling from the bulk to a…
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Micron-scale single-crystal nanowires of metallic TaSe3, a material that forms -Ta-Se3-Ta-Se3- stacks separated from one another by a tubular van der Waals (vdW) gap, have been synthesized using chemical vapor deposition (CVD) on a SiO2/Si substrate, in a process compatible with semiconductor industry requirements. Their electrical resistivity was found unaffected by downscaling from the bulk to as little as 7 nm in width and height, in striking contrast to the resistivity of copper for the same dimensions. While the bulk resistivity of TaSe3 is substantially higher than that of bulk copper, at the nanometer scale the TaSe3 wires become competitive to similar-sized copper ones. Moreover, we find that the vdW TaSe3 nanowires sustain current densities in excess of 108 A/cm2 and feature an electromigration energy barrier twice that of copper. The results highlight the promise of quasi-one-dimensional transition metal trichalcogenides for electronic interconnect applications and the potential of van der Waals materials for downscaled electronics.
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Submitted 14 March, 2019;
originally announced March 2019.
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A semi-empirical integrated microring cavity approach for 2D material optical index identification at 1.55 μm
Authors:
Rishi Maiti,
Rohit A. Hemnani,
Rubab Amin,
Zhizhen Ma,
Mohammad H. Tahersima,
Tom A. Empante,
Hamed Dalir,
Ritesh Agarwal,
Ludwig Bartels,
Volker J. Sorger
Abstract:
Atomically thin two-dimensional (2D) materials provide a wide range of basic building blocks with unique properties, making them ideal for heterogeneous integration with a mature chip platform for advances in optical communication technology. Control and understanding of the precise value of the optical index of these materials, however, is challenging, due to the small lateral flake dimension. He…
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Atomically thin two-dimensional (2D) materials provide a wide range of basic building blocks with unique properties, making them ideal for heterogeneous integration with a mature chip platform for advances in optical communication technology. Control and understanding of the precise value of the optical index of these materials, however, is challenging, due to the small lateral flake dimension. Here we demonstrate a semi-empirical method to determine the index of a 2D material (nMoTe2 of 4.36+0.011i) near telecommunication-relevant wavelength by integrating few layers of MoTe2 onto a micro-ring resonator. The placement, control, and optical-property understanding of 2D materials with integrated photonics paves a way for further studies of active 2D material-based optoelectronics and circuits.
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Submitted 22 December, 2019; v1 submitted 10 November, 2018;
originally announced November 2018.
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Large-Scale Arrays of Single- and Few-Layer MoS2 Nanomechanical Resonators
Authors:
Hao Jia,
Rui Yang,
Ariana E. Nguyen,
Sahar N. Alvillar,
Thomas Empante,
Ludwig Bartels,
Philip X. -L. Feng
Abstract:
We report on fabrication of large-scale arrays of suspended molybdenum disulfide (MoS2) atomic layers, as two-dimensional (2D) MoS2 nanomechanical resonators. We employ a water-assisted lift-off process to release chemical vapor deposited (CVD) MoS2 atomic layers from a donor substrate, followed by an all-dry transfer onto microtrench arrays. The resultant large arrays of suspended single- and few…
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We report on fabrication of large-scale arrays of suspended molybdenum disulfide (MoS2) atomic layers, as two-dimensional (2D) MoS2 nanomechanical resonators. We employ a water-assisted lift-off process to release chemical vapor deposited (CVD) MoS2 atomic layers from a donor substrate, followed by an all-dry transfer onto microtrench arrays. The resultant large arrays of suspended single- and few-layer MoS2 drumhead resonators (0.5 to 2um in diameter) offer fundamental resonances (f_0) in the very high frequency (VHF) band (up to ~120MHz) and excellent figures-of-merit up to f_0*Q ~ 3*10^10Hz. A stretched circular diaphragm model allows us to estimate low pre-tension levels of typically ~15mN/m in these devices. Compared to previous approaches, our transfer process features high yield and uniformity with minimal liquid and chemical exposure (only involving DI water), resulting in high-quality MoS2 crystals and exceptional device performance and homogeneity; and our process is readily applicable to other 2D materials.
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Submitted 13 July, 2016;
originally announced July 2016.
