Showing 1–2 of 2 results for author: Duret, A

New DRIE-Patterned Electrets for Vibration Energy Harvesting

Authors: S. Boisseau, A. -B. Duret, J. -J. Chaillout, G. Despesse

Abstract: This paper is about a new manufacturing process aimed at developing stable SiO2/Si3N4 patterned electrets using a Deep Reactive Ion Etching (DRIE) step for an application in electret-based Vibration Energy Harvesters (e-VEH). This process consists in forming continuous layers of SiO2/Si3N4 electrets in order to limit surface conduction phenomena and is a new way to see the problem of electret patt… ▽ More This paper is about a new manufacturing process aimed at developing stable SiO2/Si3N4 patterned electrets using a Deep Reactive Ion Etching (DRIE) step for an application in electret-based Vibration Energy Harvesters (e-VEH). This process consists in forming continuous layers of SiO2/Si3N4 electrets in order to limit surface conduction phenomena and is a new way to see the problem of electret patterning. Experimental results prove that patterned electrets charged by a positive corona discharge show excellent stability with high surface charge densities that may reach 5mC/m^2 on 1.1μm-thick layers, even with fine patterning and harsh temperature conditions (up to 250°C). This paves the way to new e-VEH designs and manufacturing processes. △ Less

Submitted 10 May, 2012; originally announced May 2012.

Comments: Proc. European Energy Conference, 2012

Journal ref: Proc. European Energy Conference, EPJ Web of Conferences, 33, 02010, 2012

Short Communication: Stable DRIE-patterned SiO2/Si3N4 electrets for electret-based vibration energy harvesters

Authors: S. Boisseau, A. B. Duret, G. Despesse, J. J. Chaillout, J. S. Danel, A. Sylvestre

Abstract: This paper is about a new manufacturing process aimed at developing stable SiO2/Si3N4 patterned electrets using a Deep Reactive Ion Etching (DRIE) step for an application in electret Vibration Energy Harvesters (VEH). Electrets charged by a positive corona discharge show excellent stability with high surface charge density that can reach 5mC/m^{2} on 1.1\mum-thick layers, even with fine patterning… ▽ More This paper is about a new manufacturing process aimed at developing stable SiO2/Si3N4 patterned electrets using a Deep Reactive Ion Etching (DRIE) step for an application in electret Vibration Energy Harvesters (VEH). Electrets charged by a positive corona discharge show excellent stability with high surface charge density that can reach 5mC/m^{2} on 1.1\mum-thick layers, even with fine patterning (down to 25\mum) and harsh temperature conditions (up to 250°C), paving the way to new electret VEH designs and manufacturing processes. △ Less

Submitted 30 November, 2011; originally announced November 2011.