Showing 1–1 of 1 results for author: Doll, G

X-ray Absorption Study of Pulsed Laser Deposited Boron Nitride Films

Authors: A. Chaiken, L. J. Terminello, J. Wong, G. L. Doll, T. Sato

Abstract: B and N K-edge x-ray absorption spectroscopy measurements have been performed on three BN thin films grown on Si substrates using ion-assisted pulsed laser deposition. Comparison of the films' spectra to those of several single-phase BN powder standards shows that the films consist primarily of $sp^2$ bonds. Other features in the films' spectra suggest the presence of secondary phases, possibly… ▽ More B and N K-edge x-ray absorption spectroscopy measurements have been performed on three BN thin films grown on Si substrates using ion-assisted pulsed laser deposition. Comparison of the films' spectra to those of several single-phase BN powder standards shows that the films consist primarily of $sp^2$ bonds. Other features in the films' spectra suggest the presence of secondary phases, possibly cubic or rhombohedral BN. Films grown at higher deposition rates and higher ion-beam voltages are found to be more disordered, in agreement with previous work. △ Less

Submitted 26 November, 1993; originally announced November 1993.

Comments: 7 pages, LaTeX 2.09. Figures not included, but available by fax. Send email to [email protected]