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Gold assisted molecular beam epitaxy of Ge nanostructures on Ge(100) Surface
Authors:
A. Rath,
J. K. Dash,
R. R. Juluri,
A. Ghosh,
P. V. Satyam
Abstract:
We report on the gold assisted epitaxial growth of Ge nanostructures under ultra high vacuum (UHV) conditions (\approx3\times 10-10 mbar) on clean Ge (100) surfaces. For this study, \approx2.0 nm thick Au samples were grown on the substrate surface by molecular beam epitaxy (MBE). Thermal annealing was carried out inside the UHV chamber at temperature \approx500°C and following this, well ordered…
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We report on the gold assisted epitaxial growth of Ge nanostructures under ultra high vacuum (UHV) conditions (\approx3\times 10-10 mbar) on clean Ge (100) surfaces. For this study, \approx2.0 nm thick Au samples were grown on the substrate surface by molecular beam epitaxy (MBE). Thermal annealing was carried out inside the UHV chamber at temperature \approx500°C and following this, well ordered gold nanostructures placed on pedestal Ge were formed. A \approx 2 nm Ge film was further deposited on the above surface while the substrate was kept at a temperature of \approx 500°C. The height of the Ge (pedestal) underneath gold increased along with the formation of small Ge islands. The effect of substrate temperature and role of gold on the formation of above structures has been discussed in detail. Electron microscopy (TEM, SEM) studies were carried out to determine the structure of Au - Ge nano systems.
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Submitted 1 August, 2012;
originally announced August 2012.
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Shape evolution of MBE grown Si$_{1-x}$Ge$_{x}$ structures on high index Si(5 5 12) surfaces: A temperature dependent study
Authors:
J. K. Dash,
A. Rath,
R. R. Juluri,
P. V. Satyam
Abstract:
The morphological evolution and the effect of growth temperature on size, orientation and composition of molecular beam epitaxy grown Ge-Si islands on Si(5 5 12) surfaces have been investigated in the temperature range from room temperature (RT) to 800$^\circ$C. Two modes of substrate heating i.e. radiative heating (RH) and direct current heating (DH) have been used. The post-growth characterizati…
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The morphological evolution and the effect of growth temperature on size, orientation and composition of molecular beam epitaxy grown Ge-Si islands on Si(5 5 12) surfaces have been investigated in the temperature range from room temperature (RT) to 800$^\circ$C. Two modes of substrate heating i.e. radiative heating (RH) and direct current heating (DH) have been used. The post-growth characterization was carried out ex situ by scanning electron microscopy (SEM), cross-sectional transmission electron microscopy (X-TEM) and Rutherford backscattering spectrometry (RBS). In the RH case, we found spherical island structures at 600$^\circ$C with a bimodal distribution and upon increasing temperature, the structures got faceted at 700$^\circ$C. At 800$^\circ$C thick ($\sim$ 122nm) dome like structures are formed bounded by facets. While in the case of DC heating, after the optimum critical temperature 600$^\circ$C, well aligned trapezoidal Si$_{1-x}$Ge$_x$ structures with a graded composition starts forming along the step edges. Interestingly, these aligned structures have been found only around 600$^\circ$C, neither at low temperature nor at higher temperatures.
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Submitted 7 September, 2012; v1 submitted 28 May, 2012;
originally announced May 2012.
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Structural modification in Au/Si(100) system: Role of surface oxide and vacuum level
Authors:
A. Rath,
J. K Dash,
R. R. Juluri,
P. V. Satyam
Abstract:
To understand surface structural modifications for Au/Si (100) system, a thin gold film of ~2.0 nm was deposited under ultra high vacuum (UHV) condition on reconstructed Si surfaces using molecular beam epitaxy (MBE). Post annealing was done at 500°C in three different vacuum conditions: (1) low vacuum (LV) furnace (10-2 mbar), (2) UHV (10-10 mbar) (MBE chamber), (3) high vacuum (HV) chamber. The…
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To understand surface structural modifications for Au/Si (100) system, a thin gold film of ~2.0 nm was deposited under ultra high vacuum (UHV) condition on reconstructed Si surfaces using molecular beam epitaxy (MBE). Post annealing was done at 500°C in three different vacuum conditions: (1) low vacuum (LV) furnace (10-2 mbar), (2) UHV (10-10 mbar) (MBE chamber), (3) high vacuum (HV) chamber. The variation in the overall shape of the gold nanostructures and finer changes at the edges, like rounding of corners has been reported in this work. Although well aligned nano rectangles were formed in both HV and LV cases, corner rounding is more prominent in LV case. Furthermore in UHV case, random structures were formed having sharp corners. In all the above three cases, samples were exposed to air (for half an hour) before annealing. To study the effect of surface oxide, in-situ annealing inside UHV-MBE chamber was done without exposing to air. Well aligned rectangles with sharp corners (no corner rounding) were formed. The details about the role of surface oxides in the corner rounding process are discussed.
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Submitted 24 April, 2012;
originally announced April 2012.
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Universality in Shape Evolution of Si$_{1-x}$Ge$_{x}$ Structures on High Index Silicon Surfaces
Authors:
J. K. Dash,
T. Bagarti,
A. Rath,
R. R. Juluri,
P. V. Satyam
Abstract:
The MBE grown Si$_{1-x}$Ge$_x$ islands on reconstructed high index surfaces, such as, Si(5 5 12), Si(5 5 7) and Si(5 5 3) show a universality in the shape evaluation and the growth exponent parameters, \emph{irrespective} of the substrate orientations and size of the island structures. This phenomena has been explained by incorporating a deviation parameter ($ε$) to the surface barrier term (…
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The MBE grown Si$_{1-x}$Ge$_x$ islands on reconstructed high index surfaces, such as, Si(5 5 12), Si(5 5 7) and Si(5 5 3) show a universality in the shape evaluation and the growth exponent parameters, \emph{irrespective} of the substrate orientations and size of the island structures. This phenomena has been explained by incorporating a deviation parameter ($ε$) to the surface barrier term ($E_D$) in the kinematic Monte Carlo (kMC) simulations as one of the plausible mechanisms.
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Submitted 2 April, 2012;
originally announced April 2012.
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Growth of Oriented Au Nanostructures: Role of Oxide at the Interface
Authors:
Ashutosh Rath,
J. K. Dash,
R. R. Juluri,
A. Rosenauer,
Marcos Schoewalter,
P. V. Satyam
Abstract:
We report on the formation of oriented gold nano structures on Si(100) substrate by annealing procedures in low vacuum (\approx10-2 mbar) and at high temperature (\approx 975^{\circ} C). Various thicknesses of gold films have been deposited with SiOx (using high vacuum thermal evaporation) and without SiOx (using molecular beam epitaxy) at the interface on Si(100). Electron microscopy measurements…
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We report on the formation of oriented gold nano structures on Si(100) substrate by annealing procedures in low vacuum (\approx10-2 mbar) and at high temperature (\approx 975^{\circ} C). Various thicknesses of gold films have been deposited with SiOx (using high vacuum thermal evaporation) and without SiOx (using molecular beam epitaxy) at the interface on Si(100). Electron microscopy measurements were performed to determine the morphology, orientation of the structures and the nature of oxide layer. Interfacial oxide layer, low vacuum and high temperature annealing conditions are found to be necessary to grow oriented gold structures. These gold structures can be transferred by simple scratching method.
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Submitted 5 March, 2012;
originally announced March 2012.
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Temperature-dependent electron microscopy study of Au thin films on Si (100) with and without native oxide layer as barrier at the interface
Authors:
Ashutosh Rath,
J. K. Dash,
R. R. Juluri,
A Rosenauer,
P V Satyam
Abstract:
Real time electron microscopy observation on morphological changes in gold nano structures deposited on Si (100) surfaces as a function of annealing temperatures has been reported. Two types of interfaces with the substrate silicon were used prior to gold thin film deposition: (i) without native oxide and on ultra-clean reconstructed Si surfaces and (ii) with native oxide covered Si surfaces. For…
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Real time electron microscopy observation on morphological changes in gold nano structures deposited on Si (100) surfaces as a function of annealing temperatures has been reported. Two types of interfaces with the substrate silicon were used prior to gold thin film deposition: (i) without native oxide and on ultra-clean reconstructed Si surfaces and (ii) with native oxide covered Si surfaces. For a \approx 2.0 nm thick Au films deposited on reconstructed Si(100) surfaces using molecular beam epitaxy method under ultra high vacuum conditions, aligned four-fold symmetric nanogold silicide structures formed at relatively lower temperatures (compared with the one with native oxide at the interface). For this system, 82% of the nanostructures were found to be nano rectangles like structures with an average length \approx 27 nm and aspect ratio of 1.13 at \approx 700°C. For \approx 5.0 nm thick Au films deposited on Si (100) surface with native oxide at the interface, formation of rectangular structures were observed at higher temperatures (\approx 850° C). At these high temperatures, desorption of the gold silicide followed the symmetry of the substrate. Native oxide at the interface was found to act like a barrier for the inter-diffusion phenomena. Structural characterization was carried out using advanced electron microscopy methods.
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Submitted 3 February, 2012;
originally announced February 2012.
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Nano scale phase separation in Au-Ge system on ultra clean Si(100) surfaces
Authors:
Ashutosh Rath,
J. K. Dash,
R. R. Juluri,
Marco Schowalter,
Knut Mueller,
A. Rosenauer,
P. V. Satyam
Abstract:
We report on the formation of lobe-lobe (bi-lobed) Au-Ge nanostructures under ultra high vacuum (UHV) conditions (\approx 3\times 10^{-10} mbar) on clean Si(100) surfaces. For this study, \approx 2.0 nm thick Au samples were grown on the substrate surface by molecular beam epitaxy (MBE). Thermal annealing was carried out inside the UHV chamber at temperature \apprx 500°C and following this, nearly…
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We report on the formation of lobe-lobe (bi-lobed) Au-Ge nanostructures under ultra high vacuum (UHV) conditions (\approx 3\times 10^{-10} mbar) on clean Si(100) surfaces. For this study, \approx 2.0 nm thick Au samples were grown on the substrate surface by molecular beam epitaxy (MBE). Thermal annealing was carried out inside the UHV chamber at temperature \apprx 500°C and following this, nearly square shaped Au_{x}Si_{1-x} nano structures of average length \approx 48 nm were formed. A \approx 2 nm Ge film was further deposited on the above surface while the substrate was kept at a temperature of \approx 500°C. Well ordered Au-Ge nanostructures where Au and Ge residing side by side (lobe-lobe structures) were formed. In our systematic studies, we show that, gold-silicide nanoalloy formation at the substrate (Si) surface is necessary for forming phase separated Au-Ge bilobed nanostructures. Electron microscopy (TEM, STEM-EDS, SEM) studies were carried out to determine the structure of Au - Ge nano systems. Rutherford backscattering Spectrometry measurements show gold inter-diffusion into substrate while it is absent for Ge.
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Submitted 3 February, 2012;
originally announced February 2012.