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Magnetic hyperthermia properties of nanoparticles inside lysosomes using kinetic Monte-Carlo simulations : influence of key parameters, of dipolar interactions and spatial variation of heating power
Authors:
R. P. Tan,
J. Carrey,
M. Respaud
Abstract:
Understanding the influence of dipolar interactions in magnetic hyperthermia (MH) experiments is of crucial importance for a fine optimization of nanoparticle (NP) heating power. In this study, we use a kinetic Monte-Carlo algorithm to calculate hysteresis loops, so both time and temperature are correctly taken into account. It is demonstrated that this algorithm correctly reproduces the high-freq…
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Understanding the influence of dipolar interactions in magnetic hyperthermia (MH) experiments is of crucial importance for a fine optimization of nanoparticle (NP) heating power. In this study, we use a kinetic Monte-Carlo algorithm to calculate hysteresis loops, so both time and temperature are correctly taken into account. It is demonstrated that this algorithm correctly reproduces the high-frequency hysteresis loop of both superparamagnetic NPs and ferromagnetic ones without any ad-hoc parameters. The algorithm is easily parallelizable so calculation on several processors decreases considerably calculation time. The specific absorption rate (SAR) of NPs dispersed inside spherical lysosomes is studied as a function of several key parameters: volume concentration, applied magnetic field, lysosome size, NP diameter and anisotropy. The influence of these parameters is illustrated and comprehensively explained. In summary, the effect of magnetic interactions is to increase the coercive field, saturation field and hysteresis area of major loops. However, for small amplitude magnetic field such as the ones used in MH, the heating power as function of concentration can increase, decrease or display a bell shape, depending of the relationship between the applied magnetic field and the coercive/saturation fields of the NPs. The hysteresis area is found to be well correlated to the parallel or antiparallel nature of the dipolar field acting on each NP. It is shown that the heating power increases or decreases sharply in the vicinity of the lysosome membrane. The amplitude of variation reaches more than one order of magnitude in certain conditions. Finally, implications of these various findings are discussed in the framework of MH optimization. It is concluded that feedbacks on specific points from biology experiments are required for further advance on the optimization of NPs for MH.
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Submitted 27 November, 2014; v1 submitted 10 July, 2014;
originally announced July 2014.
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An air-cooled Litz wire coil for measuring the high frequency hysteresis loops of magnetic samples : a useful setup for magnetic hyperthermia applications
Authors:
V. Connord,
B. Mehdaoui,
R. P. Tan,
J. Carrey,
M. Respaud
Abstract:
A low-cost and simple setup for measuring the high-frequency hysteresis loops of magnetic samples is described. An AMF in the range 6-100 kHz with amplitude up to 80 mT is produced by a Litz wire coil. The latter is air-cooled using a forced-air approach so no water flow is required to run the setup. High-frequency hysteresis loops are measured using a system of pick-up coils and numerical integra…
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A low-cost and simple setup for measuring the high-frequency hysteresis loops of magnetic samples is described. An AMF in the range 6-100 kHz with amplitude up to 80 mT is produced by a Litz wire coil. The latter is air-cooled using a forced-air approach so no water flow is required to run the setup. High-frequency hysteresis loops are measured using a system of pick-up coils and numerical integration of signals. Reproducible measurements are obtained in the frequency range of 6-56 kHz. Measurement examples on ferrite cylinders and on iron oxide nanoparticle ferrofluids are shown. Comparison with other measurement methods of the hysteresis loop area (complex susceptibility, quasi-static hysteresis loops and calorific measurements) is provided and shows the coherency of the results obtained with this setup. This setup is well adapted to the magnetic characterization of colloidal solutions of MNPs for magnetic hyperthermia applications.
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Submitted 16 June, 2014;
originally announced June 2014.
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Increase of magnetic hyperthermia efficiency due to dipolar interactions in low anisotropy magnetic nanoparticles : theoretical and experimental results
Authors:
B. Mehdaoui,
R. P. Tan,
A. Meffre,
J. Carrey,
S. Lachaize,
B. Chaudret,
M. Respaud
Abstract:
When magnetic nanoparticles (MNPs) are single-domain and magnetically independent, their magnetic properties and the conditions to optimize their efficiency in magnetic hyperthermia applications are now well-understood. However, the influence of magnetic interactions on magnetic hyperthermia properties is still unclear. Here, we report hyperthermia and high-frequency hysteresis loop measurements o…
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When magnetic nanoparticles (MNPs) are single-domain and magnetically independent, their magnetic properties and the conditions to optimize their efficiency in magnetic hyperthermia applications are now well-understood. However, the influence of magnetic interactions on magnetic hyperthermia properties is still unclear. Here, we report hyperthermia and high-frequency hysteresis loop measurements on a model system consisting of MNPs with the same size but a varying anisotropy, which is an interesting way to tune the relative strength of magnetic interactions. A clear correlation between the MNP anisotropy and the squareness of their hysteresis loop in colloidal solution is observed : the larger the anisotropy, the smaller the squareness. Since low anisotropy MNPs display a squareness higher than the one of magnetically independent nanoparticles, magnetic interactions enhance their heating power in this case. Hysteresis loop calculations of independent and coupled MNPs are compared to experimental results. It is shown that the observed features are a natural consequence of the formation of chains and columns of MNPs during hyperthermia experiments: in these structures, when the MNP magnetocristalline anisotropy is small enough to be dominated by magnetic interactions, the hysteresis loop shape tends to be rectangular, which enhance their efficiency. On the contrary, when MNPs do not form chains and columns, magnetic interactions reduces the hysteresis loop squareness and the efficiency of MNPs compared to independent ones. The present work should improve the understanding and interpretation of magnetic hyperthermia experiments.
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Submitted 21 January, 2013;
originally announced January 2013.
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Influence of a transverse static magnetic field on the magnetic hyperthermia properties and high-frequency hysteresis loops of ferromagnetic FeCo nanoparticles
Authors:
B. Mehdaoui,
J. Carrey,
M. Stadler,
A. Cornejo,
C. Nayral,
F. Delpech,
B. Chaudret,
M. Respaud
Abstract:
The influence of a transverse static magnetic field on the magnetic hyperthermia properties is studied on a system of large-losses ferromagnetic FeCo nanoparticles. The simultaneous measurement of the high-frequency hysteresis loops and of the temperature rise provides an interesting insight into the losses and heating mechanisms. A static magnetic field of only 40 mT is enough to cancel the heati…
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The influence of a transverse static magnetic field on the magnetic hyperthermia properties is studied on a system of large-losses ferromagnetic FeCo nanoparticles. The simultaneous measurement of the high-frequency hysteresis loops and of the temperature rise provides an interesting insight into the losses and heating mechanisms. A static magnetic field of only 40 mT is enough to cancel the heating properties of the nanoparticles, a result reproduced using numerical simulations of hysteresis loops. These results cast doubt on the possibility to perform someday magnetic hyperthermia inside a magnetic resonance imaging setup.
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Submitted 12 January, 2012;
originally announced January 2012.
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Simple models for dynamic hysteresis loops calculation: Application to hyperthermia optimization
Authors:
J. Carrey,
B. Mehdaoui,
M. Respaud
Abstract:
To optimize the heating properties of magnetic nanoparticles (MNPs) in magnetic hyperthermia applications, it is necessary to calculate the area of their hysteresis loops in an alternating magnetic field. The three types of theories suitable for describing the hysteresis loops of MNPs are presented and compared to numerical simulations: equilibrium functions, Stoner-Wohlfarth model based theories…
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To optimize the heating properties of magnetic nanoparticles (MNPs) in magnetic hyperthermia applications, it is necessary to calculate the area of their hysteresis loops in an alternating magnetic field. The three types of theories suitable for describing the hysteresis loops of MNPs are presented and compared to numerical simulations: equilibrium functions, Stoner-Wohlfarth model based theories (SWMBTs) and linear response theory (LRT). Suitable formulas to calculate the hysteresis area of major cycles are deduced from SWMBTs and from numerical simulations; the domain of validity of the analytical formula is explicitly studied. In the case of minor cycles, the hysteresis area calculations are based on the LRT. A perfect agreement between LRT and numerical simulations of hysteresis loops is obtained. The domain of validity of the LRT is explicitly studied. Formulas to calculate the hysteresis area at low field valid for any anisotropy of the MNP are proposed. Numerical simulations of the magnetic field dependence of the area show it follows power-laws with a large range of exponents. Then, analytical expressions derived from LRT and SWMBTs are used for a theoretical study of magnetic hyperthermia. It is shown that LRT is only pertinent for MNPs with strong anisotropy and that SWMBTs should be used for weak anisotropy MNPs. The optimum volume of MNPs for magnetic hyperthermia as function of material and experimental parameters is derived. The maximum specific absorption rate (SAR) achievable is calculated versus the MNP anisotropy. It is shown that an optimum anisotropy increases the SAR and reduces the detrimental effects of size distribution. The optimum anisotropy is simple to calculate and depends on the magnetic field used in the hyperthermia experiments and on the MNP magnetization only. The theoretical optimum parameters are compared to the one of several magnetic materials.
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Submitted 3 November, 2010; v1 submitted 12 July, 2010;
originally announced July 2010.
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Magnetic anisotropy determination and magnetic hyperthermia properties of small Fe nanoparticles in the superparamagnetic regime
Authors:
B. Mehdaoui,
A. Meffre,
L. -M. Lacroix,
J. Carrey,
S. Lachaize,
M. Respaud,
M. Gougeon,
B. Chaudret
Abstract:
We report on the magnetic and hyperthermia properties of iron nanoparticles synthesized by organometallic chemistry. They are 5.5 nm in diameter and display a saturation magnetization close to the bulk one. Magnetic properties are dominated by the contribution of aggregates of nanoparticles with respect to individual isolated nanoparticles. Alternative susceptibility measurements are been perfor…
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We report on the magnetic and hyperthermia properties of iron nanoparticles synthesized by organometallic chemistry. They are 5.5 nm in diameter and display a saturation magnetization close to the bulk one. Magnetic properties are dominated by the contribution of aggregates of nanoparticles with respect to individual isolated nanoparticles. Alternative susceptibility measurements are been performed on a low interacting system obtained after eliminating the aggregates by centrifugation. A quantitative analysis using the Gittleman s model allow a determination of the effective anisotropy Keff = 1.3 * 10^5 J.m^{-3}, more than two times the magnetocristalline value of bulk iron. Hyperthermia measurements are performed on agglomerates of nanoparticles at a magnetic field up to 66 mT and at frequencies in the range 5-300 kHz. Maximum measured SAR is 280 W/g at 300 kHz and 66 mT. Specific absorption rate (SAR) displays a square dependence with the magnetic field below 30 mT but deviates from this power law at higher value. SAR is linear with the applied frequency for mu_0H=19 mT. The deviations from the linear response theory are discussed. A refined estimation of the optimal size of iron nanoparticles for hyperthermia applications is provided using the determined effective anisotropy value.
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Submitted 23 November, 2009;
originally announced November 2009.
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Room temperature Giant Spin-dependent Photoconductivity in dilute nitride semiconductors
Authors:
F. Zhao,
A. Balocchi,
A. Kunold,
J. Carrey,
H. Carrère,
T. Amand,
N. Ben Abdallah,
J. C. Harmand,
X. Marie
Abstract:
By combining optical spin injection techniques with transport spectroscopy tools, we demonstrate a spin-photodetector allowing for the electrical measurement and active filtering of conduction band electron spin at room temperature in a non-magnetic GaAsN semiconductor structure. By switching the polarization of the incident light from linear to circular, we observe a Giant Spin-dependent Photoc…
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By combining optical spin injection techniques with transport spectroscopy tools, we demonstrate a spin-photodetector allowing for the electrical measurement and active filtering of conduction band electron spin at room temperature in a non-magnetic GaAsN semiconductor structure. By switching the polarization of the incident light from linear to circular, we observe a Giant Spin-dependent Photoconductivity (GSP) reaching up to 40 % without the need of an external magnetic field. We show that the GSP is due to a very efficient spin filtering effect of conduction band electrons on Nitrogen-induced Ga self-interstitial deep paramagnetic centers.
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Submitted 1 March, 2010; v1 submitted 24 July, 2009;
originally announced July 2009.
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Large specific absorption rates in the magnetic hyperthermia properties of metallic iron nanocubes
Authors:
B. Mehdaoui,
A. Meffre,
L. -M. Lacroix,
J. Carrey,
S. Lachaize,
M. Respaud,
M. Gougeon,
B. Chaudret
Abstract:
We report on the magnetic hyperthermia properties of chemically synthesized ferromagnetic 11 and 16 nm Fe(0) nanoparticles of cubic shape displaying the saturation magnetization of bulk iron. The specific absorption rate measured on 16 nm nanocubes is 1690+-160 W/g at 300 kHz and 66 mT. This corresponds to specific losses-per-cycle of 5.6 mJ/g, largely exceeding the ones reported in other systems…
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We report on the magnetic hyperthermia properties of chemically synthesized ferromagnetic 11 and 16 nm Fe(0) nanoparticles of cubic shape displaying the saturation magnetization of bulk iron. The specific absorption rate measured on 16 nm nanocubes is 1690+-160 W/g at 300 kHz and 66 mT. This corresponds to specific losses-per-cycle of 5.6 mJ/g, largely exceeding the ones reported in other systems. A way to quantify the degree of optimization of any system with respect to hyperthermia applications is proposed. Applied here, this method shows that our nanoparticles are not fully optimized, probably due to the strong influence of magnetic interactions on their magnetic response. Once protected from oxidation and further optimized, such nano-objects could constitute efficient magnetic cores for biomedical applications requiring very large heating power.
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Submitted 5 May, 2010; v1 submitted 23 July, 2009;
originally announced July 2009.
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Magnetic hyperthermia in single-domain monodisperse FeCo nanoparticles: Evidences for Stoner-Wohlfarth behaviour and large losses
Authors:
L. -M. Lacroix,
R. Bel Malaki,
J. Carrey,
S. Lachaize,
G. F. Goya,
B. Chaudret,
M. Respaud
Abstract:
We report on hyperthermia measurements on a colloidal solution of 15 nm monodisperse FeCo nanoparticles (NPs). Losses as a function of the magnetic field display a sharp increase followed by a plateau, which is what is expected for losses of ferromagnetic single-domain NPs. The frequency dependence of the coercive field is deduced from hyperthermia measurement and is in quantitative agreement wi…
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We report on hyperthermia measurements on a colloidal solution of 15 nm monodisperse FeCo nanoparticles (NPs). Losses as a function of the magnetic field display a sharp increase followed by a plateau, which is what is expected for losses of ferromagnetic single-domain NPs. The frequency dependence of the coercive field is deduced from hyperthermia measurement and is in quantitative agreement with a simple model of non-interacting NPs. The measured losses (1.5 mJ/g) compare to the highest of the literature, though the saturation magnetization of the NPs is well below the bulk one.
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Submitted 22 October, 2008;
originally announced October 2008.
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Magnetoresistance and collective Coulomb blockade in super-lattices of ferromagnetic CoFe nanoparticles
Authors:
R. P. Tan,
J. Carrey,
C. Desvaux,
L. -M. Lacroix,
P. Renaud,
B. Chaudret,
M. Respaud
Abstract:
We report on transport properties of millimetric super-lattices of CoFe nanoparticles surrounded by organic ligands. R(T)s follow R(T) = R_0.exp(T/T_0)^0.5 with T_0 ranging from 13 to 256 K. At low temperature I(V)s follow I=K[(V-V_T)/V_T]^ksi with ksi ranging 3.5 to 5.2. I(V) superpose on a universal curve when shifted by a voltage proportional to the temperature. Between 1.8 and 10 K a high-fi…
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We report on transport properties of millimetric super-lattices of CoFe nanoparticles surrounded by organic ligands. R(T)s follow R(T) = R_0.exp(T/T_0)^0.5 with T_0 ranging from 13 to 256 K. At low temperature I(V)s follow I=K[(V-V_T)/V_T]^ksi with ksi ranging 3.5 to 5.2. I(V) superpose on a universal curve when shifted by a voltage proportional to the temperature. Between 1.8 and 10 K a high-field magnetoresistance with large amplitude and a strong voltage-dependence is observed. Its amplitude only depends on the magnetic field/temperature ratio. Its origin is attributed to the presence of paramagnetic states present at the surface or between the nanoparticles. Below 1.8 K, this high-field magnetoresistance abruptly disappears and inverse tunnelling magnetoresistance is observed, the amplitude of which does not exceed 1%. At this low temperature, some samples display in their I(V) characteristics abrupt and hysteretic transitions between the Coulomb blockade regime and the conductive regime. The increase of the current during these transitions can be as high as a factor 30. The electrical noise increases when the sample is near the transition. The application of a magnetic field decreases the voltage at which these transitions occur so magnetic-field induced transitions are also observed. Depending on the applied voltage, the temperature and the amplitude of the magnetic field, the magnetic-field induced transitions are either reversible or irreversible. These abrupt and hysteretic transitions are also observed in resistance-temperature measurements. They could be the soliton avalanches predicted by Sverdlov et al. [Phys. Rev. B 64, 041302 (R), 2001] or could also be interpreted as a true phase transition between a Coulomb glass phase to a liquid phase of electrons.
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Submitted 8 April, 2009; v1 submitted 7 July, 2008;
originally announced July 2008.
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A frequency-adjustable electromagnet for hyperthermia measurements on magnetic nanoparticles
Authors:
L. -M. Lacroix,
J. Carrey,
M. Respaud
Abstract:
We describe a low-cost and simple setup for hyperthermia measurements on colloidal solutions of magnetic nanoparticles (ferrofluids) with a frequency-adjustable magnetic field in the range 5-500 kHz produced by an electromagnet. By optimizing the general conception and each component (nature of the wires, design of the electromagnet), a highly efficient setup is obtained. For instance, in a usef…
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We describe a low-cost and simple setup for hyperthermia measurements on colloidal solutions of magnetic nanoparticles (ferrofluids) with a frequency-adjustable magnetic field in the range 5-500 kHz produced by an electromagnet. By optimizing the general conception and each component (nature of the wires, design of the electromagnet), a highly efficient setup is obtained. For instance, in a useful gap of 1.1 cm, a magnetic field of 4.8 mT is generated at 100 kHz and 500 kHz with an output power of 3.4 W and 75 W, respectively. A maximum magnetic field of 30 mT is obtained at 100 kHz. The temperature of the colloidal solution is measured using optical fiber sensors. To remove contributions due to heating of the electromagnet, a differential measurement is used. In this configuration the sensitivity is better than 1.5 mW at 100 kHz and 19.3 mT. This setup allows one to measure weak heating powers on highly diluted colloidal solutions. The hyperthermia characteristics of a solution of Fe nanoparticles are described, where both the magnetic field and the frequency dependence of heating power have been measured.
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Submitted 18 June, 2008;
originally announced June 2008.
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High-field and low field magnetoresistance of CoFe nanoparticles elaborated by organometallic chemistry
Authors:
Reasmey P. Tan,
Julian Carrey,
Marc Respaud,
Celine Desvaux,
Philippe Renaud,
Bruno Chaudret
Abstract:
We report on magnetotransport measurements on CoFe nanoparticles surrounded by an insulating organic layer. Samples were obtained by evaporating a solution of nanoparticles on a patterned substrate. Typical behaviour of Coulomb blockade in array of nanoparticles is observed. High and low field magnetoresistance have been evidenced. Below 10 K, a large high-field magnetoresistance is measured, re…
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We report on magnetotransport measurements on CoFe nanoparticles surrounded by an insulating organic layer. Samples were obtained by evaporating a solution of nanoparticles on a patterned substrate. Typical behaviour of Coulomb blockade in array of nanoparticles is observed. High and low field magnetoresistance have been evidenced. Below 10 K, a large high-field magnetoresistance is measured, reaching up to 500 %. Its amplitude decreases strongly with increasing voltage. At 1.6 K, this high-field magnetoresistance vanishes and an inverse low field tunnelling magnetoresistance is observed.
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Submitted 7 February, 2008;
originally announced February 2008.
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Voltage and Temperature Dependence of High-Field Magnetoresistance in Arrays of Magnetic Nanoparticles
Authors:
Reasmey P. Tan,
Julian Carrey,
Marc Respaud
Abstract:
Huge values of high field magnetoresistance have been recently reported in large arrays of CoFe nanoparticles embedded in an organic insulating lattice in the Coulomb blockade regime. An unusual exponential decrease of magnetoresistance with increasing voltage was observed, as well as a characteristic scaling of the magnetoresistance amplitude versus the field-temperature ratio. We propose a mod…
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Huge values of high field magnetoresistance have been recently reported in large arrays of CoFe nanoparticles embedded in an organic insulating lattice in the Coulomb blockade regime. An unusual exponential decrease of magnetoresistance with increasing voltage was observed, as well as a characteristic scaling of the magnetoresistance amplitude versus the field-temperature ratio. We propose a model which takes into account the influence of paramagnetic impurities on the transport properties of the system to describe these features. It is assumed that the non-colinearity between the core spins inside the nanoparticles and the paramagnetic impurities can be modelled by an effective tunnel barrier, the height of which depends on the relative angle between the magnetization of both kind of spins. The influence on the magnetotransport properties of the height and the thickness of the effective tunnel barrier of the magnetic moment of the impurity, as well as the bias voltage are studied. This model allows us to reproduce the large magnetoresistance magnitude observed and its strong voltage dependence, with realistic parameters.
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Submitted 7 February, 2008;
originally announced February 2008.
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3000 % high-field magnetoresistance in super-lattices of CoFe nanoparticles
Authors:
Reasmey P. Tan,
Julian Carrey,
Marc Respaud,
Celine Desvaux,
Philippe Renaud,
Bruno Chaudret
Abstract:
We report on magnetotransport measurements on millimetre-large super-lattices of CoFe nanoparticles surrounded by an organic layer. Electrical properties are typical of Coulomb blockade in three dimensional arrays of nanoparticles. A large high-field magnetoresistance, reaching up to 3000 %, is measured between 1.8 and 10 K. This exceeds by two orders of magnitude magnetoresistance values genera…
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We report on magnetotransport measurements on millimetre-large super-lattices of CoFe nanoparticles surrounded by an organic layer. Electrical properties are typical of Coulomb blockade in three dimensional arrays of nanoparticles. A large high-field magnetoresistance, reaching up to 3000 %, is measured between 1.8 and 10 K. This exceeds by two orders of magnitude magnetoresistance values generally measured in arrays of 3d metals ferromagnetic nanoparticles. The magnetoresistance amplitude scales with the magnetic field / temperature ratio and displays an unusual exponential dependency with the applied voltage. The magnetoresistance abruptly disappears below 1.8 K. We propose that the magnetoresistance is due to some individual paramagnetic moments localized between the metallic core of the nanoparticles, the origin of which is discussed.
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Submitted 9 October, 2007;
originally announced October 2007.
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Transport in Magnetic Nanoparticles Super-Lattices : Coulomb Blockade, Hysteresis and Magnetic Field Induced Switching
Authors:
Reasmey P. Tan,
Julian Carrey,
Celine Desvaux,
Jeremie Grisolia,
Philippe Renaud,
Bruno Chaudret,
Marc Respaud
Abstract:
We report on magnetotransport measurements on millimetric super-lattices of Co-Fe nanoparticles surrounded by an organic layer. At low temperature, the transition between the Coulomb blockade and the conductive regime becomes abrupt and hysteretic. The transition between both regime can be induced by a magnetic field, leading to a novel mechanism of magnetoresistance. Between 1.8 and 10 K, high-…
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We report on magnetotransport measurements on millimetric super-lattices of Co-Fe nanoparticles surrounded by an organic layer. At low temperature, the transition between the Coulomb blockade and the conductive regime becomes abrupt and hysteretic. The transition between both regime can be induced by a magnetic field, leading to a novel mechanism of magnetoresistance. Between 1.8 and 10 K, high-field magnetoresistance due to magnetic disorder at the surface of the particles is also observed. Below 1.8 K, this magnetoresistance abruptly collapses and a low-field magnetoresistance is observed.
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Submitted 9 October, 2007;
originally announced October 2007.
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Nanolithography based on real-time electrically-controlled indentation with an atomic force microscope for nanocontacts elaboration
Authors:
K. Bouzehouane,
S. Fusil,
M. Bibes,
J. Carrey,
T. Blon,
P. Seneor,
V. Cros,
L. Vila
Abstract:
We report on the fabrication of nanocontacts by indentation of an ultrathin insulating photoresist layer deposited on various types of conductive structures. A modified atomic force microscope (AFM) designed for local resistance measurements is used as a nanoindenter. The nanoindentation is performed while measuring continuously the resistance between the conductive tip of the AFM and the conduc…
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We report on the fabrication of nanocontacts by indentation of an ultrathin insulating photoresist layer deposited on various types of conductive structures. A modified atomic force microscope (AFM) designed for local resistance measurements is used as a nanoindenter. The nanoindentation is performed while measuring continuously the resistance between the conductive tip of the AFM and the conductive layer, which is used as the trigger parameter to stop the indentation. This allows an extremely accurate control of the indentation process. The indented hole is subsequently filled by a metal to create a contact on the underlying layer. We show that nanocontacts in the range of 1 to 10 nm2 can be created with this technique.
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Submitted 3 June, 2003;
originally announced June 2003.
