Bright quantum dot light sources using monolithic microlenses on gold back-reflectors
Authors:
Moritz Langer,
Sai A. Dhurjati,
Yared G. Zena,
Ahmad Rahimi,
Mandira Pal,
Liesa Raith,
Sandra Nestler,
Riccardo Bassoli,
Frank H. P. Fitzek,
Oliver G. Schmidt,
Caspar Hopfmann
Abstract:
We present the fabrication process of bright $GaAs$ quantum dot (QD) photon sources by non-deterministic embedding into broadband monolithic $Al_{0.15}Ga_{0.85}As$ microlens arrays on gold-coated substrates. Arrays of cylindrical photoresist templates, with diameters ranging from $2$ $μm$ to $5$ $μm$, are thermally reflowed and subsequently transferred into the $Al_{0.15}Ga_{0.85}As$ thin-film sem…
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We present the fabrication process of bright $GaAs$ quantum dot (QD) photon sources by non-deterministic embedding into broadband monolithic $Al_{0.15}Ga_{0.85}As$ microlens arrays on gold-coated substrates. Arrays of cylindrical photoresist templates, with diameters ranging from $2$ $μm$ to $5$ $μm$, are thermally reflowed and subsequently transferred into the $Al_{0.15}Ga_{0.85}As$ thin-film semiconductor heterostructure with embedded quantum dots through an optimized anisotropic and three-dimensional shape-preserving reactive ion etching process. This methodology facilitated the fabrication of large-scale ($2$ $mm$ $\times$ $4$ $mm$) and densely packed arrays of uniformly shaped microlenses ($\sim$ $40 \times 10^3$ $mm^{-1}$), with the brightest emissions from QDs embedded in microlenses exhibiting lateral diameters and heights of $2.7$ $μm$ and $1.35$ $μm$, respectively. Finite-difference time-domain simulations of both idealized and fabricated lens shapes provide a comprehensive three-dimensional analysis of the device performance and optimization potentials such as anti-reflection coatings. It is found that free-space extraction (fiber-coupled) efficiencies of up to $62$ $\%$ ($37$ $\%$) are achievable for hemispherical QD-microlenses on gold-coated substrates. A statistical model for the fabrication yield of QD-microlenses is developed and experimentally corroborated by photoluminescence spectroscopy of fabricated microlens arrays. This analysis exhibited a free-space intensity enhancement by factors of up to $\times 200$ in approximately $1$ out of $200$ microlenses, showing good agreement to the theoretical expectations. This scalable fabrication strategy underscores the potential of these compact, high-efficiency sources offering new prospects for applications of these devices in future large-scale quantum networks.
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Submitted 10 March, 2025;
originally announced March 2025.
An ultra-compact deterministic source of maximally entangled photon pairs
Authors:
M. Langer,
P. Ruchka,
A. Rahimi,
S. Jakovljevic,
Y. G. Zena,
A. Danilov,
M. Pal,
R. Bassoli,
F. H. P. Fitzek,
O. G. Schmidt,
H. Giessen,
C. Hopfmann
Abstract:
We present an ultra-compact source of maximally entangled on-demand photon pairs. Our results are based on coupling of single GaAs quantum dots that are embedded in monolithic micro-lenses to a single-mode fiber with directly attached to 3D-printed micro-optics (NA of 0.6) inside a cryogenic environment. This approach, which is geared towards future integration into industrial environments, yields…
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We present an ultra-compact source of maximally entangled on-demand photon pairs. Our results are based on coupling of single GaAs quantum dots that are embedded in monolithic micro-lenses to a single-mode fiber with directly attached to 3D-printed micro-optics (NA of 0.6) inside a cryogenic environment. This approach, which is geared towards future integration into industrial environments, yields state-of-the-art entangled photon pair creation performance while retaining flexibility and adjustability required for long-term operation of such a device - all while dramatically reducing the overall system footprint. We demonstrate near diffraction-limited performance and hyperspectral imaging utilizing a 3D-printed micro-objective with a full width at half maximum resolution limit of 604(16) nm when operating the system at a cryogenic temperature of 3.8 K. Furthermore, we prove that this system can be used to achieve single photon emission rates of 392(20) kHz at a 76 MHz pump rate and purities of 99.2(5) % using two-photon resonant excitation. Utilizing the exciton-biexciton emission cascade available in GaAs quantum dots under resonant excitation, near maximally entangled photon pairs with peak entanglement negatives 2n of 0.96(2) in a 4 ps time window, and 0.81(1) when averaged over one exciton lifetime, are demonstrated.
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Submitted 11 March, 2025; v1 submitted 17 February, 2025;
originally announced February 2025.
