Soft chemistry assisted On-chip Integration of Nanostructured quartz-based Piezoelectric Microelectromechanical System
Authors:
Claire Jolly,
Andres Gomez,
David Sanchez-Fuentes,
Dilek Cakiroglu,
Raissa Rathar,
Nicolas Maurin,
Ricardo Garcia-Bermejo,
Benoit Charlot,
Marti Gich,
Michael Bahriz,
Laura Picas,
Adrian Carretero-Genevrier
Abstract:
The development of advanced piezoelectric quartz MEMS for sensing and precise frequency control applications requires the nanostructuration and on chip integration on silicon of this material. However, the current quartz manufacturing methods are based on bonding bulk micromachined crystals on silicon, which limits the size, the performance, the integration cost and the scalability of quartz micro…
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The development of advanced piezoelectric quartz MEMS for sensing and precise frequency control applications requires the nanostructuration and on chip integration on silicon of this material. However, the current quartz manufacturing methods are based on bonding bulk micromachined crystals on silicon, which limits the size, the performance, the integration cost and the scalability of quartz micro devices. Here, we combine chemical solution deposition, soft nanoimprint lithography and top down microfabrication processes to develop the first nanostructured epitaxial 100 quartz 100 Si piezoelectric cantilevers. The coherent Si quartz interface and film thinness combined with a controlled nanostructuration on silicon insulator silicon technology substrates provides high force and mass sensitivity while preserving the mechanical quality factor of the microelectromechanical systems. This work proves that biocompatible nanostructured epitaxial piezoelectric quartz based MEMS on silicon can be engineered at low cost by combining soft chemistry and top down lithographic techniques.
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Submitted 15 July, 2020;
originally announced July 2020.
A micropillar for cavity optomechanics
Authors:
A. G. Kuhn,
M. Bahriz,
O. Ducloux,
C. Chartier,
O. Le Traon,
T. Briant,
P. -F. Cohadon,
A. Heidmann,
C. Michel,
L. Pinard,
R. Flaminio
Abstract:
We present a new micromechanical resonator designed for cavity optomechanics. We have used a micropillar geometry to obtain a high-frequency mechanical resonance with a low effective mass and a very high quality factor. We have coated a 60-$μ$m diameter low-loss dielectric mirror on top of the pillar and are planning to use this micromirror as part of a high-finesse Fabry-Perot cavity, to laser co…
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We present a new micromechanical resonator designed for cavity optomechanics. We have used a micropillar geometry to obtain a high-frequency mechanical resonance with a low effective mass and a very high quality factor. We have coated a 60-$μ$m diameter low-loss dielectric mirror on top of the pillar and are planning to use this micromirror as part of a high-finesse Fabry-Perot cavity, to laser cool the resonator down to its quantum ground state and to monitor its quantum position fluctuations by quantum-limited optical interferometry.
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Submitted 19 July, 2011;
originally announced July 2011.
