Showing 1–2 of 2 results for author: Bückle, M
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Universal length dependence of tensile stress in nanomechanical string resonators
Authors:
Maximilian Bückle,
Yannick S. Klaß,
Felix B. Nägele,
Rémy Braive,
Eva M. Weig
Abstract:
We investigate the tensile stress in freely suspended nanomechanical string resonators, and observe a material-independent dependence on the resonator length. We compare strongly stressed sting resonators fabricated from four different material systems based on amorphous silicon nitride, crystalline silicon carbide as well as crystalline indium gallium phosphide. The tensile stress is found to inc…
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We investigate the tensile stress in freely suspended nanomechanical string resonators, and observe a material-independent dependence on the resonator length. We compare strongly stressed sting resonators fabricated from four different material systems based on amorphous silicon nitride, crystalline silicon carbide as well as crystalline indium gallium phosphide. The tensile stress is found to increase by approximately 50% for shorter resonators. We establish a simple elastic model to describe the observed length dependence of the tensile stress. The model accurately describes our experimental data. This opens a perspective for stress-engineering the mechanical quality factor of nanomechanical string resonators.
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Submitted 7 April, 2021; v1 submitted 1 December, 2020;
originally announced December 2020.
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Stress control of tensile-strained In$_{1-x}$Ga$_{x}$P nanomechanical string resonators
Authors:
Maximilian Bückle,
Valentin C. Hauber,
Garrett D. Cole,
Claus Gärtner,
Ute Zeimer,
Jörg Grenzer,
Eva M. Weig
Abstract:
We investigate the mechanical properties of freely suspended nanostrings fabricated from tensile-stressed, crystalline In$_{1-x}$Ga$_{x}$P. The intrinsic strain is a consequence of the epitaxial growth given by the lattice mismatch between the thin film and the substrate which is confirmed by x-ray diffraction measurements. The flexural eigenfrequencies of the nanomechanical string resonators reve…
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We investigate the mechanical properties of freely suspended nanostrings fabricated from tensile-stressed, crystalline In$_{1-x}$Ga$_{x}$P. The intrinsic strain is a consequence of the epitaxial growth given by the lattice mismatch between the thin film and the substrate which is confirmed by x-ray diffraction measurements. The flexural eigenfrequencies of the nanomechanical string resonators reveal an orientation dependent stress with a maximum value of 650 MPa. The angular dependence is explained by a combination of anisotropic Young's modulus and a change of elastic properties caused by defects. As a function of the crystal orientation a stress variation of up to 50 % is observed. This enables fine tuning of the tensile stress for any given Ga content $x$, which implies interesting prospects for the study of high Q nanomechanical systems.
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Submitted 15 November, 2018; v1 submitted 29 August, 2018;
originally announced August 2018.
