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Geometry dependence of TLS noise and loss in a-SiC:H parallel plate capacitors for superconducting microwave resonators
Authors:
K. Kouwenhoven,
G. P. J. van Doorn,
B. T. Buijtendorp,
S. A. H. de Rooij,
D. Lamers,
D. J. Thoen,
V. Murugesan,
J. J. A. Baselmans,
P. J. de Visser
Abstract:
Parallel plate capacitors (PPC) significantly reduce the size of superconducting microwave resonators, reducing the pixel pitch for arrays of single photon energy-resolving kinetic inductance detectors (KIDs). The frequency noise of KIDs is typically limited by tunneling Two-Level Systems (TLS), which originate from lattice defects in the dielectric materials required for PPCs. How the frequency n…
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Parallel plate capacitors (PPC) significantly reduce the size of superconducting microwave resonators, reducing the pixel pitch for arrays of single photon energy-resolving kinetic inductance detectors (KIDs). The frequency noise of KIDs is typically limited by tunneling Two-Level Systems (TLS), which originate from lattice defects in the dielectric materials required for PPCs. How the frequency noise level depends on the PPC's dimensions has not been experimentally addressed. We measure the frequency noise of 56 resonators with a-SiC:H PPCs, which cover a factor 44 in PPC area and a factor 4 in dielectric thickness. To support the noise analysis, we measure the TLS-induced, power-dependent, intrinsic loss and temperature-dependent resonance frequency shift of the resonators. From the TLS models, we expect a geometry-independent microwave loss and resonance frequency shift, set by the TLS properties of the dielectric. However, we observe a thickness-dependent microwave loss and resonance frequency shift, explained by surface layers that limit the performance of PPC-based resonators. For a uniform dielectric, the frequency noise level should scale directly inversely with the PPC area and thickness. We observe that an increase in PPC size reduces the frequency noise, but the exact scaling is, in some cases, weaker than expected. Finally, we derive an engineering guideline for the design of KIDs based on PPC-based resonators.
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Submitted 8 May, 2024; v1 submitted 21 November, 2023;
originally announced November 2023.
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Resolving Power of Visible to Near-Infrared Hybrid $β$-Ta/NbTiN Kinetic Inductance Detectors
Authors:
Kevin Kouwenhoven,
Daniel Fan,
Enrico Biancalani,
Steven A. H. de Rooij,
Tawab Karim,
Carlas S. Smith,
Vignesh Murugesan,
David J. Thoen,
Jochem J. A. Baselmans,
Pieter J. de Visser
Abstract:
Kinetic Inductance Detectors (KIDs) are superconducting energy-resolving detectors, sensitive to single photons from the near-infrared to ultraviolet. We study a hybrid KID design consisting of a beta phase tantalum ($β$-Ta) inductor and a NbTiN interdigitated capacitor (IDC). The devices show an average intrinsic quality factor $Q_i$ of 4.3$\times10^5$ $\pm$ 1.3 $\times10^5$. To increase the powe…
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Kinetic Inductance Detectors (KIDs) are superconducting energy-resolving detectors, sensitive to single photons from the near-infrared to ultraviolet. We study a hybrid KID design consisting of a beta phase tantalum ($β$-Ta) inductor and a NbTiN interdigitated capacitor (IDC). The devices show an average intrinsic quality factor $Q_i$ of 4.3$\times10^5$ $\pm$ 1.3 $\times10^5$. To increase the power captured by the light sensitive inductor, we 3D-print an array of 150$\times$150 $μ$m resin micro lenses on the backside of the sapphire substrate. The shape deviation between design and printed lenses is smaller than 1$μ$m, and the alignment accuracy of this process is $δ_x = +5.8 \pm 0.5$ $μ$m and $δ_y = +8.3 \pm 3.3$ $μ$m. We measure a resolving power for 1545-402 nm that is limited to 4.9 by saturation in the KID's phase response. We can model the saturation in the phase response with the evolution of the number of quasiparticles generated by a photon event. An alternative coordinate system that has a linear response raises the resolving power to 5.9 at 402 nm. We verify the measured resolving power with a two-line measurement using a laser source and a monochromator. We discuss several improvements that can be made to the devices on a route towards KID arrays with high resolving powers.
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Submitted 13 February, 2023; v1 submitted 12 July, 2022;
originally announced July 2022.
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Model and Measurements of an Optical Stack for Broadband Visible to Near-IR Absorption in TiN KIDs
Authors:
K. Kouwenhoven,
I. Elwakil,
J. van Wingerden,
V. Murugesan,
D. J. Thoen,
J. J. A. Baselmans,
P. J. de Visser
Abstract:
Typical materials for optical Kinetic Inductance Detetectors (KIDs) are metals with a natural absorption of 30-50% in the visible and near-infrared. To reach high absorption efficiencies (90-100%) the KID must be embedded in an optical stack. We show an optical stack design for a 60 nm TiN film. The optical stack is modeled as sections of transmission lines, where the parameters for each section a…
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Typical materials for optical Kinetic Inductance Detetectors (KIDs) are metals with a natural absorption of 30-50% in the visible and near-infrared. To reach high absorption efficiencies (90-100%) the KID must be embedded in an optical stack. We show an optical stack design for a 60 nm TiN film. The optical stack is modeled as sections of transmission lines, where the parameters for each section are related to the optical properties of each layer. We derive the complex permittivity of the TiN film from a spectral ellipsometry measurement. The designed optical stack is optimised for broadband absorption and consists of, from top (illumination side) to bottom: 85 nm SiOx, 60 nm TiN, 23 nm of SiOx, and a 100 nm thick Al mirror. We show the modeled absorption and reflection of this stack, which has >80% absorption from 400 nm to 1550 nm and near-unity absorption for 500 nm to 800 nm. We measure transmission and reflection of this stack with a commercial spectrophotometer. The results are in good agreement with the model.
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Submitted 15 August, 2022; v1 submitted 12 October, 2021;
originally announced October 2021.
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Phonon-trapping enhanced energy resolution in superconducting single photon detectors
Authors:
Pieter J. de Visser,
Steven A. H. de Rooij,
Vignesh Murugesan,
David J. Thoen,
Jochem J. A. Baselmans
Abstract:
A noiseless, photon counting detector, which resolves the energy of each photon, could radically change astronomy, biophysics and quantum optics. Superconducting detectors promise an intrinsic resolving power at visible wavelengths of $R=E/δE\approx100$ due to their low excitation energy. We study superconducting energy-resolving Microwave Kinetic Inductance Detectors (MKIDs), which hold particula…
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A noiseless, photon counting detector, which resolves the energy of each photon, could radically change astronomy, biophysics and quantum optics. Superconducting detectors promise an intrinsic resolving power at visible wavelengths of $R=E/δE\approx100$ due to their low excitation energy. We study superconducting energy-resolving Microwave Kinetic Inductance Detectors (MKIDs), which hold particular promise for larger cameras. A visible/near-infrared photon absorbed in the superconductor creates a few thousand quasiparticles through several stages of electron-phonon interaction. Here we demonstrate experimentally that the resolving power of MKIDs at visible to near-infrared wavelengths is limited by the loss of hot phonons during this process. We measure the resolving power of our aluminum-based detector as a function of photon energy using four lasers with wavelengths between $1545-402$ nm. For detectors on thick SiN/Si and sapphire substrates the resolving power is limited to $10-21$ for the respective wavelengths, consistent with the loss of hot phonons. When we suspend the sensitive part of the detector on a 110 nm thick SiN membrane, the measured resolving power improves to $19-52$ respectively. The improvement is equivalent to a factor $8\pm2$ stronger phonon trapping on the membrane, which is consistent with a geometrical phonon propagation model for these hot phonons. We discuss a route towards the Fano limit by phonon engineering.
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Submitted 11 March, 2021;
originally announced March 2021.
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DESHIMA on ASTE: On-sky Responsivity Calibration of the Integrated Superconducting Spectrometer
Authors:
Tatsuya Takekoshi,
Kenichi Karatsu,
Junya Suzuki,
Yoichi Tamura,
Tai Oshima,
Akio Taniguchi,
Shin'ichiro Asayama,
Tom J. L. C. Bakx,
Jochem J. A. Baselmans,
Sjoerd Bosma,
Juan Bueno,
Kah Wuy Chin,
Yasunori Fujii,
Kazuyuki Fujita,
Robert Huiting,
Soh Ikarashi,
Tsuyoshi Ishida,
Shun Ishii,
Ryohei Kawabe,
Teun M. Klapwijk,
Kotaro Kohno,
Akira Kouchi,
Nuria Llombart,
Jun Maekawa,
Vignesh Murugesan
, et al. (14 additional authors not shown)
Abstract:
We are developing an ultra-wideband spectroscopic instrument, DESHIMA (DEep Spectroscopic HIgh-redshift MApper), based on the technologies of an on-chip filter-bank and Microwave Kinetic Inductance Detector (MKID) to investigate dusty star-burst galaxies in the distant universe at millimeter and submillimeter wavelength. An on-site experiment of DESHIMA was performed using the ASTE 10-m telescope.…
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We are developing an ultra-wideband spectroscopic instrument, DESHIMA (DEep Spectroscopic HIgh-redshift MApper), based on the technologies of an on-chip filter-bank and Microwave Kinetic Inductance Detector (MKID) to investigate dusty star-burst galaxies in the distant universe at millimeter and submillimeter wavelength. An on-site experiment of DESHIMA was performed using the ASTE 10-m telescope. We established a responsivity model that converts frequency responses of the MKIDs to line-of-sight brightness temperature. We estimated two parameters of the responsivity model using a set of skydip data taken under various precipitable water vapor (PWV, 0.4-3.0 mm) conditions for each MKID. The line-of-sight brightness temperature of sky is estimated using an atmospheric transmission model and the PWVs. As a result, we obtain an average temperature calibration uncertainty of $1σ=4$%, which is smaller than other photometric biases. In addition, the average forward efficiency of 0.88 in our responsivity model is consistent with the value expected from the geometrical support structure of the telescope. We also estimate line-of-sight PWVs of each skydip observation using the frequency response of MKIDs, and confirm the consistency with PWVs reported by the Atacama Large Millimeter/submillimeter Array.
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Submitted 15 January, 2020;
originally announced January 2020.
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First light demonstration of the integrated superconducting spectrometer
Authors:
Akira Endo,
Kenichi Karatsu,
Yoichi Tamura,
Tai Oshima,
Akio Taniguchi,
Tatsuya Takekoshi,
Shin'ichiro Asayama,
Tom J. L. C. Bakx,
Sjoerd Bosma,
Juan Bueno,
Kah Wuy Chin,
Yasunori Fujii,
Kazuyuki Fujita,
Robert Huiting,
Soh Ikarashi,
Tsuyoshi Ishida,
Shun Ishii,
Ryohei Kawabe,
Teun M. Klapwijk,
Kotaro Kohno,
Akira Kouchi,
Nuria Llombart,
Jun Maekawa,
Vignesh Murugesan,
Shunichi Nakatsubo
, et al. (14 additional authors not shown)
Abstract:
Ultra-wideband 3D imaging spectrometry in the millimeter-submillimeter (mm-submm) band is an essential tool for uncovering the dust-enshrouded portion of the cosmic history of star formation and galaxy evolution. However, it is challenging to scale up conventional coherent heterodyne receivers or free-space diffraction techniques to sufficient bandwidths ($\geq$1 octave) and numbers of spatial pix…
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Ultra-wideband 3D imaging spectrometry in the millimeter-submillimeter (mm-submm) band is an essential tool for uncovering the dust-enshrouded portion of the cosmic history of star formation and galaxy evolution. However, it is challenging to scale up conventional coherent heterodyne receivers or free-space diffraction techniques to sufficient bandwidths ($\geq$1 octave) and numbers of spatial pixels (>$10^2$). Here we present the design and first astronomical spectra of an intrinsically scalable, integrated superconducting spectrometer, which covers 332-377 GHz with a spectral resolution of $F/ΔF \sim 380$. It combines the multiplexing advantage of microwave kinetic inductance detectors (MKIDs) with planar superconducting filters for dispersing the signal in a single, small superconducting integrated circuit. We demonstrate the two key applications for an instrument of this type: as an efficient redshift machine, and as a fast multi-line spectral mapper of extended areas. The line detection sensitivity is in excellent agreement with the instrument design and laboratory performance, reaching the atmospheric foreground photon noise limit on sky. The design can be scaled to bandwidths in excess of an octave, spectral resolution up to a few thousand and frequencies up to $\sim$1.1 THz. The miniature chip footprint of a few $\mathrm{cm^2}$ allows for compact multi-pixel spectral imagers, which would enable spectroscopic direct imaging and large volume spectroscopic surveys that are several orders of magnitude faster than what is currently possible.
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Submitted 18 September, 2019; v1 submitted 24 June, 2019;
originally announced June 2019.
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Wideband on-chip terahertz spectrometer based on a superconducting filterbank
Authors:
Akira Endo,
Kenichi Karatsu,
Alejandro Pascual Laguna,
Behnam Mirzaei,
Robert Huiting,
David J. Thoen,
Vignesh Murugesan,
Stephen J. C. Yates,
Juan Bueno,
Nuri van Marrewijk,
Sjoerd Bosma,
Ozan Yurduseven,
Nuria Llombart,
Junya Suzuki,
Masato Naruse,
Pieter J. de Visser,
Paul P. van der Werf,
Teun M. Klapwijk,
Jochem J. A. Baselmans
Abstract:
Terahertz spectrometers with a wide instantaneous frequency coverage for passive remote sensing are enormously attractive for many terahertz applications, such as astronomy, atmospheric science and security. Here we demonstrate a wide-band terahertz spectrometer based on a single superconducting chip. The chip consists of an antenna coupled to a transmission line filterbank, with a microwave kinet…
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Terahertz spectrometers with a wide instantaneous frequency coverage for passive remote sensing are enormously attractive for many terahertz applications, such as astronomy, atmospheric science and security. Here we demonstrate a wide-band terahertz spectrometer based on a single superconducting chip. The chip consists of an antenna coupled to a transmission line filterbank, with a microwave kinetic inductance detector behind each filter. Using frequency division multiplexing, all detectors are read-out simultaneously creating a wide-band spectrometer with an instantaneous bandwidth of 45 GHz centered around 350 GHz. The spectrometer has a spectral resolution of $F/ΔF=380$ and reaches photon-noise limited sensitivity. We discuss the chip design and fabrication, as well as the system integration and testing. We confirm full system operation by the detection of an emission line spectrum of methanol gas. The proposed concept allows for spectroscopic radiation detection over large bandwidths and resolutions up to $F/ΔF\sim1000$, all using a chip area of a few $\mathrm{cm^2}$. This will allow the construction of medium resolution imaging spectrometers with unprecedented speed and sensitivity.
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Submitted 21 June, 2019; v1 submitted 21 January, 2019;
originally announced January 2019.
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Mitigation of Cosmic Ray Effect on Microwave Kinetic Inductance Detector Arrays
Authors:
K. Karatsu,
A. Endo,
J. Bueno,
P. J. de Visser,
R. Barends,
D. J. Thoen,
V. Murugesan,
N. Tomita,
J. J. A. Baselmans
Abstract:
For space observatories, the glitches caused by high energy phonons created by the interaction of cosmic ray particles with the detector substrate lead to dead time during observation. Mitigating the impact of cosmic rays is therefore an important requirement for detectors to be used in future space missions. In order to investigate possible solutions, we carry out a systematic study by testing fo…
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For space observatories, the glitches caused by high energy phonons created by the interaction of cosmic ray particles with the detector substrate lead to dead time during observation. Mitigating the impact of cosmic rays is therefore an important requirement for detectors to be used in future space missions. In order to investigate possible solutions, we carry out a systematic study by testing four large arrays of Microwave Kinetic Inductance Detectors (MKIDs), each consisting of $\sim$960 pixels and fabricated on monolithic 55 mm $\times$ 55 mm $\times$ 0.35 mm Si substrates. We compare the response to cosmic ray interactions in our laboratory for different detector arrays: A standard array with only the MKID array as reference; an array with a low $T_c$ superconducting film as phonon absorber on the opposite side of the substrate; and arrays with MKIDs on membranes. The idea is that the low $T_c$ layer down-converts the phonon energy to values below the pair breaking threshold of the MKIDs, and the membranes isolate the sensitive part of the MKIDs from phonons created in the substrate. We find that the dead time can be reduced up to a factor of 40 when compared to the reference array. Simulations show that the dead time can be reduced to below 1 % for the tested detector arrays when operated in a spacecraft in an L2 or a similar far-Earth orbit. The technique described here is also applicable and important for large superconducting qubit arrays for future quantum computers.
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Submitted 10 January, 2019; v1 submitted 8 January, 2019;
originally announced January 2019.
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A kilo-pixel imaging system for future space based far-infrared observatories using microwave kinetic inductance detectors
Authors:
J. J. A. Baselmans,
J. Bueno,
S. J. C. Yates,
O. Yurduseven,
N. Llombart,
K. Karatsu,
A. M. Baryshev,
L. Ferrari,
A. Endo,
D. J. Thoen,
P. J. de Visser,
R. M. J. Janssen,
V. Murugesan,
E. F. C. Driessen,
G. Coiffard,
J. Martin-Pintado,
P. Hargrave,
M. Griffin
Abstract:
Future astrophysics and cosmic microwave background space missions operating in the far-infrared to millimetre part of the spectrum will require very large arrays of ultra-sensitive detectors in combination with high multiplexing factors and efficient low-noise and low-power readout systems. We have developed a demonstrator system suitable for such applications. The system combines a 961 pixel ima…
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Future astrophysics and cosmic microwave background space missions operating in the far-infrared to millimetre part of the spectrum will require very large arrays of ultra-sensitive detectors in combination with high multiplexing factors and efficient low-noise and low-power readout systems. We have developed a demonstrator system suitable for such applications. The system combines a 961 pixel imaging array based upon Microwave Kinetic Inductance Detectors (MKIDs) with a readout system capable of reading out all pixels simultaneously with only one readout cable pair and a single cryogenic amplifier. We evaluate, in a representative environment, the system performance in terms of sensitivity, dynamic range, optical efficiency, cosmic ray rejection, pixel-pixel crosstalk and overall yield at at an observation centre frequency of 850 GHz and 20% fractional bandwidth. The overall system has an excellent sensitivity, with an average detector sensitivity NEPdet=3x10^-19 W/rt(Hz) measured using a thermal calibration source. At a loading power per pixel of 50fW we demonstrate white, photon noise limited detector noise down to 300 mHz. The dynamic range would allow the detection of 1 Jy bright sources within the field of view without tuning the readout of the detectors. The expected dead time due to cosmic ray interactions, when operated in an L2 or a similar far-Earth orbit, is found to be <4%. Additionally, the achieved pixel yield is 83% and the crosstalk between the pixels is <-30dB. This demonstrates that MKID technology can provide multiplexing ratios on the order of a 1000 with state-of-the-art single pixel performance, and that the technology is now mature enough to be considered for future space based observatories and experiments.
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Submitted 1 March, 2017; v1 submitted 7 September, 2016;
originally announced September 2016.
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The non-equilibrium response of a superconductor to pair-breaking radiation measured over a broad frequency band
Authors:
P. J. de Visser,
S. J. C. Yates,
T. Guruswamy,
D. J. Goldie,
S. Withington,
A. Neto,
N. Llombart,
A. M. Baryshev,
T. M. Klapwijk,
J. J. A. Baselmans
Abstract:
We have measured the absorption of terahertz radiation in a BCS superconductor over a broad range of frequencies from 200 GHz to 1.1 THz, using a broadband antenna-lens system and a tantalum microwave resonator. From low frequencies, the response of the resonator rises rapidly to a maximum at the gap edge of the superconductor. From there on the response drops to half the maximum response at twice…
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We have measured the absorption of terahertz radiation in a BCS superconductor over a broad range of frequencies from 200 GHz to 1.1 THz, using a broadband antenna-lens system and a tantalum microwave resonator. From low frequencies, the response of the resonator rises rapidly to a maximum at the gap edge of the superconductor. From there on the response drops to half the maximum response at twice the pair-breaking energy. At higher frequencies, the response rises again due to trapping of pair-breaking phonons in the superconductor. In practice this is the first measurement of the frequency dependence of the quasiparticle creation efficiency due to pair-breaking in a superconductor. The efficiency, calculated from the different non-equilibrium quasiparticle distribution functions at each frequency, is in agreement with the measurements.
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Submitted 22 May, 2015;
originally announced May 2015.
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Integrated Filterbank for DESHIMA: A Submillimeter Imaging Spectrograph Based on Superconducting Resonators
Authors:
A. Endo,
P. van der Werf,
R. M. J. Janssen,
P. J. de Visser,
T. M. Klapwijk,
J. J. A. Baselmans,
L. Ferrari,
A. M. Baryshev,
S. J. C. Yates
Abstract:
An integrated filterbank (IFB) in combination with microwave kinetic inductance detectors (MKIDs), both based on superconducting resonators, could be used to make broadband submillimeter imaging spectrographs that are compact and flexible. In order to investigate the possibility of adopting an IFB configuration for DESHIMA (Delft SRON High-redshift Mapper), we study the basic properties of a copla…
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An integrated filterbank (IFB) in combination with microwave kinetic inductance detectors (MKIDs), both based on superconducting resonators, could be used to make broadband submillimeter imaging spectrographs that are compact and flexible. In order to investigate the possibility of adopting an IFB configuration for DESHIMA (Delft SRON High-redshift Mapper), we study the basic properties of a coplanar-waveguide-based IFB using electromagnetic simulation. We show that a coupling efficiency greater than 1/2 can be achieved if transmission losses are negligible. We arrive at a practical design for a 9 pixel x 920 color 3 dimensional imaging device that fits on a 4 inch wafer, which instantaneously covers multiple submillimeter telluric windows with a dispersion of f/df = 1000.
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Submitted 17 July, 2011;
originally announced July 2011.
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Number fluctuations of sparse quasiparticles in a superconductor
Authors:
P. J. de Visser,
J. J. A. Baselmans,
P. Diener,
S. J. C. Yates,
A. Endo,
T. M. Klapwijk
Abstract:
We have directly measured quasiparticle number fluctuations in a thin film superconducting Al resonator in thermal equilibrium. The spectrum of these fluctuations provides a measure of both the density and the lifetime of the quasiparticles. We observe that the quasiparticle density decreases exponentially with decreasing temperature, as theoretically predicted, but saturates below 160 mK to 25-55…
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We have directly measured quasiparticle number fluctuations in a thin film superconducting Al resonator in thermal equilibrium. The spectrum of these fluctuations provides a measure of both the density and the lifetime of the quasiparticles. We observe that the quasiparticle density decreases exponentially with decreasing temperature, as theoretically predicted, but saturates below 160 mK to 25-55 per cubic micron. We show that this saturation is consistent with the measured saturation in the quasiparticle lifetime, which also explains similar observations in qubit decoherence times.
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Submitted 25 March, 2011; v1 submitted 3 March, 2011;
originally announced March 2011.