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Controlling Competing Feedback Mechanisms for Programmable Patterns via Nonlinear Laser Lithography
Authors:
Özgün Yavuz,
Abdullah bin Aamir,
Ihor Pavlov,
Sezin Galioğlu,
Ü. Seleme Nizam Bayrak,
Petro Deminskyi,
Onur Tokel,
Serim Ilday,
F. Ömer Ilday
Abstract:
Controlling laser-induced pattern formation remains a long-standing challenge. A key advance was recognising the pivotal role of intrinsic feedback mechanisms in self-organisation, which enabled self-similar patterns with long-range order through nonlinear laser lithography. This concept was recently leveraged to surpass the diffraction limit. However, the demonstrated structures are relatively si…
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Controlling laser-induced pattern formation remains a long-standing challenge. A key advance was recognising the pivotal role of intrinsic feedback mechanisms in self-organisation, which enabled self-similar patterns with long-range order through nonlinear laser lithography. This concept was recently leveraged to surpass the diffraction limit. However, the demonstrated structures are relatively simple and material-specific, as they rely on a single assumed formation mechanism for each material. Here, we reveal the previously unknown coexistence of competing feedback mechanisms that drive distinct chemical and ablative processes, resulting in patterns with different symmetries. We show that one mechanism can be selectively activated, while completely suppressing the other, by tuning the laser parameters independently of the material. The competing mechanisms break surface symmetries in distinct lateral and vertical directions, and the selection can be dynamically inverted in situ, leading to rich surface chemistries and morphologies. We demonstrate the potential for applications through the maskless and ambient-air fabrication of complex composite patterns on diverse materials and substrates. These include seamlessly stitched superhydrophilic and superhydrophobic domains, structural colour, and a holographic temperature sensor. Combining programmable mechanism selection with recent demonstrations of sub-10 nm features could enable the maskless fabrication of composite structures that rival the capabilities of top-down nanofabrication techniques.
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Submitted 30 March, 2025;
originally announced March 2025.
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Ultrafast laser synthesis of zeolites
Authors:
Sezin Galioglu,
Mehdi Hagverdiyev,
Meryem M. Doğan,
Özgün Yavuz,
Ü. Seleme Nizam,
Ghaith Makey,
Aladin Choura,
Mesut Laçin,
Burcu Akata Kurç,
Parviz Elahi,
F. Ömer Ilday,
Serim Ilday
Abstract:
Research has demonstrated that zeolite nucleation and growth can be controlled by fine-tuning chemical composition, temperature, and pressure, resulting in structures with diverse porosities and functionalities. Nevertheless, current energy delivery methods lack the finesse required to operate on the femto- and picosecond timescales of silica polymerisation and depolymerisation, limiting their abi…
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Research has demonstrated that zeolite nucleation and growth can be controlled by fine-tuning chemical composition, temperature, and pressure, resulting in structures with diverse porosities and functionalities. Nevertheless, current energy delivery methods lack the finesse required to operate on the femto- and picosecond timescales of silica polymerisation and depolymerisation, limiting their ability to direct synthesis with high precision. To overcome this limitation, we introduce an ultrafast laser synthesis technique capable of delivering energy at these timescales with unprecedented spatiotemporal precision. Unlike conventional or emerging approaches, this method bypasses the need for specific temperature and pressure settings, as nucleation and growth are governed by dynamic phenomena arising from nonlinear light-matter interactions, such as convective flows, cavitation bubbles, plasma formation, and shock waves. These processes can be initiated, paused, and resumed within fractions of a second, effectively freezing structures at any stage of self-assembly. Using this approach, we traced the entire nucleation and growth pathway of laser-synthesized TPA-silicate-1 zeolites, from early oligomer formation to fully developed crystals. The unprecedented spatiotemporal control of this technique unlocks new avenues for manipulating reaction pathways and exploring the vast configurational space of zeolites.
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Submitted 26 February, 2025; v1 submitted 4 February, 2025;
originally announced February 2025.
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Switching between normal and anomalous Laser Induced Periodic Surface Structures
Authors:
Ihor Pavlov,
Ozgun Yavuz,
Ghaith Makey,
Onur Toke,
Omer Ilday
Abstract:
We report on the studies of switching mechanism between normal and anomalous laser induced periodic surface structures. We have shown that for high loss metals the switching mechanism between normal and anomalous modes relays on an interplay between two different feedbacks inherent into the structure formation process: long range, low intensity dipole-like scattering of light along the surface, wh…
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We report on the studies of switching mechanism between normal and anomalous laser induced periodic surface structures. We have shown that for high loss metals the switching mechanism between normal and anomalous modes relays on an interplay between two different feedbacks inherent into the structure formation process: long range, low intensity dipole-like scattering of light along the surface, which governs anomalous ripples parallel to the laser polarization, and short range, high intensity plasmon-polariton wave, which is initiated by near field dipole radiation and responsible for creation of ripples perpendicular to the polarization, i. e. normal structure. By managing these two feedbacks, we demonstrated creation of both normal and anomalous laser induced periodic surface structures on the same surface. In contrast to the previous studies, we have shown that the thermal oxidation mechanism can form both normal and anomalous types of the structure, while the ablation mechanism is involved only during the normal structure formation. Unlike the formation of oxidation type anomalous structure, the formation of ablation type normal structure does not have inherent negative feedback, which is self-regulating nano-ripples formation. This feedback needs to be applied artificially, by regulating scanning speed and pulse energy at a given repetition rate of the laser. With implementation of nonlinear laser lithography technique for ablation type of normal laser induced periodic surface structures we demonstrated large area high regular nano-grating formation on different surfaces with extremely high industrially acceptable speed.
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Submitted 31 October, 2017;
originally announced October 2017.
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In-chip microstructures and photonic devices fabricated by nonlinear laser lithography deep inside silicon
Authors:
O. Tokel,
A. Turnali,
G. Makey,
P. Elahi,
S. Ilday,
T. Çolakoğlu,
E. Ergeçen,
Ö. Yavuz,
R. Hübner,
M. Z. Borra,
I. Pavlov,
A. Bek,
R. Turan,
S. Tozburun,
F. Ö. Ilday
Abstract:
Silicon is an excellent material for microelectronics and integrated photonics with untapped potential for mid-IR optics. Despite broad recognition of the importance of the third dimension, current lithography methods do not allow fabrication of photonic devices and functional microelements directly inside silicon chips. Even relatively simple curved geometries cannot be realized with techniques l…
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Silicon is an excellent material for microelectronics and integrated photonics with untapped potential for mid-IR optics. Despite broad recognition of the importance of the third dimension, current lithography methods do not allow fabrication of photonic devices and functional microelements directly inside silicon chips. Even relatively simple curved geometries cannot be realized with techniques like reactive ion etching. Embedded optical elements, like in glass, electronic devices and better electronic-photonic integration are lacking. Here, we demonstrate laser-based fabrication of complex 3D structures deep inside silicon using 1 micrometer-sized dots and rod-like structures of adjustable length as basic building blocks. The laser-modified Si has a different optical index than unmodified parts, which enables numerous photonic devices. Optionally, these parts are chemically etched to produce desired 3D shapes. We exemplify a plethora of subsurface, i.e., "in-chip" microstructures for microfluidic cooling of chips, vias, MEMS, photovoltaic applications and photonic devices that match or surpass the corresponding state-of-the-art device performances.
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Submitted 28 February, 2017; v1 submitted 9 September, 2014;
originally announced September 2014.
