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Subwavelength grating metamaterial waveguides and ring resonators on a silicon nitride platform
Authors:
Cameron M. Naraine,
Jocelyn N. Westwood-Bachman,
Cameron Horvath,
Mirwais Aktary,
Andrew P. Knights,
Jens H. Schmid,
Pavel Cheben,
Jonathan D. B. Bradley
Abstract:
We propose and demonstrate subwavelength grating (SWG) metamaterial waveguides and ring resonators on a silicon nitride platform for the first time. The SWG waveguide is engineered such that a large overlap of 53% of the Bloch mode with the top cladding material is achieved, demonstrating excellent potential for applications in evanescent field sensing and light amplification. The devices, which h…
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We propose and demonstrate subwavelength grating (SWG) metamaterial waveguides and ring resonators on a silicon nitride platform for the first time. The SWG waveguide is engineered such that a large overlap of 53% of the Bloch mode with the top cladding material is achieved, demonstrating excellent potential for applications in evanescent field sensing and light amplification. The devices, which have critical dimensions greater than 100 nm, are fabricated using a commercial rapid turn-around silicon nitride prototyping foundry process using electron beam lithography. Experimental characterization of the fabricated device reveals excellent ring resonator internal quality factor (2.11x10^5) and low propagation loss (~1.5 dB/cm) in the C-band, a significant improvement of both parameters compared to silicon based SWG ring resonators. These results demonstrate the promising prospects of SWG metamaterial structures for silicon nitride based photonic integrated circuits.
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Submitted 19 September, 2022;
originally announced September 2022.
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A full degree-of-freedom photonic crystal spatial light modulator
Authors:
Christopher L. Panuski,
Ian R. Christen,
Momchil Minkov,
Cole J. Brabec,
Sivan Trajtenberg-Mills,
Alexander D. Griffiths,
Jonathan J. D. McKendry,
Gerald L. Leake,
Daniel J. Coleman,
Cung Tran,
Jeffrey St Louis,
John Mucci,
Cameron Horvath,
Jocelyn N. Westwood-Bachman,
Stefan F. Preble,
Martin D. Dawson,
Michael J. Strain,
Michael L. Fanto,
Dirk R. Englund
Abstract:
Harnessing the full complexity of optical fields requires complete control of all degrees-of-freedom within a region of space and time -- an open goal for present-day spatial light modulators (SLMs), active metasurfaces, and optical phased arrays. Here, we solve this challenge with a programmable photonic crystal cavity array enabled by four key advances: (i) near-unity vertical coupling to high-f…
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Harnessing the full complexity of optical fields requires complete control of all degrees-of-freedom within a region of space and time -- an open goal for present-day spatial light modulators (SLMs), active metasurfaces, and optical phased arrays. Here, we solve this challenge with a programmable photonic crystal cavity array enabled by four key advances: (i) near-unity vertical coupling to high-finesse microcavities through inverse design, (ii) scalable fabrication by optimized, 300 mm full-wafer processing, (iii) picometer-precision resonance alignment using automated, closed-loop "holographic trimming", and (iv) out-of-plane cavity control via a high-speed micro-LED array. Combining each, we demonstrate near-complete spatiotemporal control of a 64-resonator, two-dimensional SLM with nanosecond- and femtojoule-order switching. Simultaneously operating wavelength-scale modes near the space- and time-bandwidth limits, this work opens a new regime of programmability at the fundamental limits of multimode optical control.
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Submitted 21 April, 2022;
originally announced April 2022.
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Improving mechanical sensor performance through larger damping
Authors:
Swapan K. Roy,
Vincent T. K. Sauer,
Jocelyn N. Westwood-Bachman,
Anandram Venkatasubramanian,
Wayne K. Hiebert
Abstract:
Mechanical resonances are used in a wide variety of devices; from smart phone accelerometers to computer clocks and from wireless communication filters to atomic force microscope sensors. Frequency stability, a critical performance metric, is generally assumed to be tantamount to resonance quality factor (the inverse of the linewidth and of the damping). Here we show that frequency stability of re…
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Mechanical resonances are used in a wide variety of devices; from smart phone accelerometers to computer clocks and from wireless communication filters to atomic force microscope sensors. Frequency stability, a critical performance metric, is generally assumed to be tantamount to resonance quality factor (the inverse of the linewidth and of the damping). Here we show that frequency stability of resonant nanomechanical sensors can generally be made independent of quality factor. At high bandwidths, we show that quality factor reduction is completely mitigated by increases in signal to noise ratio. At low bandwidths, strikingly, increased damping leads to better stability and sensor resolution, with improvement proportional to damping. We confirm the findings by demonstrating temperature resolution of 50 μK at 200 Hz bandwidth. These results open the door for high performance ultrasensitive resonant sensors in gaseous or liquid environments, single cell nanocalorimetry, nanoscale gas chromatography, and atmospheric pressure nanoscale mass spectrometry.
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Submitted 30 October, 2017;
originally announced October 2017.
