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Influence of the Effective Mass on ab initio Phonon-limited Electron Mobility of GaAs
Authors:
Mohammad Dehghani,
Dominic Waldhoer,
Angus Gentles,
Pedram Khakbaz,
Rainer Minixhofer,
Michael Waltl
Abstract:
We present a comprehensive ab initio study of the influence of band structure corrections, particularly the electron effective mass, on the phonon-limited electron drift and Hall mobilities of GaAs. Our approach is based on the DFT+$U$ method, combined with an iterative solution of the linearized Boltzmann transport equation using the Wannier interpolation technique. We show how this framework all…
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We present a comprehensive ab initio study of the influence of band structure corrections, particularly the electron effective mass, on the phonon-limited electron drift and Hall mobilities of GaAs. Our approach is based on the DFT+$U$ method, combined with an iterative solution of the linearized Boltzmann transport equation using the Wannier interpolation technique. We show how this framework allows for accurate refinements of the electronic band structure and phonon dispersion, leading to improved predictions for transport properties. In particular, by varying the Hubbard parameters to purposefully tune the conduction band features, allowing us to reproduce bands with different electron effective mass, we systematically investigate the relationship between mobility and effective mass. In this context, our results show close agreement with semi-empirical relations that follow a power-law dependence. Moreover, this approach can be used to indirectly incorporate temperature effects into the band structure, enabling efficient evaluation of temperature-dependent electron mobilities. Our mobility results exhibit good agreement with experimental data and are comparable to previously reported values obtained using the computationally expensive GW method.
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Submitted 30 June, 2025; v1 submitted 20 June, 2025;
originally announced June 2025.
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Machine Learning Force Field for Thermal Oxidation of Silicon
Authors:
Lukas Cvitkovich,
Franz Fehringer,
Christoph Wilhelmer,
Diego Milardovich,
Dominic Waldhör,
Tibor Grasser
Abstract:
Looking back at seven decades of highly extensive application in the semiconductor industry, silicon and its native oxide SiO$_2$ are still at the heart of several technological developments. Recently, the fabrication of ultra-thin oxide layers has become essential for keeping up with trends in down-scaling of nanoelectronic devices and for the realization of novel device technologies. With this c…
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Looking back at seven decades of highly extensive application in the semiconductor industry, silicon and its native oxide SiO$_2$ are still at the heart of several technological developments. Recently, the fabrication of ultra-thin oxide layers has become essential for keeping up with trends in down-scaling of nanoelectronic devices and for the realization of novel device technologies. With this comes a need for better understanding of the atomic configuration at the Si/SiO$_2$ interface. Classical force fields offer flexible application and relatively low computational costs, however, suffer from limited accuracy. Ab-initio methods give much better results but are extremely costly. Machine learning force fields (MLFF) offer the possibility to combine the benefits of both worlds. We train a MLFF for the simulation of the dry thermal oxidation process of a Si substrate. The training data is generated by density functional theory calculations. The obtained structures are in line with ab-initio simulations as well as with experimental observations. Compared to a classical force field, the most recent reactive force field (reaxFF), the resulting configurations are vastly improved.
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Submitted 22 May, 2024;
originally announced May 2024.
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Coherence limit due to hyperfine interaction with nuclei in the barrier material of Si spin qubits
Authors:
Lukas Cvitkovich,
Peter Stano,
Christoph Wilhelmer,
Dominic Waldhör,
Daniel Loss,
Yann-Michel Niquet,
Tibor Grasser
Abstract:
On the quest to understand and reduce environmental noise in Si spin qubits, hyperfine interactions between electron and nuclear spins impose a major challenge. Silicon is a promising host material because one can enhance the spin coherence time by removing spinful $^{29}$Si isotopes. As more experiments rely on isotopic purification of Si, the role of other spinful atoms in the device should be c…
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On the quest to understand and reduce environmental noise in Si spin qubits, hyperfine interactions between electron and nuclear spins impose a major challenge. Silicon is a promising host material because one can enhance the spin coherence time by removing spinful $^{29}$Si isotopes. As more experiments rely on isotopic purification of Si, the role of other spinful atoms in the device should be clarified. This is not a straightforward task, as the hyperfine interactions with atoms in the barrier layers are poorly understood. We utilize density functional theory to determine the hyperfine tensors of both Si and Ge in a crystalline epitaxial Si/SiGe quantum well as well as Si and O atoms in an amorphous Si/SiO$_2$ (MOS) interface structure. Based on these results, we estimate the dephasing time $T_2^*$ due to magnetic noise from the spin bath and show that the coherence is limited by interactions with non-Si barrier atoms to a few \textmu s in Si/SiGe (for non-purified Ge) and about 100\,\textmu s in Si-MOS. Expressing these numbers alternatively, in Si/SiGe the interactions with Ge dominate below 1000\,ppm of $^{29}$Si content, and, due to low natural concentration of the spinful oxygen isotopes, the interactions with oxygen in Si-MOS become significant only below 1\,ppm of $^{29}$Si content.
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Submitted 17 May, 2024;
originally announced May 2024.
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Time-Gated Optical Spectroscopy of Field-Effect Stimulated Recombination via Interfacial Point Defects in Fully-Processed Silicon Carbide Power MOSFETs
Authors:
Maximilian W. Feil,
Magdalena Weger,
Hans Reisinger,
Thomas Aichinger,
André Kabakow,
Dominic Waldhör,
Andreas C. Jakowetz,
Sven Prigann,
Gregor Pobegen,
Wolfgang Gustin,
Michael Waltl,
Michel Bockstedte,
Tibor Grasser
Abstract:
Fully-processed SiC power metal-oxide-semiconductor field-effect transistors (MOSFETs) emit light during switching of the gate terminal, while both drain and source terminals are grounded. The emitted photons are caused by defect-assisted recombination of electrons and holes at the 4H-SiC/SiO$_2$ interface and can be detected through the SiC substrate. Here, we present time-gated spectroscopic cha…
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Fully-processed SiC power metal-oxide-semiconductor field-effect transistors (MOSFETs) emit light during switching of the gate terminal, while both drain and source terminals are grounded. The emitted photons are caused by defect-assisted recombination of electrons and holes at the 4H-SiC/SiO$_2$ interface and can be detected through the SiC substrate. Here, we present time-gated spectroscopic characterization of these interfacial point defects. Unlike in previous studies, the devices were opened in such a way that the drain-contact remained electrically active. A separate examination of the photons emitted at the rising and falling transitions of the gate-source voltage enabled the extraction of two different spectral components. One of these components consists of a single transition with phonon replicas of a local vibrational mode (LVM) with an astonishingly high energy of 220 meV $\unicode{x2013}$ well above the highest phonon modes in 4H-SiC and SiO$_2$ of 120 meV and 137 meV, respectively. Based on a quantum mechanical model, we successfully fitted its emission spectrum and assigned it to donor-acceptor pair recombination involving a carbon cluster-like defect. Other transitions were assigned to EH$_{6/7}$-assisted, EK$_2$-D, and nitrogen-aluminum donor-acceptor pair recombination. Due to the relevance of these defects in the operation of SiC MOSFETs, these novel insights will contribute to improved reliability and performance of these devices.
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Submitted 20 April, 2024;
originally announced April 2024.
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Comphy v3.0 -- A Compact-Physics Framework for Modeling Charge Trapping Related Reliability Phenomena in MOS Devices
Authors:
Dominic Waldhoer,
Christian Schleich,
Jakob Michl,
Alexander Grill,
Dieter Claes,
Alexander Karl,
Theresia Knobloch,
Gerhard Rzepa,
Jacopo Franco,
Ben Kaczer,
Michael Waltl,
Tibor Grasser
Abstract:
Charge trapping plays an important role for the reliability of electronic devices and manifests itself in various phenomena like bias temperature instability (BTI), random telegraph noise (RTN), hysteresis or trap-assisted tunneling (TAT). In this work we present Comphy v3.0, an open source physical framework for modeling these effects in a unified fashion using nonradiative multiphonon theory on…
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Charge trapping plays an important role for the reliability of electronic devices and manifests itself in various phenomena like bias temperature instability (BTI), random telegraph noise (RTN), hysteresis or trap-assisted tunneling (TAT). In this work we present Comphy v3.0, an open source physical framework for modeling these effects in a unified fashion using nonradiative multiphonon theory on a one-dimensional device geometry. Here we give an overview about the underlying theory, discuss newly introduced features compared to the original Comphy framework and also review recent advances in reliability physics enabled by these new features. The usefulness of Comphy v3.0 for the reliability community is highlighted by several practical examples including automatic extraction of defect distributions, modeling of TAT in high-k capacitors and BTI/RTN modeling at cryogenic temperatures.
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Submitted 22 December, 2022;
originally announced December 2022.
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Modeling the Initial Stages of Si(100) Thermal Oxidation: An Ab-initio Approach
Authors:
Lukas Cvitkovich,
Dominic Waldhör,
Al-Moatassem El-Sayed,
Markus Jech,
Christoph Wilhelmer,
Tibor Grasser
Abstract:
Silicon together with its native oxide SiO$_2$ was recognized as an outstanding material system for the semiconductor industry in the 1950s. In state-of-the-art device technology, SiO$_2$ is widely used as an insulator in combination with high-$k$ dielectrics such as HfO$_2$, demanding fabrication of ultra-thin interfacial layers. The classical standard model derived by Deal and Grove accurately d…
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Silicon together with its native oxide SiO$_2$ was recognized as an outstanding material system for the semiconductor industry in the 1950s. In state-of-the-art device technology, SiO$_2$ is widely used as an insulator in combination with high-$k$ dielectrics such as HfO$_2$, demanding fabrication of ultra-thin interfacial layers. The classical standard model derived by Deal and Grove accurately describes the oxidation of Si in a progressed stage, however, strongly underestimates growth rates for thin oxide layers. Recent studies report a variety of oxidation mechanisms during the growth of oxide films in the range of \SI{10}{\angstrom} with various details still under debate. This paper presents a first-principles based approach to theoretically assess the thermal oxidation process of the technologically relevant Si(100) surfaceduring this initial stage. Our investigations range from the chemisorption of single O$_2$ molecules onto the $p(2\times2)$ reconstructed Si surface to oxidized Si surface layers with a thickness of up to \SI{20}{\angstrom}. The initially observed enhanced growth rate is assigned to barrierless O$_2$ chemisorption events upon which the oxygen molecule dissociate. We present strong evidence for an immediate amorphization of the oxide layer from the onset of oxidation. Surface reactions dominate until the surface is saturated with oxygen and separated from the Si substrate by a \SI{5}{\angstrom} transition region. The saturated surface becomes inert to dissociative reactions and enables the diffusion of molecular oxygen to the \interface interface as assumed within the Deal-Grove model. Further oxidation of the Si substrate is then provided by O$_2$ dissociations at the interface due to the same charge transfer process responsible for the chemisorption at the surface.
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Submitted 15 September, 2022; v1 submitted 29 April, 2022;
originally announced April 2022.
