Bessel-beam direct-write of the etch-mask in a nano-film of alumina for high-efficiency Si solar cells
Authors:
Tomas Katkus,
Soon Hock Ng,
Haoran Mu,
Nguyen Hoai An Le,
Dominyka Stonyte,
Zahra Khajehsaeidimahabadi,
Gediminas Seniutinas,
Justas Baltrukonis,
Orestas Ulcinas,
Mindaugas Mikutis,
Vytautas Sabonis,
Yoshiaki Nishijima,
Michael Rienacker,
Jan Krugener,
Robby Peibst,
Sajeev John,
Saulius Juodkazis
Abstract:
Large surface area applications such as high-efficiency > 26% solar cells require surface patterning with 1-10 micrometers periodic patterns at high fidelity over 1-10 cm^2 areas (before up scaling to 1 m^2) to perform at, or exceed, the Lambertian (ray optics) limit of light trapping. Here we show a pathway to high-resolution sub-1 micrometer etch mask patterning by ablation using direct femtosec…
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Large surface area applications such as high-efficiency > 26% solar cells require surface patterning with 1-10 micrometers periodic patterns at high fidelity over 1-10 cm^2 areas (before up scaling to 1 m^2) to perform at, or exceed, the Lambertian (ray optics) limit of light trapping. Here we show a pathway to high-resolution sub-1 micrometer etch mask patterning by ablation using direct femtosecond laser writing performed at room conditions (without the need for a vacuum-based lithography approach). A Bessel beam was used to alleviate the required high surface tracking tolerance for ablation of 0.3-0.8 micrometer diameter holes in ~40 nm alumina Al2O3-mask at high writing speed, 7.5 cm/s; a patterning rate 1 cm^2 per 20 min. The plasma etching protocol was optimised for a zero-mesa formation of photonic crystal (PhC) trapping structures and smooth surfaces at the nanoscale level. Scaling up in area and throughput of the demonstrated approach is outlined.
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Submitted 21 March, 2024;
originally announced March 2024.
All femtosecond optical pump and X-ray probe: holey-axicon for free electron laser
Authors:
V. Anand,
J. Maksimovic,
T. Katkus,
S. H. Ng,
O. Ulcinas,
M. Mikutis,
J. Baltrukonis,
A. Urbas,
G. Slekys,
H. Ogura,
D. Sagae,
T. Pikuz,
T. Somekawa,
N. Ozaki,
A. Vailionis,
G. Seniutinas,
V. Mizeikis,
K. Glazebrook,
J. P. Brodie,
P. R. Stoddart,
L. Rapp,
A. V. Rode,
E. G. Gamaly,
S. Juodkazis
Abstract:
We put forward a co-axial pump(optical)-probe(X-rays) experimental concept and show performance of the optical component. A Bessel beam generator with a central 100 micrometers-diameter hole (on the optical axis) was fabricated using femtosecond (fs) laser structuring inside a silica plate. This flat-axicon optical element produces a needle-like axial intensity distribution which can be used for t…
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We put forward a co-axial pump(optical)-probe(X-rays) experimental concept and show performance of the optical component. A Bessel beam generator with a central 100 micrometers-diameter hole (on the optical axis) was fabricated using femtosecond (fs) laser structuring inside a silica plate. This flat-axicon optical element produces a needle-like axial intensity distribution which can be used for the optical pump pulse. The fs-X-ray free electron laser (X-FEL) beam of sub-1 micrometer diameter can be introduced through the central hole along the optical axis onto a target as a probe. Different realisations of optical pump are discussed. Such optical elements facilitate alignment of ultra-short fs-pulses in space and time and can be used in light-matter interaction experiments at extreme energy densities on the surface and in the volume of targets. Full advantage of ultra-short 10 fs X-FEL probe pulses with fs-pump(optical) opens an unexplored temporal dimension of phase transitions and the fastest laser-induced rates of material heating and quenching. A wider field of applications of fs-laser-enabled structuring of materials and design of specific optical elements for astrophotonics is presented.
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Submitted 24 May, 2020;
originally announced May 2020.
