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CMOS-Compatible, Wafer-Scale Processed Superconducting Qubits Exceeding Energy Relaxation Times of 200us
Authors:
T. Mayer,
J. Weber,
E. Music,
C. Moran Guizan,
S. J. K. Lang,
L. Schwarzenbach,
C. Dhieb,
B. Kiliclar,
A. Maiwald,
Z. Luo,
W. Lerch,
D. Zahn,
I. Eisele,
R. N. Pereira,
C. Kutter
Abstract:
We present the results of an industry-grade fabrication of superconducting qubits on 200 mm wafers utilizing CMOS-established processing methods. By automated waferprober resistance measurements at room temperature, we demonstrate a Josephson junction fabrication yield of 99.7% (shorts and opens) across more than 10000 junctions and a qubit frequency prediction accuracy of 1.6%. In cryogenic chara…
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We present the results of an industry-grade fabrication of superconducting qubits on 200 mm wafers utilizing CMOS-established processing methods. By automated waferprober resistance measurements at room temperature, we demonstrate a Josephson junction fabrication yield of 99.7% (shorts and opens) across more than 10000 junctions and a qubit frequency prediction accuracy of 1.6%. In cryogenic characterization, we provide statistical results regarding energy relaxation times of the qubits with a median T1 of up to 100 us and individual devices consistently approaching 200 us in long-term measurements. This represents the best performance reported so far for superconducting qubits fabricated by industry-grade, wafer-level subtractive processes.
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Submitted 20 May, 2025; v1 submitted 13 May, 2025;
originally announced May 2025.
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3D-Integrated Superconducting qubits: CMOS-Compatible, Wafer-Scale Processing for Flip-Chip Architectures
Authors:
T. Mayer,
H. Bender,
S. J. K. Lang,
Z. Luo,
J. Weber,
C. Moran Guizan,
C. Dhieb,
D. Zahn,
L. Schwarzenbach,
W. Hell,
M. Andronic,
A. Drost,
K. Neumeier,
W. Lerch,
L. Nebrich,
A. Hagelauer,
I. Eisele,
R. N. Pereira,
C. Kutter
Abstract:
In this article, we present a technology development of a superconducting qubit device 3D-integrated by flip-chip-bonding and processed following CMOS fabrication standards and contamination rules on 200 mm wafers. We present the utilized proof-of-concept chip designs for qubit- and carrier chip, as well as the respective front-end and back-end fabrication techniques. In characterization of the ne…
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In this article, we present a technology development of a superconducting qubit device 3D-integrated by flip-chip-bonding and processed following CMOS fabrication standards and contamination rules on 200 mm wafers. We present the utilized proof-of-concept chip designs for qubit- and carrier chip, as well as the respective front-end and back-end fabrication techniques. In characterization of the newly developed microbump technology based on metallized KOH-etched Si-islands, we observe a superconducting transition of the used metal stacks and radio frequency (RF) signal transfer through the bump connection with negligible attenuation. In time-domain spectroscopy of the qubits we find high yield qubit excitation with energy relaxation times of up to 15 us.
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Submitted 23 May, 2025; v1 submitted 7 May, 2025;
originally announced May 2025.
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ForzaETH Race Stack -- Scaled Autonomous Head-to-Head Racing on Fully Commercial off-the-Shelf Hardware
Authors:
Nicolas Baumann,
Edoardo Ghignone,
Jonas Kühne,
Niklas Bastuck,
Jonathan Becker,
Nadine Imholz,
Tobias Kränzlin,
Tian Yi Lim,
Michael Lötscher,
Luca Schwarzenbach,
Luca Tognoni,
Christian Vogt,
Andrea Carron,
Michele Magno
Abstract:
Autonomous racing in robotics combines high-speed dynamics with the necessity for reliability and real-time decision-making. While such racing pushes software and hardware to their limits, many existing full-system solutions necessitate complex, custom hardware and software, and usually focus on Time-Trials rather than full unrestricted Head-to-Head racing, due to financial and safety constraints.…
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Autonomous racing in robotics combines high-speed dynamics with the necessity for reliability and real-time decision-making. While such racing pushes software and hardware to their limits, many existing full-system solutions necessitate complex, custom hardware and software, and usually focus on Time-Trials rather than full unrestricted Head-to-Head racing, due to financial and safety constraints. This limits their reproducibility, making advancements and replication feasible mostly for well-resourced laboratories with comprehensive expertise in mechanical, electrical, and robotics fields. Researchers interested in the autonomy domain but with only partial experience in one of these fields, need to spend significant time with familiarization and integration. The ForzaETH Race Stack addresses this gap by providing an autonomous racing software platform designed for F1TENTH, a 1:10 scaled Head-to-Head autonomous racing competition, which simplifies replication by using commercial off-the-shelf hardware. This approach enhances the competitive aspect of autonomous racing and provides an accessible platform for research and development in the field. The ForzaETH Race Stack is designed with modularity and operational ease of use in mind, allowing customization and adaptability to various environmental conditions, such as track friction and layout. Capable of handling both Time-Trials and Head-to-Head racing, the stack has demonstrated its effectiveness, robustness, and adaptability in the field by winning the official F1TENTH international competition multiple times.
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Submitted 19 August, 2024; v1 submitted 18 March, 2024;
originally announced March 2024.
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Model- and Acceleration-based Pursuit Controller for High-Performance Autonomous Racing
Authors:
Jonathan Becker,
Nadine Imholz,
Luca Schwarzenbach,
Edoardo Ghignone,
Nicolas Baumann,
Michele Magno
Abstract:
Autonomous racing is a research field gaining large popularity, as it pushes autonomous driving algorithms to their limits and serves as a catalyst for general autonomous driving. For scaled autonomous racing platforms, the computational constraint and complexity often limit the use of Model Predictive Control (MPC). As a consequence, geometric controllers are the most frequently deployed controll…
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Autonomous racing is a research field gaining large popularity, as it pushes autonomous driving algorithms to their limits and serves as a catalyst for general autonomous driving. For scaled autonomous racing platforms, the computational constraint and complexity often limit the use of Model Predictive Control (MPC). As a consequence, geometric controllers are the most frequently deployed controllers. They prove to be performant while yielding implementation and operational simplicity. Yet, they inherently lack the incorporation of model dynamics, thus limiting the race car to a velocity domain where tire slip can be neglected. This paper presents Model- and Acceleration-based Pursuit (MAP) a high-performance model-based trajectory tracking algorithm that preserves the simplicity of geometric approaches while leveraging tire dynamics. The proposed algorithm allows accurate tracking of a trajectory at unprecedented velocities compared to State-of-the-Art (SotA) geometric controllers. The MAP controller is experimentally validated and outperforms the reference geometric controller four-fold in terms of lateral tracking error, yielding a tracking error of 0.055m at tested speeds up to 11m/s.
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Submitted 7 July, 2023; v1 submitted 9 September, 2022;
originally announced September 2022.
