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Tailored Fabrication of 3D Nanopores with Dielectric Oxides for Multiple Nanoscale Applications
Authors:
German Lanzavecchia,
Anastasiia Sapunova,
Ali Douaki,
Shukun Weng,
Dmitry Momotenko,
Goncalo Paulo,
Alberto Giacomello,
Roman Krahne,
Denis Garoli
Abstract:
Nanopore sensing is a key technology for single-molecule detection and analysis. Solid-state nanopores have emerged as a versatile platform, since their fabrication allows to engineer their properties by controlling size, shape, and chemical functionalization. However, lithography-based fabrication approaches for non-planar nanopores-on-chip rely on polymers that have limits with respect to hard-…
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Nanopore sensing is a key technology for single-molecule detection and analysis. Solid-state nanopores have emerged as a versatile platform, since their fabrication allows to engineer their properties by controlling size, shape, and chemical functionalization. However, lithography-based fabrication approaches for non-planar nanopores-on-chip rely on polymers that have limits with respect to hard- and robustness, durability, and refractive index. In this respect, nanopores made of metal oxides with high dielectric constant would be much more favourable and have the potential to extend the suitability of solid-state nanopores towards optoelectronic technologies. Here, we present a versatile method to fabricate three-dimensional nanopores of different dielectric oxides with controlled shapes. Our approach uses photoresist only as a template in the focused-ion-beam lithography to define the nanopore shape, which is subsequently coated with different oxides (SiO2, Al2O3, TiO2 and HfO2) by atomic-layer deposition. Then the photoresist is fully removed by chemo-physical treatment, resulting in nanopores entirely made from dielectric oxides on a thin solid-state membrane. Our methodology allows straightforward fabrication of convex, straight, and concave nanopore shapes that can be employed in various technologies and applications. We explored their performance as ionic nanochannels and investigated the dependence of the ionic current rectification on the nanopore geometry. We found hysteresis in the ionic conductance that enables potential applications of the nanopores in memristors. We also investigated the dielectric oxide nanopores for DNA sensing by measuring both cis-trans and trans-cis translocations and support our data with numerical simulations based on the Poisson-Nernst-Planck model.
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Submitted 4 May, 2024;
originally announced May 2024.
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Ionic Current Rectification in Nanopores: Effects of Nanopore Material, Electrolyte and Surface Treatment
Authors:
Andrea Doricchi,
Anastasiia Sapunova,
Ali Douaki,
German Lanzavecchia,
Shukun Weng,
Mostafa Salehirozveh,
Makusu Tsutsui,
Mauro Chinappi,
Dmitry Momotenko,
Roman Krahne,
Denis Garoli
Abstract:
Ionic Current Rectification (ICR) can appear in nanopores, causing a diode-like behavior that originates from different efficiency of ion transport through the pore channel with respect to the applied voltage bias polarity. This effect is particularly interesting for nanopores with a short channel length, that is smaller than 500 nm, because then the dependence of the ion current on the direction…
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Ionic Current Rectification (ICR) can appear in nanopores, causing a diode-like behavior that originates from different efficiency of ion transport through the pore channel with respect to the applied voltage bias polarity. This effect is particularly interesting for nanopores with a short channel length, that is smaller than 500 nm, because then the dependence of the ion current on the direction along which the ions pass through the channel is determined by the geometry and material of the nanopore, and by the ion concentration in the electrolyte. Surface charges can play an important role, and therefore nanopores consisting of multiple materials can induce ICR because of different charge distributions at the nanopore-electrolyte interface for the different material sections. In this work, we study four solid-state nanopore designs considering different geometries of charge distributions along the inner and outer surfaces of nanopores, and evaluate their impact on ICR with six different electrolytes. The direct comparison between experimental data and modeling enables to understand how the different surface charge configurations impact the ICR.
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Submitted 2 February, 2024;
originally announced February 2024.
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Electrochemical 3D Printing of Ni-Mn and Ni-Co alloy with FluidFM
Authors:
Chunjian Shen,
Zengwei Zhu,
Di Zhu,
Cathelijn van Nisselroy,
Tomaso Zambelli,
Dmitry Momotenko
Abstract:
Additive manufacturing can realize almost any designed geometry, enabling the fabrication of innovative products for advanced applications. Local electrochemical plating is a powerful approach for additive manufacturing of metal microstructures; however, previously reported data have been mostly obtained with copper, and only a few cases have been reported with other elements. In this study, we as…
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Additive manufacturing can realize almost any designed geometry, enabling the fabrication of innovative products for advanced applications. Local electrochemical plating is a powerful approach for additive manufacturing of metal microstructures; however, previously reported data have been mostly obtained with copper, and only a few cases have been reported with other elements. In this study, we assessed the ability of fluidic force microscopy (FluidFM) to produce Ni-Mn and Ni-Co alloy structures. Once the optimal deposition potential window was determined, pillars with relatively smooth surfaces were obtained. The printing process was characterized by printing rates in the range of 50-60 nm/s. Cross-sections exposed by focused ion beam showed highly dense microstructures, while the corresponding face scan with energy-dispersive X-ray spectroscopy (EDX) spectra revealed a uniform distribution of alloy components.
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Submitted 11 March, 2022;
originally announced March 2022.
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Electrochemical 3D Printing of Silver and Nickel Microstructures with FluidFM
Authors:
Cathelijn van Nisselroy,
Chunjian Shen,
Tomaso Zambelli,
Dmitry Momotenko
Abstract:
Electrochemical 3D printing of conductors with microscale resolution holds a great promise for a wide range of applications, but the choice of suitable metals for these technologies remains limited. Most efforts so far have been focused on deposition of copper, however, other metals are also of interest, especially when tuning of mechanical, electrical, or optical properties is required for a give…
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Electrochemical 3D printing of conductors with microscale resolution holds a great promise for a wide range of applications, but the choice of suitable metals for these technologies remains limited. Most efforts so far have been focused on deposition of copper, however, other metals are also of interest, especially when tuning of mechanical, electrical, or optical properties is required for a given application. Here we address the issue of a limited materials choice in electrochemical 3D printing by extending the materials library to silver and nickel. Free-standing microscale structures are fabricated in a single step via locally confined electrochemical 3D printing using FluidFM - a microchanneled cantilever nanopipette capable to deliver electrolyte through sub-microscale opening. The 3D printed structures are constructed in a layer-by-layer fashion, which allows complex geometrical shapes such as double rings, helices and pyramids. We report the process performance in terms of printing speed (in the range 7 - 40 nm s-1 for silver and 27 - 42 nm s-1 for nickel) and reveal dense inner structure and chemical purity of the printed features.
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Submitted 11 March, 2022; v1 submitted 19 November, 2021;
originally announced November 2021.
