A tabletop x-ray tomography instrument for nanometer-scale imaging: demonstration of the 1,000-element transition-edge sensor subarray
Authors:
Paul Szypryt,
Nathan Nakamura,
Daniel T. Becker,
Douglas A. Bennett,
Amber L. Dagel,
W. Bertrand Doriese,
Joseph W. Fowler,
Johnathon D. Gard,
J. Zachariah Harris,
Gene C. Hilton,
Jozsef Imrek,
Edward S. Jimenez,
Kurt W. Larson,
Zachary H. Levine,
John A. B. Mates,
D. McArthur,
Luis Miaja-Avila,
Kelsey M. Morgan,
Galen C. O'Neil,
Nathan J. Ortiz,
Christine G. Pappas,
Daniel R. Schmidt,
Kyle R. Thompson,
Joel N. Ullom,
Leila Vale
, et al. (6 additional authors not shown)
Abstract:
We report on the 1,000-element transition-edge sensor (TES) x-ray spectrometer implementation of the TOMographic Circuit Analysis Tool (TOMCAT). TOMCAT combines a high spatial resolution scanning electron microscope (SEM) with a highly efficient and pixelated TES spectrometer to reconstruct three-dimensional maps of nanoscale integrated circuits (ICs). A 240-pixel prototype spectrometer was recent…
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We report on the 1,000-element transition-edge sensor (TES) x-ray spectrometer implementation of the TOMographic Circuit Analysis Tool (TOMCAT). TOMCAT combines a high spatial resolution scanning electron microscope (SEM) with a highly efficient and pixelated TES spectrometer to reconstruct three-dimensional maps of nanoscale integrated circuits (ICs). A 240-pixel prototype spectrometer was recently used to reconstruct ICs at the 130 nm technology node, but to increase imaging speed to more practical levels, the detector efficiency needs to be improved. For this reason, we are building a spectrometer that will eventually contain 3,000 TES microcalorimeters read out with microwave superconducting quantum interference device (SQUID) multiplexing, and we currently have commissioned a 1,000 TES subarray. This still represents a significant improvement from the 240-pixel system and allows us to begin characterizing the full spectrometer performance. Of the 992 maximimum available readout channels, we have yielded 818 devices, representing the largest number of TES x-ray microcalorimeters simultaneously read out to date. These microcalorimeters have been optimized for pulse speed rather than purely energy resolution, and we measure a FWHM energy resolution of 14 eV at the 8.0 keV Cu K$α$ line.
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Submitted 22 December, 2022;
originally announced December 2022.
The potential of microcalorimeter x-ray spectrometers for measurement of relative fluorescence-line intensities
Authors:
J. W. Fowler,
L. Miaja-Avila,
G. C. O'Neil,
J. N. Ullom,
H. Whitelock,
D. S. Swetz
Abstract:
We have previously used an array of cryogenic microcalorimeters with 4 eV energy resolution to measure emission-line profiles and energies of the characteristic L-shell x rays of four elements of the lanthanide series: praseodymium, neodymium, terbium, and holmium. We consider the power of the same data set for the estimation of the lines' relative intensities. Intensities must be corrected for de…
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We have previously used an array of cryogenic microcalorimeters with 4 eV energy resolution to measure emission-line profiles and energies of the characteristic L-shell x rays of four elements of the lanthanide series: praseodymium, neodymium, terbium, and holmium. We consider the power of the same data set for the estimation of the lines' relative intensities. Intensities must be corrected for detector efficiency and self-absorption, and we estimate uncertainties on the corrections. These data represent one of the first uses of cryogenic energy-dispersive sensors to estimate the relative intensities of x-ray fluorescence lines. They show that a future measurement of thin-film samples with microcalorimeter detectors could achieve systematic uncertainties below 1% on relative line intensities over a broad energy range.
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Submitted 16 August, 2022;
originally announced August 2022.
