-
Grey-box Process Control Mining for Anomaly Monitoring and Deconstruction
Authors:
Andrés Vargas,
MD Ridwan Al Iqbal,
John S. Erickson,
Kristin P. Bennett
Abstract:
We present a new "grey-box" approach to anomaly detection in smart manufacturing. The approach is designed for tools run by control systems which execute recipe steps to produce semiconductor wafers. Multiple streaming sensors capture trace data to guide the control systems and for quality control. These control systems are typically PI controllers which can be modeled as an ordinary differential…
▽ More
We present a new "grey-box" approach to anomaly detection in smart manufacturing. The approach is designed for tools run by control systems which execute recipe steps to produce semiconductor wafers. Multiple streaming sensors capture trace data to guide the control systems and for quality control. These control systems are typically PI controllers which can be modeled as an ordinary differential equation (ODE) coupled with a control equation, capturing the physics of the process. The ODE "white-box" models capture physical causal relationships that can be used in simulations to determine how the process will react to changes in control parameters, but they have limited utility for anomaly detection. Many "black-box" approaches exist for anomaly detection in manufacturing, but they typically do not exploit the underlying process control. The proposed "grey-box" approach uses the process-control ODE model to derive a parametric function of sensor data. Bayesian regression is used to fit the parameters of these functions to form characteristic "shape signatures". The probabilistic model provides a natural anomaly score for each wafer, which captures poor control and strange shape signatures. The anomaly score can be deconstructed into its constituent parts in order to identify which parameters are contributing to anomalies. We demonstrate how the anomaly score can be used to monitor complex multi-step manufacturing processes to detect anomalies and changes and show how the shape signatures can provide insight into the underlying sources of process variation that are not readily apparent in the sensor data.
△ Less
Submitted 10 August, 2018;
originally announced August 2018.
-
Eclectic Extraction of Propositional Rules from Neural Networks
Authors:
Ridwan Al Iqbal
Abstract:
Artificial Neural Network is among the most popular algorithm for supervised learning. However, Neural Networks have a well-known drawback of being a "Black Box" learner that is not comprehensible to the Users. This lack of transparency makes it unsuitable for many high risk tasks such as medical diagnosis that requires a rational justification for making a decision. Rule Extraction methods attemp…
▽ More
Artificial Neural Network is among the most popular algorithm for supervised learning. However, Neural Networks have a well-known drawback of being a "Black Box" learner that is not comprehensible to the Users. This lack of transparency makes it unsuitable for many high risk tasks such as medical diagnosis that requires a rational justification for making a decision. Rule Extraction methods attempt to curb this limitation by extracting comprehensible rules from a trained Network. Many such extraction algorithms have been developed over the years with their respective strengths and weaknesses. They have been broadly categorized into three types based on their approach to use internal model of the Network. Eclectic Methods are hybrid algorithms that combine the other approaches to attain more performance. In this paper, we present an Eclectic method called HERETIC. Our algorithm uses Inductive Decision Tree learning combined with information of the neural network structure for extracting logical rules. Experiments and theoretical analysis show HERETIC to be better in terms of speed and performance.
△ Less
Submitted 2 October, 2011;
originally announced October 2011.
-
A Generalized Method for Integrating Rule-based Knowledge into Inductive Methods Through Virtual Sample Creation
Authors:
Ridwan Al Iqbal
Abstract:
Hybrid learning methods use theoretical knowledge of a domain and a set of classified examples to develop a method for classification. Methods that use domain knowledge have been shown to perform better than inductive learners. However, there is no general method to include domain knowledge into all inductive learning algorithms as all hybrid methods are highly specialized for a particular algorit…
▽ More
Hybrid learning methods use theoretical knowledge of a domain and a set of classified examples to develop a method for classification. Methods that use domain knowledge have been shown to perform better than inductive learners. However, there is no general method to include domain knowledge into all inductive learning algorithms as all hybrid methods are highly specialized for a particular algorithm. We present an algorithm that will take domain knowledge in the form of propositional rules, generate artificial examples from the rules and also remove instances likely to be flawed. This enriched dataset then can be used by any learning algorithm. Experimental results of different scenarios are shown that demonstrate this method to be more effective than simple inductive learning.
△ Less
Submitted 25 January, 2011;
originally announced January 2011.
-
Using Feature Weights to Improve Performance of Neural Networks
Authors:
Ridwan Al Iqbal
Abstract:
Different features have different relevance to a particular learning problem. Some features are less relevant; while some very important. Instead of selecting the most relevant features using feature selection, an algorithm can be given this knowledge of feature importance based on expert opinion or prior learning. Learning can be faster and more accurate if learners take feature importance into a…
▽ More
Different features have different relevance to a particular learning problem. Some features are less relevant; while some very important. Instead of selecting the most relevant features using feature selection, an algorithm can be given this knowledge of feature importance based on expert opinion or prior learning. Learning can be faster and more accurate if learners take feature importance into account. Correlation aided Neural Networks (CANN) is presented which is such an algorithm. CANN treats feature importance as the correlation coefficient between the target attribute and the features. CANN modifies normal feed-forward Neural Network to fit both correlation values and training data. Empirical evaluation shows that CANN is faster and more accurate than applying the two step approach of feature selection and then using normal learning algorithms.
△ Less
Submitted 25 January, 2011;
originally announced January 2011.
-
Empirical learning aided by weak domain knowledge in the form of feature importance
Authors:
Ridwan Al Iqbal
Abstract:
Standard hybrid learners that use domain knowledge require stronger knowledge that is hard and expensive to acquire. However, weaker domain knowledge can benefit from prior knowledge while being cost effective. Weak knowledge in the form of feature relative importance (FRI) is presented and explained. Feature relative importance is a real valued approximation of a feature's importance provided by…
▽ More
Standard hybrid learners that use domain knowledge require stronger knowledge that is hard and expensive to acquire. However, weaker domain knowledge can benefit from prior knowledge while being cost effective. Weak knowledge in the form of feature relative importance (FRI) is presented and explained. Feature relative importance is a real valued approximation of a feature's importance provided by experts. Advantage of using this knowledge is demonstrated by IANN, a modified multilayer neural network algorithm. IANN is a very simple modification of standard neural network algorithm but attains significant performance gains. Experimental results in the field of molecular biology show higher performance over other empirical learning algorithms including standard backpropagation and support vector machines. IANN performance is even comparable to a theory refinement system KBANN that uses stronger domain knowledge. This shows Feature relative importance can improve performance of existing empirical learning algorithms significantly with minimal effort.
△ Less
Submitted 3 June, 2010; v1 submitted 30 May, 2010;
originally announced May 2010.
