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3D printing of hierarchical structures made of inorganic silicon-rich glass featuring self-forming nanogratings
Authors:
Po-Han Huang,
Shiqian Chen,
Oliver Hartwig,
David E. Marschner,
Georg S. Duesberg,
Göran Stemme,
Jiantong Li,
Kristinn B. Gylfason,
Frank Niklaus
Abstract:
Hierarchical structures are abundant in nature, such as in the superhydrophobic surfaces of lotus leaves and the structural coloration of butterfly wings. They consist of ordered features across multiple size scales, and their unique properties have attracted enormous interest in wide-ranging fields, including energy storage, nanofluidics, and nanophotonics. Femtosecond lasers, capable of inducing…
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Hierarchical structures are abundant in nature, such as in the superhydrophobic surfaces of lotus leaves and the structural coloration of butterfly wings. They consist of ordered features across multiple size scales, and their unique properties have attracted enormous interest in wide-ranging fields, including energy storage, nanofluidics, and nanophotonics. Femtosecond lasers, capable of inducing various material modifications, have shown promise for manufacturing tailored hierarchical structures. However, existing methods such as multiphoton lithography and 3D printing using nanoparticle-filled inks typically involve polymers and suffer from high process complexity. Here, we demonstrate 3D printing of hierarchical structures in inorganic silicon-rich glass featuring self-forming nanogratings. This approach takes advantage of our finding that femtosecond laser pulses can induce simultaneous multiphoton crosslinking and self-formation of nanogratings in hydrogen silsesquioxane (HSQ). The 3D printing process combines the 3D patterning capability of multiphoton lithography and the efficient generation of periodic structures by the self-formation of nanogratings. We 3D-printed micro-supercapacitors with large surface areas and a remarkable areal capacitance of 1 mF/cm^2 at an ultrahigh scan rate of 50 V/s, thereby demonstrating the utility of our 3D printing approach for device applications in emerging fields such as energy storage.
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Submitted 25 March, 2024;
originally announced March 2024.
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Graphene thermal infrared emitters integrated into silicon photonic waveguides
Authors:
Nour Negm,
Sarah Zayouna,
Shayan Parhizkar,
Pen-Sheng Lin,
Po-Han Huang,
Stephan Suckow,
Stephan Schroeder,
Eleonora De Luca,
Floria Ottonello Briano,
Arne Quellmalz,
Georg S. Duesberg,
Frank Niklaus,
Kristinn B. Gylfason,
Max C. Lemme
Abstract:
Cost-efficient and easily integrable broadband mid-infrared (mid-IR) sources would significantly enhance the application space of photonic integrated circuits (PICs). Thermal incandescent sources are superior to other common mid-IR emitters based on semiconductor materials in terms of PIC compatibility, manufacturing costs, and bandwidth. Ideal thermal emitters would radiate directly into the desi…
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Cost-efficient and easily integrable broadband mid-infrared (mid-IR) sources would significantly enhance the application space of photonic integrated circuits (PICs). Thermal incandescent sources are superior to other common mid-IR emitters based on semiconductor materials in terms of PIC compatibility, manufacturing costs, and bandwidth. Ideal thermal emitters would radiate directly into the desired modes of the PIC waveguides via near-field coupling and would be stable at very high temperatures. Graphene is a semi-metallic two-dimensional material with comparable emissivity to thin metallic thermal emitters. It allows maximum coupling into waveguides by placing it directly into their evanescent fields. Here, we demonstrate graphene mid-IR emitters integrated with photonic waveguides that couple directly into the fundamental mode of silicon waveguides designed for a wavelength of 4,2 μm relevant for CO${_2}$ sensing. High broadband emission intensity is observed at the waveguide-integrated graphene emitter. The emission at the output grating couplers confirms successful coupling into the waveguide mode. Thermal simulations predict emitter temperatures up to 1000°C, where the blackbody radiation covers the mid-IR region. A coupling efficiency η, defined as the light emitted into the waveguide divided by the total emission, of up to 68% is estimated, superior to data published for other waveguide-integrated emitters.
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Submitted 8 August, 2023;
originally announced August 2023.
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MEMS for Photonic Integrated Circuits
Authors:
Carlos Errando-Herranz,
Alain Yuji Takabayashi,
Pierre Edinger,
Hamed Sattari,
Kristinn B. Gylfason,
Niels Quack
Abstract:
The field of microelectromechanical Systems (MEMS) for photonic integrated circuits (PICs) is reviewed. This field leverages mechanics at the nanometer to micrometer scale to improve existing components and introduce novel functionalities in PICs. This review covers the MEMS actuation principles and the mechanical tuning mechanisms for integrated photonics. The state of the art of MEMS tunable com…
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The field of microelectromechanical Systems (MEMS) for photonic integrated circuits (PICs) is reviewed. This field leverages mechanics at the nanometer to micrometer scale to improve existing components and introduce novel functionalities in PICs. This review covers the MEMS actuation principles and the mechanical tuning mechanisms for integrated photonics. The state of the art of MEMS tunable components in PICs is quantitatively reviewed and critically assessed with respect to suitability for large-scale integration in existing PIC technology platforms. MEMS provide a powerful approach to overcome current limitations in PIC technologies and to enable a new design dimension with a wide range of applications.
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Submitted 9 December, 2022;
originally announced December 2022.
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Two-dimensional Platinum Diselenide Waveguide-Integrated Infrared Photodetectors
Authors:
Shayan Parhizkar,
Maximilian Prechtl,
Anna Lena Giesecke,
Stephan Suckow,
Sophia Wahl,
Sebastian Lukas,
Oliver Hartwig,
Nour Negm,
Arne Quellmalz,
Kristinn B. Gylfason,
Daniel Schall,
Matthias Wuttig,
Georg S. Duesberg,
Max C. Lemme
Abstract:
Low cost, easily integrable photodetectors (PDs) for silicon (Si) photonics are still a bottleneck for photonic integrated circuits (PICs), especially for wavelengths above 1.8 $μ$m. Multilayered platinum diselenide (PtSe$_2$) is a semi-metallic two-dimensional (2D) material that can be synthesized below 450$°$C. We integrate PtSe$_2$ based PDs directly by conformal growth on Si waveguides. The PD…
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Low cost, easily integrable photodetectors (PDs) for silicon (Si) photonics are still a bottleneck for photonic integrated circuits (PICs), especially for wavelengths above 1.8 $μ$m. Multilayered platinum diselenide (PtSe$_2$) is a semi-metallic two-dimensional (2D) material that can be synthesized below 450$°$C. We integrate PtSe$_2$ based PDs directly by conformal growth on Si waveguides. The PDs operate at 1550 nm wavelength with a maximum responsivity of 11 mA/W and response times below 8.4 $μ$s. Fourier transform infrared spectroscopy (FTIR) in the wavelength range from 1.25 $μ$m to 28 $μ$m indicates the suitability of PtSe$_2$ for PDs far into the infrared wavelength range. Our PtSe$_2$ PDs integrated by direct growth outperform PtSe$_2$ PDs manufactured by standard 2D layer transfer. The combination of IR responsivity, chemical stability, selective and conformal growth at low temperatures, and the potential for high carrier mobility, make PtSe$_2$ an attractive 2D material for optoelectronics and PICs.
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Submitted 21 March, 2022; v1 submitted 17 October, 2021;
originally announced October 2021.
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Three-dimensional printing of silica-glass structures with submicrometric features
Authors:
Miku Laakso,
Po-Han Huang,
Pierre Edinger,
Oliver Hartwig,
Georg S. Duesberg,
Carlos Errando-Herranz,
Göran Stemme,
Kristinn B. Gylfason,
Frank Niklaus
Abstract:
Humanity's interest in manufacturing silica-glass objects extends back over three thousand years. Silica glass is resistant to heating and exposure to many chemicals, and it is transparent in a wide wavelength range. Due to these qualities, silica glass is used for a variety of applications that shape our modern life, such as optical fibers in medicine and telecommunications. However, its chemical…
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Humanity's interest in manufacturing silica-glass objects extends back over three thousand years. Silica glass is resistant to heating and exposure to many chemicals, and it is transparent in a wide wavelength range. Due to these qualities, silica glass is used for a variety of applications that shape our modern life, such as optical fibers in medicine and telecommunications. However, its chemical stability and brittleness impede the structuring of silica glass, especially on the small scale. Techniques for three-dimensional (3D) printing of silica glass, such as stereolithography and direct ink writing, have recently been demonstrated, but the achievable minimum feature size is several tens of micrometers. While submicrometric silica-glass structures have many interesting applications, for example in micro-optics, they are currently manufactured using lithography techniques, which severely limits the 3D shapes that can be realized. Here, we show 3D printing of optically transparent silica-glass structures with submicrometric features. We achieve this by cross-linking hydrogen silsesquioxane to silica glass using nonlinear absorption of laser light followed by the dissolution of the unexposed material. We print a functional microtoroid resonator with out-of-plane fiber couplers to demonstrate the new possibilities for designing and building silica-glass microdevices in 3D.
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Submitted 14 May, 2020;
originally announced May 2020.
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Carbon dioxide absorption spectroscopy with a mid-infrared silicon photonic waveguide
Authors:
Floria Ottonello-Briano,
Carlos Errando-Herranz,
Henrik Rödjegård,
Hans Martin,
Hans Sohlström,
Kristinn B. Gylfason
Abstract:
Carbon dioxide is a vital gas for life on Earth, a waste product of human activities, and widely used in agriculture and industry. Its accurate sensing is therefore of great interest. Optical sensors exploiting the mid-infrared light absorption of CO$_{\mathrm{2}}$ provide high selectivity, but their large size and high cost limit their use. Here, we demonstrate CO$_{\mathrm{2}}$ gas sensing at 4.…
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Carbon dioxide is a vital gas for life on Earth, a waste product of human activities, and widely used in agriculture and industry. Its accurate sensing is therefore of great interest. Optical sensors exploiting the mid-infrared light absorption of CO$_{\mathrm{2}}$ provide high selectivity, but their large size and high cost limit their use. Here, we demonstrate CO$_{\mathrm{2}}$ gas sensing at 4.2 $μ$m wavelength using an integrated silicon waveguide, featuring a sensitivity to CO$_{\mathrm{2}}$ of 44 % that of free-space sensing. The suspended waveguide is fabricated on a silicon-on-insulator substrate by a single-lithography-step process, and we route it into a mid-infrared photonic circuit for on-chip-referenced gas measurements. Its demonstrated performance and its simple and scalable fabrication make our waveguide ideal for integration in miniaturized CO$_{\mathrm{2}}$ sensors for distributed environmental monitoring, personal safety, medical, and high-volume consumer applications.
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Submitted 16 March, 2020; v1 submitted 16 July, 2019;
originally announced July 2019.
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Low-power optical beam steering by microelectromechanical waveguide gratings
Authors:
Carlos Errando-Herranz,
Nicolas Le Thomas,
Kristinn B. Gylfason
Abstract:
Optical beam steering is key for optical communications, laser mapping (LIDAR), and medical imaging. For these applications, integrated photonics is an enabling technology that can provide miniaturized, lighter, lower cost, and more power efficient systems. However, common integrated photonic devices are too power demanding. Here, we experimentally demonstrate, for the first time, beam steering by…
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Optical beam steering is key for optical communications, laser mapping (LIDAR), and medical imaging. For these applications, integrated photonics is an enabling technology that can provide miniaturized, lighter, lower cost, and more power efficient systems. However, common integrated photonic devices are too power demanding. Here, we experimentally demonstrate, for the first time, beam steering by microelectromechanical (MEMS) actuation of a suspended silicon photonic waveguide grating. Our device shows up to 5.6° beam steering with 20 V actuation and a power consumption below the $μ$W level, i.e. more than 5 orders of magnitude lower power consumption than previous thermo-optic tuning methods. The novel combination of MEMS with integrated photonics presented in this work lays ground for the next generation of power-efficient optical beam steering systems.
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Submitted 5 February, 2019; v1 submitted 12 September, 2018;
originally announced September 2018.
