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Demonstration of a-Si metalenses on a 12-inch glass wafer by CMOS-compatible technology
Authors:
Ting Hu,
Qize Zhong,
Nanxi Li,
Yuan Dong,
Yuan Hsing Fu,
Zhengji Xu,
Dongdong Li,
Vladimir Bliznetsov,
Keng Heng Lai,
Shiyang Zhu,
Qunying Lin,
Yuandong Gu,
Navab Singh,
Dim-Lee Kwong
Abstract:
Metalenses built up by artificial sub-wavelength nanostructures have shown the capability of realizing light focusing with miniature lens size. To date, most of the reported metalenses were patterned using electron beam lithography (EBL), which requires long processing time and is not suitable for mass production. Here, we demonstrate an amorphous silicon (a-Si) metalens on a 12-inch glass wafer v…
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Metalenses built up by artificial sub-wavelength nanostructures have shown the capability of realizing light focusing with miniature lens size. To date, most of the reported metalenses were patterned using electron beam lithography (EBL), which requires long processing time and is not suitable for mass production. Here, we demonstrate an amorphous silicon (a-Si) metalens on a 12-inch glass wafer via the 193 nm ArF deep UV immersion lithography, with critical dimension (CD) as small as 100 nm. The layer transfer technology is developed to solve the glass wafer handling issue in complementary metal-oxide-semiconductor (CMOS) fabrication line. The measured numerical aperture (NA) is 0.494 with a beam spot size of 1.26 μm, which agrees well with the simulation results. The focusing efficiency of 29.2% is observed at the designed wavelength of 940 nm. In addition, the metalens is applied in an imaging system, which further verifies its focusing functionality.
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Submitted 11 June, 2019;
originally announced June 2019.
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Lasing action in active dielectric nanoantenna arrays
Authors:
Son Tung Ha,
Yuan Hsing Fu,
Naresh Kumar Emani,
Zhenying Pan,
Reuben M. Bakker,
Ramon Paniagua-Dominguez,
Arseniy I. Kuznetsov
Abstract:
Directional lasing, with a low threshold and high quality factor, in active dielectric nanoantenna arrays is demonstrated. This is achieved through a leaky resonance excited in coupled gallium arsenide (GaAs) nanopillars. The leaky resonance is formed by partially breaking a bound state in the continuum (BIC) generated by the collective, vertical electric dipole resonances excited in the nanopilla…
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Directional lasing, with a low threshold and high quality factor, in active dielectric nanoantenna arrays is demonstrated. This is achieved through a leaky resonance excited in coupled gallium arsenide (GaAs) nanopillars. The leaky resonance is formed by partially breaking a bound state in the continuum (BIC) generated by the collective, vertical electric dipole resonances excited in the nanopillars for sub-diffractive arrays. By opening an unprotected, diffractive channel along one of the periods of the array one can control the directionality of the emitted light without sacrificing the high Q associated with the BIC mode, thus achieving directional lasing. A quality factor Q = 2750 is achieved at a controlled angle of emission of ~ 3 degrees with respect to the normal of the array with a pumping fluence as low as 10 uJ/cm^2. We demonstrate the possibility to control the lasing directivity and wavelength by changing the geometrical parameters of the nanoantenna array, and by tuning the gain spectrum of GaAs with temperature. Lasing action is demonstrated at different wavelengths and emission at different angles, which can be as large as 25 degrees to the normal. The obtained results provide guidelines for achieving surface emitting laser devices based on active dielectric nanoantennas that are compact and highly transparent.
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Submitted 27 March, 2018;
originally announced March 2018.
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A Metalens with Near-Unity Numerical Aperture
Authors:
Ramon Paniagua-Dominguez,
Ye Feng Yu,
Egor Khaidarov,
Sumin Choi,
Victor Leong,
Reuben M. Bakker,
Xinan Liang,
Yuan Hsing Fu,
Vytautas Valuckas,
Leonid A. Krivitsky,
Arseniy I. Kuznetsov
Abstract:
The numerical aperture (NA) of a lens determines its ability to focus light and its resolving capability. Having a large NA is a very desirable quality for applications requiring small light-matter interaction volumes or large angular collections. Traditionally, a large NA lens based on light refraction requires precision bulk optics that ends up being expensive and is thus also a specialty item.…
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The numerical aperture (NA) of a lens determines its ability to focus light and its resolving capability. Having a large NA is a very desirable quality for applications requiring small light-matter interaction volumes or large angular collections. Traditionally, a large NA lens based on light refraction requires precision bulk optics that ends up being expensive and is thus also a specialty item. In contrast, metasurfaces allow the lens designer to circumvent those issues producing high NA lenses in an ultra-flat fashion. However, so far, these have been limited to numerical apertures on the same order of traditional optical components, with experimentally reported values of NA <0.9. Here we demonstrate, both numerically and experimentally, a new approach that results in a diffraction limited flat lens with a near-unity numerical aperture (NA>0.99) and sub-wavelength thickness (~λ/3), operating with unpolarized light at 715 nm. To demonstrate its imaging capability, the designed lens is applied in a confocal configuration to map color centers in sub-diffractive diamond nanocrystals. This work, based on diffractive elements able to efficiently bend light at angles as large as 82°, represents a step beyond traditional optical elements and existing flat optics, circumventing the efficiency drop associated to the standard, phase mapping approach.
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Submitted 10 January, 2018; v1 submitted 2 May, 2017;
originally announced May 2017.
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Generalized Brewster-Kerker effect in dielectric metasurfaces
Authors:
Ramon Paniagua-Dominguez,
Ye Feng Yu,
Andrey E. Miroschnichenko,
Leonid A. Krivitsky,
Yuan Hsing Fu,
Vytautas Valuckas,
Leonard Gonzaga,
Yeow Teck Toh,
Anthony Yew Seng Kay,
Boris Luk'yanchuk,
Arseniy I. Kuznetsov
Abstract:
Polarization is one of the key properties defining the state of light. It was discovered in the early 19th century by Brewster, among others, while studying light reflected from materials at different angles. These studies led to the first polarizers, based on Brewster's effect. One of the most active trends in photonics now is devoted to the study of miniaturized, sub-wavelength devices exhibitin…
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Polarization is one of the key properties defining the state of light. It was discovered in the early 19th century by Brewster, among others, while studying light reflected from materials at different angles. These studies led to the first polarizers, based on Brewster's effect. One of the most active trends in photonics now is devoted to the study of miniaturized, sub-wavelength devices exhibiting similar, or even improved, functionalities compared to those achieved with bulk optical elements. In the present work, it is theoretically predicted that a properly designed all-dielectric metasurface exhibits a generalized Brewster effect potentially for any angle, wavelength and polarization of choice. The effect is experimentally demonstrated for an array of silicon nanodisks at visible wavelengths. The underlying physics of this effect can be understood in terms of the suppressed scattering at certain angles that results from the interference between the electric and magnetic dipole resonances excited in the nanoparticles, predicted by Kerker in early 80s. This reveals deep connection of Kerker's and Brewster's legacies and opens doors for Brewster phenomenon to new applications in photonics, which are not bonded to a specific polarization or angle of incidence.
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Submitted 27 June, 2015;
originally announced June 2015.
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Split-ball resonator
Authors:
Arseniy I. Kuznetsov,
Andrey E. Miroshnichenko,
Yuan Hsing Fu,
Vignesh Viswanathan,
Mohsen Rahmani,
Vytautas Valuckas,
Zhen Ying Pan,
Yuri Kivshar,
Daniel S. Pickard,
Boris Lukiyanchuk
Abstract:
We introduce a new concept of split-ball resonator and demonstrate a strong magnetic dipole response for both gold and silver spherical plasmonic nanoparticles with nanometer-scale cuts. Tunability of the magnetic dipole resonance throughout the visible spectral range is demonstrated by changing the depth and width of the nanoscale cut. We realize this novel concept experimentally by employing the…
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We introduce a new concept of split-ball resonator and demonstrate a strong magnetic dipole response for both gold and silver spherical plasmonic nanoparticles with nanometer-scale cuts. Tunability of the magnetic dipole resonance throughout the visible spectral range is demonstrated by changing the depth and width of the nanoscale cut. We realize this novel concept experimentally by employing the laser-induced transfer method to produce near-perfect spheres and helium ion beam milling to make cuts with the nanometer resolution. Due to high quality of the spherical particle shape governed by strong surface tension forces during the laser transfer process and clean, straight side walls of the cut made by helium ion milling, the magnetic resonance is observed at 600 nm in gold and at 565 nm in silver nanoparticles. Structuring arbitrary features on the surface of nanoscale spherical resonators provides new ways for engineering hybrid resonant modes and ultra-high near-field enhancement.
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Submitted 24 November, 2013; v1 submitted 26 September, 2013;
originally announced September 2013.
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Directional visible light scattering by silicon nanoparticles
Authors:
Yuan Hsing Fu,
Arseniy I. Kuznetsov,
Andrey E. Miroshnichenko,
Ye Feng Yu,
Boris Lukiyanchuk
Abstract:
Directional light scattering by spherical silicon nanoparticles in the visible spectral range is experimentally demonstrated for the first time. These unique scattering properties arise due to simultaneous excitation and mutual interference of magnetic and electric dipole resonances inside a single nanosphere. Directivity of the far-field radiation pattern can be controlled by changing light wavel…
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Directional light scattering by spherical silicon nanoparticles in the visible spectral range is experimentally demonstrated for the first time. These unique scattering properties arise due to simultaneous excitation and mutual interference of magnetic and electric dipole resonances inside a single nanosphere. Directivity of the far-field radiation pattern can be controlled by changing light wavelength and the nanoparticle size. Forward-to-backward scattering ratio above 6 can be experimentally obtained at visible wavelengths. These unique properties of silicon nanoparticles make them promising for design of novel low-loss visible- and telecom-range nanoantenna devices.
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Submitted 13 December, 2012;
originally announced December 2012.
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Magnetic light
Authors:
Arseniy I. Kuznetsov,
Andrey E. Miroshnichenko,
Yuan Hsing Fu,
JingBo Zhang,
Boris Luk'yanchuk
Abstract:
Spherical silicon nanoparticles with sizes of a few hundreds of nanometers represent a unique optical system. According to theoretical predictions based on Mie theory they can exhibit strong magnetic resonances in the visible spectral range. The basic mechanism of excitation of such modes inside the nanoparticles is very similar to that of split-ring resonators, but with one important difference t…
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Spherical silicon nanoparticles with sizes of a few hundreds of nanometers represent a unique optical system. According to theoretical predictions based on Mie theory they can exhibit strong magnetic resonances in the visible spectral range. The basic mechanism of excitation of such modes inside the nanoparticles is very similar to that of split-ring resonators, but with one important difference that silicon nanoparticles have much smaller losses and are able to shift the magnetic resonance wavelength down to visible frequencies. We experimentally demonstrate for the first time that these nanoparticles have strong magnetic dipole resonance, which can be continuously tuned throughout the whole visible spectrum varying particle size and visually observed by means of dark-field optical microscopy. These optical systems open up new perspectives for fabrication of low-loss optical metamaterials and nanophotonic devices.
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Submitted 8 May, 2012;
originally announced May 2012.
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The light-well: A tuneable free-electron light source on a chip
Authors:
G. Adamo,
Y. H. Fu,
C-M. Wang,
K. F. MacDonald,
D. P. Tsai,
F. J. Garcia de Abajo,
N. I. Zheludev
Abstract:
The passage of a free-electron beam through a nano-hole in a periodically layered metal/dielectric structure creates a new type of tuneable, nanoscale radiation source - a 'light-well'. With a lateral size of just a few hundred nanometers, and an emission intensity of ~200 W/cm^2 such light-wells may be employed in nanophotonic circuits as chip-scale sources, or in densely packed ensembles for o…
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The passage of a free-electron beam through a nano-hole in a periodically layered metal/dielectric structure creates a new type of tuneable, nanoscale radiation source - a 'light-well'. With a lateral size of just a few hundred nanometers, and an emission intensity of ~200 W/cm^2 such light-wells may be employed in nanophotonic circuits as chip-scale sources, or in densely packed ensembles for optical memory and display applications.
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Submitted 13 July, 2009;
originally announced July 2009.
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Coherent and incoherent metamaterials and the order-disorder transitions
Authors:
Nikitas Papasimakis,
Vassili A. Fedotov,
Yuan Hsing Fu,
Din Ping Tsai,
Nikolay I. Zheludev
Abstract:
We demonstrate a new class of "coherent" metamaterials, where a regular ensemble of meta-molecules shows a collective, i.e. coherent, narrow band resonant response, while disordering the ensemble leads to broadening and eventually disappearance of the resonance. We draw parallels between the observed collective behavior of meta-molecules and the Mossbauer effect and notice certain remarkable sim…
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We demonstrate a new class of "coherent" metamaterials, where a regular ensemble of meta-molecules shows a collective, i.e. coherent, narrow band resonant response, while disordering the ensemble leads to broadening and eventually disappearance of the resonance. We draw parallels between the observed collective behavior of meta-molecules and the Mossbauer effect and notice certain remarkable similarities with the phase transitions of ferromagnetic systems.
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Submitted 14 September, 2008;
originally announced September 2008.
