Silicon microcavity arrays with open access and a finesse of half a million
Authors:
G. Wachter,
S. Kuhn,
S. Minniberger,
C. Salter,
P. Asenbaum,
J. Millen,
M. Schneider,
J. Schalko,
U. Schmid,
A. Felgner,
D. Hüser,
M. Arndt,
M. Trupke
Abstract:
Optical resonators are increasingly important tools in science and technology. Their applications range from laser physics, atomic clocks, molecular spectroscopy, and single-photon generation to the detection, trapping and cooling of atoms or nano-scale objects. Many of these applications benefit from strong mode confinement and high optical quality factors, making small mirrors of high surface-qu…
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Optical resonators are increasingly important tools in science and technology. Their applications range from laser physics, atomic clocks, molecular spectroscopy, and single-photon generation to the detection, trapping and cooling of atoms or nano-scale objects. Many of these applications benefit from strong mode confinement and high optical quality factors, making small mirrors of high surface-quality desirable. Building such devices in silicon yields ultra-low absorption at telecom wavelengths and enables integration of micro-structures with mechanical, electrical and other functionalities. Here, we push optical resonator technology to new limits by fabricating lithographically aligned silicon mirrors with ultra-smooth surfaces, small and wellcontrolled radii of curvature, ultra-low loss and high reflectivity. We build large arrays of microcavities with finesse greater than F = 500,000 and a mode volume of 330 femtoliters at wavelengths near 1550 nm. Such high-quality micro-mirrors open up a new regime of optics and enable unprecedented explorations of strong coupling between light and matter.
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Submitted 16 January, 2019;
originally announced April 2019.
