Showing 1–1 of 1 results for author: De Vincenzo, P

3-D Self-Assembled Soi Mems: An Example of Multiphysics Simulation

Authors: C. Mendez, C. Louis, S. Paquay, P. De Vincenzo, I. Klapka, V. Rochus, F. Iker, Nicolas André, J. -P. Raskin

Abstract: MEMS devices are typical systems where multiphysics simulations are unavoidable. In this work, we present possible applications of 3-D self-assembled SOI (Silicon-on-Insulator) MEMS such as, for instance, thermal actuators and flow sensors. The numerical simulations of these microsystems are presented. Structural and thermal parts have to be strongly coupled for correctly describing the fabricat… ▽ More MEMS devices are typical systems where multiphysics simulations are unavoidable. In this work, we present possible applications of 3-D self-assembled SOI (Silicon-on-Insulator) MEMS such as, for instance, thermal actuators and flow sensors. The numerical simulations of these microsystems are presented. Structural and thermal parts have to be strongly coupled for correctly describing the fabrication process and for simulating the behavior of these 3-D SOI MEMS. △ Less

Submitted 21 November, 2007; originally announced November 2007.

Comments: Submitted on behalf of TIMA Editions (http://irevues.inist.fr/tima-editions)

Journal ref: Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2006, Stresa, Lago Maggiore : Italie (2006)