Quantifying stress distribution in ultra-large graphene drums through mode shape imaging
Authors:
Ali Sarafraz,
Hanqing Liu,
Katarina Cvetanović,
Marko Spasenović,
Sten Vollebregt,
Tomas Manzaneque Garcia,
Peter G. Steeneken,
Farbod Alijani,
Gerard J. Verbiest
Abstract:
Suspended drums made of 2D materials hold potential for sensing applications. However, the industrialization of these applications is hindered by significant device-to-device variations presumably caused by non-uniform stress distributions induced by the fabrication process. Here we introduce a new methodology to determine the stress distribution from their mechanical resonance frequencies and cor…
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Suspended drums made of 2D materials hold potential for sensing applications. However, the industrialization of these applications is hindered by significant device-to-device variations presumably caused by non-uniform stress distributions induced by the fabrication process. Here we introduce a new methodology to determine the stress distribution from their mechanical resonance frequencies and corresponding mode shapes as measured by a laser Doppler vibrometer (LDV). To avoid limitations posed by the optical resolution of the LDV, we leverage a unique manufacturing process to create ultra-large graphene drums with diameters of up to 1000 um. We solve the inverse problem of a Föppl--von Kármán plate model by an iterative procedure to obtain the stress distribution within the drums from the experimental data. Our results show that the generally used uniform pre-tension assumption overestimates the pre-stress value, exceeding the averaged stress obtained by more than 47%. Moreover, it is is found that the reconstructed stress distributions are bi-axial, which likely originates from the transfer process. The introduced metholodogy allows one to estimate the tension distribution in drum resonators from their mechanical response and thereby paves the way for linking the used fabrication processes to the resulting device performance.
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Submitted 2 November, 2023; v1 submitted 1 November, 2023;
originally announced November 2023.
Ultra-sensitive graphene membranes for microphone applications
Authors:
Gabriele Baglioni,
Roberto Pezone,
Sten Vollebregt,
Katarina Cvetanovic,
Marko Spasenovic,
Dejan Todorovic,
Hanqing Liu,
Gerard J. Verbiest,
Herre S. J. van der Zant,
y,
Peter G. Steeneken
Abstract:
Microphones exploit the motion of suspended membranes to detect sound waves. Since the microphone performance can be improved by reducing the thickness and mass of its sensing membrane, graphene-based microphones are expected to outperform state-of-the-art microelectromechanical (MEMS) microphones and allow further miniaturization of the device. Here, we present a laser vibrometry study of the aco…
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Microphones exploit the motion of suspended membranes to detect sound waves. Since the microphone performance can be improved by reducing the thickness and mass of its sensing membrane, graphene-based microphones are expected to outperform state-of-the-art microelectromechanical (MEMS) microphones and allow further miniaturization of the device. Here, we present a laser vibrometry study of the acoustic response of suspended multilayer graphene membranes for microphone applications. We address performance parameters relevant for acoustic sensing, including mechanical sensitivity, limit of detection and nonlinear distortion, and discuss the trade-offs and limitations in the design of graphene microphones. We demonstrate superior mechanical sensitivities of the graphene membranes, reaching more than 2 orders of magnitude higher compliances than commercial MEMS devices, and report a limit of detection as low as 15 dBSPL, which is 10 - 15 dB lower than that featured by current MEMS microphones.
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Submitted 7 November, 2022;
originally announced November 2022.
