Showing 1–1 of 1 results for author: Chekmazov, S V

Local laser oxidation of titanium film for post-fabrication trimming of photonic integrated circuits

Authors: Aleksandr V. Tronev, Mikhail V. Parfenov, Sergey I. Bozhko, Andrey M. Ionov, Rais N. Mozhchil, Sergey V. Chekmazov, Petr M. Agruzov, Igor V. Ilichev, Aleksandr V. Shamrai

Abstract: Local laser oxidation of a thin titanium film is considered as a means of a precise adjustment of losses and effective refractive index of dielectric optical waveguides. A fine phase control of an operating point and extinction ratio enhancement up to 57 dB were demonstrated using an integrated optical Ti:LiNbO3 Mach-Zehnder modulator. This technique only slightly affects the dielectric waveguide… ▽ More Local laser oxidation of a thin titanium film is considered as a means of a precise adjustment of losses and effective refractive index of dielectric optical waveguides. A fine phase control of an operating point and extinction ratio enhancement up to 57 dB were demonstrated using an integrated optical Ti:LiNbO3 Mach-Zehnder modulator. This technique only slightly affects the dielectric waveguide material and is very promising for a high precision permanent trimming of photonic devices based on dielectric waveguides of different material platforms and fabrication technologies. △ Less

Submitted 24 September, 2022; v1 submitted 2 November, 2021; originally announced November 2021.

Comments: 15 pages, 10 figures, published in Optical Materials Express

Journal ref: Opt. Mater. Express 12 (2022) 4072-4087