Showing 1–1 of 1 results for author: Brennan, S M

An instrument for advanced in situ x-ray studies of metal-organic vapor phase epitaxy of III-nitrides

Authors: Guangxu Ju, Matthew J. Highland, Angel Yanguas-Gil, Carol Thompson, Jeffrey A. Eastman, Hua Zhou, Sean M. Brennan, G. Brian Stephenson, Paul H. Fuoss

Abstract: We describe an instrument that exploits the ongoing revolution in synchrotron sources, optics, and detectors to enable in situ studies of metal-organic vapor phase epitaxy (MOVPE) growth of III-nitride materials using coherent x-ray methods. The system includes high-resolution positioning of the sample and detector including full rotations, an x-ray transparent chamber wall for incident and diffra… ▽ More We describe an instrument that exploits the ongoing revolution in synchrotron sources, optics, and detectors to enable in situ studies of metal-organic vapor phase epitaxy (MOVPE) growth of III-nitride materials using coherent x-ray methods. The system includes high-resolution positioning of the sample and detector including full rotations, an x-ray transparent chamber wall for incident and diffracted beam access over a wide angular range, and minimal thermal sample motion, giving the sub-micron positional stability and reproducibility needed for coherent x-ray studies. The instrument enables surface x-ray photon correlation spectroscopy, microbeam diffraction, and coherent diffraction imaging of atomic-scale surface and film structure and dynamics during growth, to provide fundamental understanding of MOVPE processes. △ Less

Submitted 14 May, 2017; v1 submitted 9 February, 2017; originally announced February 2017.

Comments: 13 pages, 13 figures, published in RSI v2 revision, clarified several points for reader from suggestions of referees, fixed typo Please cite paper as : G. Ju, et al., Review of Scientific Instruments 88, 035113 (2017)

Journal ref: Review of Scientific Instruments 88, 035113 (2017)