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Non-Destructive, High-Resolution, Chemically Specific, 3D Nanostructure Characterization using Phase-Sensitive EUV Imaging Reflectometry
Authors:
Michael Tanksalvala,
Christina L. Porter,
Yuka Esashi,
Bin Wang,
Nicholas W. Jenkins,
Zhe Zhang,
Galen P. Miley,
Joshua L. Knobloch,
Brendan McBennett,
Naoto Horiguchi,
Sadegh Yazdi,
Jihan Zhou,
Matthew N. Jacobs,
Charles S. Bevis,
Robert M. Karl Jr.,
Peter Johnsen,
David Ren,
Laura Waller,
Daniel E. Adams,
Seth L. Cousin,
Chen-Ting Liao,
Jianwei Miao,
Michael Gerrity,
Henry C. Kapteyn,
Margaret M. Murnane
Abstract:
Next-generation nano and quantum devices have increasingly complex 3D structure. As the dimensions of these devices shrink to the nanoscale, their performance is often governed by interface quality or precise chemical or dopant composition. Here we present the first phase-sensitive extreme ultraviolet imaging reflectometer. It combines the excellent phase stability of coherent high-harmonic source…
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Next-generation nano and quantum devices have increasingly complex 3D structure. As the dimensions of these devices shrink to the nanoscale, their performance is often governed by interface quality or precise chemical or dopant composition. Here we present the first phase-sensitive extreme ultraviolet imaging reflectometer. It combines the excellent phase stability of coherent high-harmonic sources, the unique chemical- and phase-sensitivity of extreme ultraviolet reflectometry, and state-of-the-art ptychography imaging algorithms. This tabletop microscope can non-destructively probe surface topography, layer thicknesses, and interface quality, as well as dopant concentrations and profiles. High-fidelity imaging was achieved by implementing variable-angle ptychographic imaging, by using total variation regularization to mitigate noise and artifacts in the reconstructed image, and by using a high-brightness, high-harmonic source with excellent intensity and wavefront stability. We validate our measurements through multiscale, multimodal imaging to show that this technique has unique advantages compared with other techniques based on electron and scanning-probe microscopies.
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Submitted 28 March, 2024;
originally announced April 2024.
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Visualizing Magnetic Order in Self-Assembly of Superparamagnetic Nanoparticles
Authors:
Xingyuan Lu,
Ji Zou,
Minh Pham,
Arjun Rana,
Chen-Ting Liao,
Emma Cating Subramanian,
Xuefei Wu,
Yuan Hung Lo,
Charles S. Bevis,
Robert M. Karl Jr,
Serban Lepadatu,
Young-Sang Yu,
Yaroslav Tserkovnyak,
Thomas P. Russell,
David A. Shapiro,
Henry C. Kapteyn,
Margaret M. Murnane,
Robert Streubel,
Jianwei Miao
Abstract:
We use soft x-ray vector-ptychographic tomography to determine the three-dimensional magnetization field in superparamagnetic nanoparticles self-assembled at the liquid-liquid interface and reveal the magnetic order induced by layered structure. The spins in individual nanoparticles become more aligned with increasing number of layers, resulting in a larger net magnetization. Our experimental resu…
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We use soft x-ray vector-ptychographic tomography to determine the three-dimensional magnetization field in superparamagnetic nanoparticles self-assembled at the liquid-liquid interface and reveal the magnetic order induced by layered structure. The spins in individual nanoparticles become more aligned with increasing number of layers, resulting in a larger net magnetization. Our experimental results show a magnetic short-range order in the monolayer due to the proliferation of thermally induced magnetic vortices and a magnetic long-range order in the bilayer and trilayer, stemming from the strengthened dipolar interactions that effectively suppress thermal fluctuations. We also observe a screening effect of magnetic vortices and the attractive interaction between the magnetic vortices with opposite topological charges. Our work demonstrates the crucial role of layered structure in shaping the magnetization of nanoparticle assemblies, providing new opportunities to modulate these properties through strategic layer engineering.
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Submitted 2 January, 2024;
originally announced January 2024.
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High-resolution ptychographic imaging at a seeded free-electron laser source using OAM beams
Authors:
M. Pancaldi,
F. Guzzi,
C. S. Bevis,
M. Manfredda,
J. Barolak,
S. Bonetti,
I. Bykova,
D. De Angelis,
G. De Ninno,
M. Fanciulli,
L. Novinec,
E. Pedersoli,
A. Ravindran,
B. Rösner,
C. David,
T. Ruchon,
A. Simoncig,
M. Zangrando,
D. E. Adams,
P. Vavassori,
M. Sacchi,
G. Kourousias,
G. F. Mancini,
F. Capotondi
Abstract:
Electromagnetic waves possessing orbital angular momentum (OAM) are powerful tools for applications in optical communications, new quantum technologies and optical tweezers. Recently, they have attracted growing interest since they can be harnessed to detect peculiar helical dichroic effects in chiral molecular media and in magnetic nanostructures. In this work, we perform single-shot per position…
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Electromagnetic waves possessing orbital angular momentum (OAM) are powerful tools for applications in optical communications, new quantum technologies and optical tweezers. Recently, they have attracted growing interest since they can be harnessed to detect peculiar helical dichroic effects in chiral molecular media and in magnetic nanostructures. In this work, we perform single-shot per position ptychography on a nanostructured object at a seeded free-electron laser, using extreme ultraviolet OAM beams of different topological charge order $\ell$ generated with spiral zone plates. By controlling $\ell$, we demonstrate how the structural features of OAM beam profile determine an improvement of about 30% in image resolution with respect to conventional Gaussian beam illumination. This result extends the capabilities of coherent diffraction imaging techniques, and paves the way for achieving time-resolved high-resolution (below 100 nm) microscopy on large area samples.
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Submitted 18 October, 2023;
originally announced October 2023.
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Direct observation of 3D topological spin textures and their interactions using soft x-ray vector ptychography
Authors:
Arjun Rana,
Chen-Ting Liao,
Ezio Iacocca,
Ji Zou,
Minh Pham,
Emma-Elizabeth Cating Subramanian,
Yuan Hung Lo,
Sinéad A. Ryan,
Xingyuan Lu,
Charles S. Bevis,
Robert M. Karl Jr,
Andrew J. Glaid,
Young-Sang Yu,
Pratibha Mahale,
David A. Shapiro,
Sadegh Yazdi,
Thomas E. Mallouk,
Stanley J. Osher,
Henry C. Kapteyn,
Vincent H. Crespi,
John V. Badding,
Yaroslav Tserkovnyak,
Margaret M. Murnane,
Jianwei Miao
Abstract:
Magnetic topological defects are energetically stable spin configurations characterized by symmetry breaking. Vortices and skyrmions are two well-known examples of 2D spin textures that have been actively studied for both fundamental interest and practical applications. However, experimental evidence of the 3D spin textures has been largely indirect or qualitative to date, due to the difficulty of…
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Magnetic topological defects are energetically stable spin configurations characterized by symmetry breaking. Vortices and skyrmions are two well-known examples of 2D spin textures that have been actively studied for both fundamental interest and practical applications. However, experimental evidence of the 3D spin textures has been largely indirect or qualitative to date, due to the difficulty of quantitively characterizing them within nanoscale volumes. Here, we develop soft x-ray vector ptychography to quantitatively image the 3D magnetization vector field in a frustrated superlattice with 10 nm spatial resolution. By applying homotopy theory to the experimental data, we quantify the topological charge of hedgehogs and anti-hedgehogs as emergent magnetic monopoles and probe their interactions inside the frustrated superlattice. We also directly observe virtual hedgehogs and anti-hedgehogs created by magnetically inert voids. We expect that this new quantitative imaging method will open the door to study 3D topological spin textures in a broad class of magnetic materials. Our work also demonstrates that magnetically frustrated superlattices could be used as a new platform to investigate hedgehog interactions and dynamics and to exploit optimized geometries for information storage and transport applications.
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Submitted 26 April, 2021;
originally announced April 2021.
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Quantitative Chemically-Specific Coherent Diffractive Imaging of Buried Interfaces using a Tabletop EUV Nanoscope
Authors:
Elisabeth R. Shanblatt,
Christina L. Porter,
Dennis F. Gardner,
Giulia F. Mancini,
Robert M. Karl Jr.,
Michael D. Tanksalvala,
Charles S. Bevis,
Victor H. Vartanian,
Henry C. Kapteyn,
Daniel E. Adams,
Margaret M. Murnane
Abstract:
Characterizing buried layers and interfaces is critical for a host of applications in nanoscience and nano-manufacturing. Here we demonstrate non-invasive, non-destructive imaging of buried interfaces using a tabletop, extreme ultraviolet (EUV), coherent diffractive imaging (CDI) nanoscope. Copper nanostructures inlaid in SiO2 are coated with 100 nm of aluminum, which is opaque to visible light an…
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Characterizing buried layers and interfaces is critical for a host of applications in nanoscience and nano-manufacturing. Here we demonstrate non-invasive, non-destructive imaging of buried interfaces using a tabletop, extreme ultraviolet (EUV), coherent diffractive imaging (CDI) nanoscope. Copper nanostructures inlaid in SiO2 are coated with 100 nm of aluminum, which is opaque to visible light and thick enough that neither optical microscopy nor atomic force microscopy can image the buried interfaces. Short wavelength (29 nm) high harmonic light can penetrate the aluminum layer, yielding high-contrast images of the buried structures. Moreover, differences in the absolute reflectivity of the interfaces before and after coating reveal the formation of interstitial diffusion and oxidation layers at the Al-Cu and Al-SiO2 boundaries. Finally, we show that EUV CDI provides a unique capability for quantitative, chemically-specific imaging of buried structures, and the material evolution that occurs at these buried interfaces, compared with all other approaches.
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Submitted 3 March, 2016;
originally announced March 2016.
